• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.114-114
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• 2008

반도체 device의 성능을 향상시키기 위하여 패턴은 더욱 더 고 집적화 되고 배선 또한 다층배선 구조를 가지게 되었으며 요구되는 선폭 또한 더욱 미세화 되어 CMP 공정이 도입되게 되었다. 이러한 CMP 공정에 사용되는 소모품으로는 크게 세 가지의 중요한 부분으로 나눌 수 있다. 그것은 slurry와 pad, conditioner이다. 그중에 pad conditioning 공정은 CMP 공정시 pad의 마모에 따라 감소하는 removal rate(RR)값을 회복시키기 위한 공정으로 마모된 pad의 표면을 활성화 시켜주는 중요한 공정이다. 하지만 pad conditioning 공정을 장시간 진행하게 되면 conditioner 표면에 오염물이 발생하게 되며, 오염물로 인하여 wafer표면에 scratch 및 defect을 발생시키는 원인이 될 수 있다. 이러한 문제점을 보완하기 위하여 conditioner의 표면을 변화시켜 공정중의 오염이 발생하지 않도록 하는 것이 중요하다. 본 논문에서는 oxide CMP 실험을 통하여 conditioner표면에 오염물이 발생함을 확인하였으며 energy dispersive spectroscopy(EDS) 분석을 통하여 주오염물의 성분이 oxide slurry중 silica임을 확인하였다. Conditioner의 표면을 소수성으로 만들기 위하여 self assembled monolayer(SAM) 방법을 이용하여 표면에 코팅을 하였으며, 소수성 박막이 코팅된 conditioner와 코팅되지 않은 conditioner의 비교 실험을 통하여 오염 정도를 비교하였다.

• 한국환경과학회지
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• 제6권6호
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• pp.679-688
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• 1997

In order to analyze the water quality variation of surface water around the Sudokwon landfill site, seasonal variations of water temperature, pH, DO. HOD, COD, SS, NH3-N, NO2-N, and NO3-N were examined at 10 sites from January to December, 1996. It was found that the estimates of COD, DO. SS, and $NH_3-N$ were Increased compared with the results of environmental Impact assessment carried out In 1988. Higher estimates of COD, DO, and SS were due to Industrial and agricultural wastewater, and the Increase of NH3-N at Jangdo reservoir strate was due to the leachate from the landfill. In particular, the estimate of 55 was found to be increased by the soil wash from the landfill during the heavy rainy days.

• 환경영향평가
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• 제17권6호
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• pp.321-333
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• 2008

Considering risks and artificial enrichments of metals in the soils of the study area, the study aims to analyze geology, grain size and geochemistry. Geology is mainly composed of gneisses and phyllites of metamorphic rocks, sandstones, siltstones, shales, tuffs of sedimentary ones and granites and andesites of igneous ones in the area. In the area, mean contents of metals are not meaningful in accordance with petrogenesis. The soil textures of the area are of S, lS and sL of sandy soil, L, scL, cL of loam and C, zC and sC of clayey soil. Mean contents of Ni, Cr, Co and Cu are meaningfully high in loam and clayey soil relative to sandy soil, whereas Ni, Zn, Cd contents are higher in clayey soil than in loam. Those differences imply the metallic contents are dependent to grain size. Based on the metal contents in the soils of the study area, Cu and Zn in loams and Pb in sandy soils are corresponded to soil contamination warning standards, and As showing 75mg/kg of maximum content in loams is assigned to soil contamination countermeasure standards, respectively. Artificial enrichment factor minimized wall rock and grain size relations is over 1 in Cr, Ni and Cu, but the factor is below 1 in average of other metals.

• 한국지하수토양환경학회지:지하수토양환경
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• 제18권3호
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• pp.1-10
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• 2013

This study was performed to summarize application of ${\delta}^{13}C$, ${\delta}^{37}Cl$ and ${\delta}D$ of trichloroethylene (TCE) to studies on environmental forensic field regarding identification of TCE sources and evaluation of contribution of TCE to groundwater using data collected from literatures. ${\delta}^{13}C$, ${\delta}^{37}Cl$ and ${\delta}D$ of TCE give some information regarding sources of TCE because they show specific value according to manufacturing method. Also, TCE do not show a significant isotopic fractionation owing to adsorption and dilution. The isotopic fractionation mainly occurs by biodegradation. In addition, isotopic fractionation factor for TCE is different according to a kind of microorganism participated in biodegradation. However, the isotopic data of TCE have to be applied with chemical compositions of TCE and other hydrogeologic factors because isotopic fractionation of TCE is influenced by various factors.

• 한국수소및신에너지학회논문집
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• 제24권4호
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• pp.288-294
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• 2013

This gas analysis data come from the hydrogen which is produced by proton exchange membrane. Main impurities of hydrogen are methane, oxygen, nitrogen, carbon monoxide, and carbon dioxide. The concentration of impurities is ranged between 0.0191 to $315{\mu}mol/mol$ for each impurity. Methane contamination is believed from the electrode reaction between carbon doped electrode and produced hydrogen. Nitrogen contamination should take place the sampling process error, not from PEM hydrogen Production system.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.1507-1512
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.

• 자원환경지질
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• 제33권5호
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• pp.379-389
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• 2000

This study was focused on the investigation for the heavy metal contamination of soils derived from Yoecheon Industrial Complex in Chonnam Province. Total 201 soil samples including farmland, paddy, forest and playground soils were collected, extracted by 0.1N HCl and analyzed for Cd, Cu, Cr, Fe, Mn and Zn using AAS. Most pH values in soils were weak acidic ranges of 4-6, while some of them were over 8.0. Concentrations of Cd, Cu, Fe and Zn in the soils tend to be relatively high around the Au-Ag mine area, railroad stations and oil station, however, those of Cr, Mn and Pb show high at the northside of Pohang Steel Co (POSCO). Cadmium-Zn couples, and Cd-Zn and Zn-Cr couples have relatively good correlations in the farmland soils and paddy soils, respectively. Concentrations of Cd, Fe and Zn with depth tend to be higher in the top soils than in the bottom soils, but those of Cu and Pb do not show regular variations with depth.

• Food Science and Biotechnology
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• 제16권4호
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• pp.621-625
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• 2007

Staphylococcus aureus in Korean kimbab rolls was monitored seasonally in 4 major cities of Korea to investigate the risk of S. aureus in a pre-prepared meal. Thirty-five (28.6%) of 105 kimbab rolls purchased in winter were contaminated with S. aureus with an average level of 2.6 log CFU/g. Thirty-six (33.0%) of 109 kimbab rolls purchased in summer and autumn were contained S. aureus with an average level of 2.9 log CFU/g. Kimbab purchased in snack bars showed higher S. aureus contamination rates with the maximum level of 4.7 log CFU/g than that purchased in convenience stores. Of the raw materials in kimbab, uncooked perilla leaf had the highest contamination rate of S. aureus. Less than 50% of S. aureus isolated from kimbab produced enterotoxin and most of the staphylococcal enterotoxin produced by S. aureus in kimbab was type A.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2008년도 추계 학술발표회
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• pp.1098-1108
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• 2008

Batch type and column type experiments were performed in order to predict adsorption and movement within soil. Clay minerals montmorillonite and kaolinite were respectively added to paraquat which is a cationic compound with long residual time, 2,4-D which is an anionic compound with relatively short residual time and napropamide which is an amphoteric compound. Therefore, it is very important to determine the movements of toxic pollutants in the ground soil to establish measures to prevent soil grounds contamination and to restore contaminated soils effectively, because contamination of soil is getting severe due to these toxic wastes, industrial waste water, and agricultural chemicals, etc. Therefore, in this study, we have carried out column and batch experiments by using general toxic organic compounds as test samples in order to restore contaminated soils effectively as well as to prepare a basic data to develop absorbents that will remove various toxic organic compounds, with a grandiose purpose to prevent contaminations of soil and grounds due to various toxic organic compounds.

• 한국지하수토양환경학회지:지하수토양환경
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• 제16권1호
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• pp.51-61
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• 2011

Germination tests were conducted to determine the practical concentration levels at which plants can reproduce naturally during the phytoremediation of soils contaminated with a high concentration of petroleum hydrocarbons and heavy metals. The effects of humic acids on plant growth and soil physicochemical properties were also investigated. The results show that phytoremediation can be applied in soils contaminated by multiple contaminants at the former soil contamination potential level of Korean soil quality standards considering successful natural reproduction. It was observed that germination rates of Helianthus annuus and Festuca arundinacea were high after all treatments, and transplantation was more appropriate for Phragmites communis in phytoremediation. Humic acids had a positive effect on the growth of both aboveground and belowground biomass of herbaceous plants. Growth inhibition by multiple contaminants is more severe in the case of aboveground biomass. Germination and growth tests suggest that Helianthus annuus is a suitable phytoremediation plant for soils contaminated with a high concentration of petroleum hydrocarbons and heavy metals. The addition of humic acids also caused changes in the physicochemical properties of contaminated soils. An increase in the carbon and nitrogen content due to the addition of humic acids and a correlation between cation exchange capacity(CEC) and the organic matter content were observed.