• Title/Summary/Keyword: Co-Deposition Method

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초임계 증착법을 통한 실리카와 타이타니아 역 오팔의 제조 (Fabrication of Silica and Titania Inverse Opals via Supercritical Deposition)

  • 유혜민;임종성
    • 청정기술
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    • 제18권1호
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    • pp.38-42
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    • 2012
  • 정보 전달의 수단으로의 빛을 제어하는 기술에 대한 연구가 활발한 가운데, 최근 가장 각광 받고 있는 것이 광결정(Photonic crystals)을 갖는 물질이다. 이를 합성하는 다양한 방법 중에서 초임계 증착법(Supercritical deposition)을 사용하면, 복잡한 내부 구조물까지의 반응물의 침투가 용이하여 신속하고 효율적인 공정이 가능하다. 본 논문에서는 비독성, 비인화성 등으로 친환경 초임계 용매인 초임계 이산화탄소(Supercritical carbon dioxide) 분위기 하에서 고분자 콜로이드 주형에 금속 알콕사이드를 코팅하는 방법으로 매크로 기공을 갖는 역 오팔(Inverse opals) 구조물을 합성하였다. 반응온도와 압력은 $40^{\circ}C$와 80 bar로 고정하였으며, 반응 시간과 반응물의 비율을 조절하여 역 오팔의 구조의 변화를 살펴보았다. 실험에는 금속 알콕사이드로써 Tetraethyl orthosilicate (TEOS)와 Titanium (IV) isopropoxide (TTIP)가 사용되었으며, 각각을 통하여 실리카와 타이타니아 역 오팔을 합성할 수 있었다.

IBAD-MgO 템플릿을 이용한 SmBCO 박막선재의 제조 (Fabrication of SmBCO Coated Conductors using IBAD-MgO Template)

  • 하홍수;김호섭;양주생;정예현;김호겸;유권국;고락길;송규정;하동우;오상수;염도준;박찬;유상임;문승현;주진호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.30-31
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    • 2006
  • We have fabricated SmBCO coated conductor on IBAD-MgO substrates using unique co-evaporation method. The batch type co-deposition system was specially designed and named as EDDC(evaporation using drum m dual chamber) that is possible to deposit superconducting layer with different composition ratio at low temperature of $700^{\circ}C$. In this study, we have investigated the influence of SmBCO phase composition and texture of IBAD-MgO template on the critical current density. We have changed the deposition rates of Sm, Ba and Cu during co-evaporation to examine the optimal composition ratio shown better critical current density. The composition ratio and surface morphology of SmBCO coated conductors were analyzed by the EDX and SEM, respectively. A higher critical current density was measured at superconducting phase composition ratio of Ba deficiency, Sm or Cu rich compared to the Sm1Ba2Cu3Ox stoichiometry.

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Cobalt Oxide Nanorods Prepared by a Template-Free Method for Lithium Battery Application

  • Kim, Seong-Jun;Kim, Eun-Ji;Liu, Meilin;Shin, Heon-Cheol
    • Journal of Electrochemical Science and Technology
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    • 제7권3호
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    • pp.206-213
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    • 2016
  • Transition metal oxide-based electrodes for lithium ion batteries have recently attracted much attention because of their high theoretical capacity. Here we report the electrochemical behavior of cobalt oxide nanorods as anodes, prepared by a template-free, one-step electrochemical deposition of cobalt nanorods, followed by an oxidation process. The as-deposited cobalt has a slightly convex columnar structure, and controlled thermal oxidation produces cobalt oxides of different Co/O ratios, while the original shape is largely preserved. As an anode in a rechargeable lithium battery, the Co/O ratio has a strong effect on initial capacity and cycling stability. In particular, the one-dimensional Co@CoxOy core shell structure obtained from a mild heat-treatment results in superior cycling stability.

Electronic structure studies of CoFeRO (R=Hf,La,Nb) thin films by X-ray absorption spectroscopy

  • Song, J.H.;Gautam, S.;Chae, K.H.;Asokan, K.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.378-378
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    • 2010
  • We report the electronic structure of CoFeO-R (R=Hf, La, Nb) thin films studied by x-ray absorption spectroscopy (XAS). These ferrites thin films were prepared by pulsed laser deposition method and characterized by XAS measurements at O K-, Co and Fe L-edges. The O K-edge spectra suggest that there is a strong hybridization between O 2p and 3d electrons of transition metal cations and Fe $L_{3,2}$-edge spectra indicate that Fe-ions exist in $Fe^{2+}$ with tetrahedral site of the spinel structure. Divalent Co ions is also distributed in tetrahedral site with rare earth ions goes to octahedral sites of spinel structure. X-ray magnetic circular dichroism (XMCD) is also used to explain the symmetry and magnetic nature dependence on rare-earth ions.

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화학적인 용액 코팅방법에 의한 박막형 고온초전도체에 사용되는 SUS310 금속모재의 평탄화 연구 (Planarization of SUS310 Metal Substrate Used for Coated Conductor Substrate by Chemical Solution Coating Method)

  • 이종범;이현준;김병주;권병국;김선진;이종수;이철영;문승현;이희균;홍계원
    • Progress in Superconductivity
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    • 제12권2호
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    • pp.118-123
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    • 2011
  • The properties of $2^{nd}$ generation high temperature superconducting wire, coated conductor strongly depend on the quality of superconducting oxide layer and property of metal substrate is one of the most important factors affecting the quality of coated conductor. Good mechanical and chemical stability at high temperature are required to maintain the initial integrity during the various process steps required to deposit several layers consisting coated conductor. And substrate need to be nonmagnetic to reduce magnetization loss for ac application. Hastelloy and stainless steel are the most suitable alloys for metal substrate. One of the obstacles in using stainless steel as substrate for coated conductor is its difficulties in making smooth surface inevitable for depositing good IBAD layer. Conventional method involves several steps such as electro polishing, deposition of $Al_2O_3$ and $Y_2O_3$ before IBAD process. Chemical solution deposition method can simplify those steps into one step process having uniformity in large area. In this research, we tried to improve the surface roughness of stainless steel(SUS310). The precursor coating solution was synthesized by using yttrium complex. The viscosity of coating solution and heat treatment condition were optimized for smooth surface. A smooth amorphous $Y_2O_3$ thin film suitable for IBAD process was coated on SUS310 tape. The surface roughness was improved from 40nm to 1.8 nm by 4 coatings. The IBAD-MgO layer deposited on prepared substrate showed good in plane alignment(${\Delta}{\phi}$) of $6.2^{\circ}$.

Co-sputtering 방법으로 제작한 IAZO 박막의 특성과 이를 이용하여 제작한 인광 OLED의 특성 분석 (Characteristics of phosphorescent OLED fabricated on IAZO anode grown by co-sputtering method)

  • 배정혁;김한기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.60-61
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    • 2007
  • IAZO (indium aluminium zinc oxide) anode films were co-sputtered on glass substrate using a dual target DC magnetron sputtering system. For preparation of IATO films, at constant DC power of IZO (indium zinc oxide) target of 100 W, the DC power of AZO (Aluminum zinc oxide) target was varied from 0 to 100 W. To analyze electrical and optical properties of IAZO anode, Hall measurement examination and UV/V is spectrometer were performed, respectively. In addition, structure of IAZO anode film was examined by X-ray diffraction (XRD) method. Surface smoothness was investigated by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). From co-sputtered IAZO anode, good conductivity($2.32{\times}10^{-4}{\Omega}.cm$) and high transparency(approximately 80%) in the visible range were obtained even at low temperature deposition. Finally, J-V-L characteristics of phosphorescent OLED with IAZO anode were studied by Keithley 2400 and compared with phosphorescent OLED with conventional ITO anode.

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Nanocarbon synthesis using plant oil and differential responses to various parameters optimized using the Taguchi method

  • Tripathi, Suman;Sharon, Maheshwar;Maldar, N.N.;Shukla, Jayashri;Sharon, Madhuri
    • Carbon letters
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    • 제14권4호
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    • pp.210-217
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    • 2013
  • The synthesis of carbon nanomaterials (CNMs) by a chemical vapor deposition method using three different plant oils as precursors is presented. Because there are four parameters involved in the synthesis of CNM (i.e., the precursor, reaction temperature of the furnace, catalysts, and the carrier gas), each having three variables, it was decided to use the Taguchi optimization method with the 'the larger the better' concept. The best parameter regarding the yield of carbon varied for each type of precursor oil. It was a temperature of $900^{\circ}C$ + Ni as a catalyst for neem oil; $700^{\circ}C$ + Co for karanja oil and $500^{\circ}C$ + Zn as a catalyst for castor oil. The morphology of the nanocarbon produced was also impacted by different parameters. Neem oil and castor oil produced carbon nanotube (CNT) at $900^{\circ}C$; at lower temperatures, sphere-like structures developed. In contrast, karanja oil produced CNTs at all the assessed temperatures. X-ray diffraction and Raman diffraction analyses confirmed that the nanocarbon (both carbon nano beads and CNTs) produced were graphitic in nature.

RF 마그네트론 스퍼터링에 의한 $BaAl_2O_4$:Eu 박막의 광센싱 특성 (Light Sensing Characteristics of $BaAl_2O_4$ thin film by RF magnetron sputtering)

  • 김세기;강정우;곽창곤;지미정;최병현;김용우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.54-54
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    • 2008
  • $Eu^{2+}$, $Nd^{3+}$ co-doped $BaAl_2O_4$ are known as a long afterglow phosphor. We found that $Eu^{2+}$-doped $BaAl_2O_4$ showed ptotoconductivity in the range of UV and visual light. In this study, $BaAl_2O_4$:Eu thin film has been prepared by RF sputtering method and a sensing characteristics to UV and visual light was performed. Only $Eu^{2+}$ and $Nd^{3+}$ co-doped $BaAl_2O_4$ powders and targets for deposition were prepared by a convention solid state method, and the deposition was performed in a reducing $H_2$-Ar mixture gas on Si substrates. The observation of crystalline phase and morphology of the sputtered film were performed using XRD, EDX. The photoluminescence and photocurrent to UV and visual light were measured simultaneously using 300W-Xe solar simulator as a light source. It was confirmed that the photocurrent induced by irradiation of light showed a linear relationship to the light intensity.

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DC Magnetron Sputtering에 의한 ATO 박막의 제조(II)전기적 특성 (Preparation of ATO Thin Films by DC Magnetron Sputtering (II)Electrical Properties)

  • 윤천;이혜용;정윤중;이경희
    • 한국세라믹학회지
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    • 제33권5호
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    • pp.514-518
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    • 1996
  • Sb doped SnO2(ATO: Antinomy doped Tin Oxide) thin films were prepared by a DC magnetron spttuering method using an oxide target and the electrical characteristics of ATO films were investigated. The experimen-tal conditions are as follows :Ar flow rate ; 0~100 sccm deposition tempera-ture ; 250~40$0^{\circ}C$ DC sputter powder ; 150~550W and sputteing pressure ; 2~7 mTorr, The thickness of depositied ATO films were 600$\AA$~1100 $\AA$ ranges. The resistivity of ATO films was decreased due to the increase of the crystallinity of ATO films with deposition temperature. The decrease of carrier concentration of films with the increase of oxygen flow rate and working pressure is responsible for the increase of resistivity. Increasing of sputtering power raised the resistivity of films by decreasing the carrier mobility.

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열처리방법에 따른 ${K_3}{Li_2}{Nb_5}{O_{15}}$(KLN)박막의 제작 (Preparation of ${K_3}{Li_2}{Nb_5}{O_{15}}$(KLN) Thin Films by Heat Treatment Methods)

  • 김광태;박명식;이동욱;조상희
    • 한국세라믹학회지
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    • 제37권8호
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    • pp.731-738
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    • 2000
  • KLN(K3Li2Nb5O15) has attracted a great deal of attention for their potential usefulness in piezoelectric, electro-optic, nonlinear optic, and pyroelectirc devices. Especially, the KLN single crystal has been studied in the field of optics and electronics. However it is hard to produce good quality single crystals due to the crack propagation during crystal growing. One of the solutions of this problem is prepartion of thin film. But the intensive study has not been conducted so far. In this study, after the KLN thin film were prepared by R.F. magnetron Sputtering method on SiO2/Si substrate, the post-annealing methods of RTA(rapid thermal annealin) and IPA(insitu post annealing) were employed. The deposition condition of KLN thin film was RF power(100 W), Working pressure(100 mtorr). The commonness of both RAT and IPA was that the higher were deposition and post annealing temperature, the higher was the intensity of XRD but the less surface roughness. The difference of post-annealing methods affected XRD phase and surface condition very much. And in IPA process, the influence of O2 had much effect on the formation of KLN phase.

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