Microstructure of Co-Cr Thin Films Deposited by Improved Facing Targets Sputtering System (개량형 대향타겟스퍼터장치에 의한 Co-Cr 박막의 미세구조)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1998.06a
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- pp.363-366
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- 1998