Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Microstructure of Co-Cr Thin Films Deposited by Improved Facing Targets Sputtering System

개량형 대향타겟스퍼터장치에 의한 Co-Cr 박막의 미세구조

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  • 中川茂樹 ;
  • 直江正彦
  • 김경환 (경원대학교 전기공학과) ;
  • 손인환 (광운대학교 전기공학과) ;
  • 김명호 (경원전문대학 건축설비과) ;
  • 김재환 (광운대학교 전기공학과) ;
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  • Published : 1998.06.01
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Abstract

Shuttered Co-Cr thin films have been developed continuously as one of the major candidates for high density recording media. In this study, Co-26at%Cr thin films with c-axis oriented h.c.p. structure prepared by a improved facing targets sputtering system. We find that the effect of microstructural changes of sputtered Co-Cr thin films on magnetic properties and changes of crystal orientation due to variation substrate temperature.

Keywords