• Proceedings of the Korea Association of Crystal Growth Conference
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• 1996.06a
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• pp.422-448
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• 1996

Low-temperature epitaxial growth of Si and SiGe layers of Si is one of the important processes for the fabrication of the high-speed Si-based heterostructure devices such as heterojunction bipolar transistors. Low-temperature growth ensures the abrupt compositional and doping concentration profiles for future novel devices. Especially in SiGe epitaxy, low-temperature growth is a prerequisite for two-dimensional growth mode for the growth of thin, uniform layers. UHV-ECRCVD is a new growth technique for Si and SiGe epilayers and it is possible to grow epilayers at even lower temperatures than conventional CVD's. SiH and GeH and dopant gases are dissociated by an ECR plasma in an ultrahigh vacuum growth chamber. In situ hydrogen plasma cleaning of the Si native oxide before the epitaxial growth is successfully developed in UHV-ECRCVD. Structural quality of the epilayers are examined by reflection high energy electron diffraction, transmission electron microscopy, Nomarski microscope and atomic force microscope. Device-quality Si and SiGe epilayers are successfully grown at temperatures lower than 600℃ after proper optimization of process parameters such as temperature, total pressure, partial pressures of input gases, plasma power, and substrate dc bias. Dopant incorporation and activation for B in Si and SiGe are studied by secondary ion mass spectrometry and spreading resistance profilometry. Silicon p-n homojunction diodes are fabricated from in situ doped Si layers. I-V characteristics of the diodes shows that the ideality factor is 1.2, implying that the low-temperature silicon epilayers grown by UHV-ECRCVD is truly of device-quality.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.11
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• pp.826-830
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• 2013

In this paper, we carried out the investigations of both etch characteristics and mechanisms for the $SnO_2$ thin films in $O_2/BCl_3/Ar$ plasma. The dry etching characteristics of the $SnO_2$ thin films was studied by varying the $O_2/BCl_3/Ar$ gas mixing ratio. We determined the optimized process conditions that were as follows: a RF power of 700 W, a DC-bias voltage of - 150 V, and a process pressure of 2 Pa. The maximum etch rate was 509.9 nm/min in $O_2/BCl_3/Ar$=(3:4:16 sccm) plasma. From XPS analysis, the etch mechanism of the $SnO_2$ thin films in the $O_2/BCl_3/Ar$ plasma can be identified as the ion-assisted chemical reaction while the role of ion bombardment includes the destruction of the metal-oxide bonds as well as the cleaning of the etched surface form the reaction products.

• Journal of the Semiconductor & Display Technology
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• v.12 no.3
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• pp.19-22
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• 2013

The purpose of this study is to develop a system that can monitor the amounts of energy consumption during CVD and etching process for semiconductor manufacturing. Specifically, this system is designed to measure the $CO_2$ emission amounts quantitatively by measuring the flow rate of gas used and amount of power consumed during the processes. The processes of CVD equipment can be classified generally into processing step and cleaning step and all the two steps were monitored. In CVD and etcher equipments, various gases including Ar and $O_2$ are used, but Ar, $O_2$ and He were monitored with the use of the LCI data of Korea Environmental Industry & Technology Institute and carbon emission coefficients of EcoInvent. As a result, it was found that the carbon emission amounts of CVD equipment for Ar, $O_2$ and He were $0.030kgCO_2/min$, $4.580{\times}10^{-3}kgCO_2/min$ and $6.817{\times}10^{-4}kgCO_2/min$, respectively and those of etcher equipment for Ar and $O_2$ are $5.111{\times}10^{-3}kgCO_2/min$ and $7.172kgCO_2/min$, respectively.

• Journal of the Korean Vacuum Society
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• v.20 no.2
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• pp.86-92
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• 2011

The diagnosis studies of the process of chemical vapor deposition were carried out by using in-situ particle monitor (ISPM) and self-plasma optical emission spectroscopy (SPOES). We used the two kinds of equipments such as the silicon plasma enhanced chemical vapor deposition system with silane gas and the borophosphosilicate glass depositon system for monitoring. Using two sensors, we tried to verify the diagnostic and in-situ sensing ability of by-product gases and contaminant particles at the deposition and cleaning steps. The processes were controlled as a function of precess temperature, operating pressure, plasma power, etc. and two sensors were installed at the exhaust line and contiguous with each other. the correlation of data (by-product species and particles) measured by sensors were also investigated.

• Journal of Biosystems Engineering
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• v.43 no.4
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• pp.311-319
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• 2018

Purpose: The aim of this study is to develop a small combine for harvesting miscellaneous cereal crops. Methods: A prototype small combine was designed and constructed. Its specifications and basic performance were investigated. Results: The prototype small combine for harvesting miscellaneous cereal crops was designed and constructed to reflect similar specifications as those of the conventional combine. The prototype small combine comprises a diesel engine with the rated power/speed of 22.0 kW/2,600 rpm, three-stage primary and two-stage speed range transmission shifts, and a double acting threshing part. The maximum travel speeds of the prototype combine are approximately 0.72 m/s, 2.50 m/s, 0.30 m/s at the low, high speed range shifts in the forward direction, and while traversing in the reverse direction, respectively. The minimum radius of turning was approximately 1.50 m. In a static lateral overturning test, the prototype combine overturned neither to the right nor to left on a $30^{\circ}$ slope. The results of an oilseed rape harvesting test included the maximum operating speed of 0.32 m/s, the grain loss ratio of approximately 9.0%, and the effective field capacity of approximately 10.3 a/h. Additionally, among the outputs in grain outlet, the whole grains, damage grains, and materials other than grain (MOG) ratios accounted for 97.4%, 0.0%, and 2.6%, respectively. Conclusions: The prototype small combine for harvesting miscellaneous cereal crops indicates good driving ability and stability. The results of the oilseed rape harvesting test reveal that the harvesting performance must be enhanced such that the separating and cleaning parts are more suitable for each type of crop, thus reducing grain loss and foreign substances among the outputs in grain outlet. An improved small prototype combine could be used effectively to mechanize the harvesting of miscellaneous cereal crops in small family farms or semi-mountainous areas.

• Journal of Energy Engineering
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• v.28 no.1
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• pp.49-56
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• 2019

In this study, a blasting nozzle was designed based on incompressible flow analysis to clean wide surface of parts used in power plant. The outlet side section of the designed nozzle has a wide bore with a linear shape. After the design, the nozzle prototype was made by three dimensional printing, and the cleaning performance test was performed after mounting it on the blasting machine. The wide bore size obtained after the analysis was almost the same as the wide bore size obtained from the surface of the plate specimen after the experiment. Ultimately, it was confirmed that the design of blasting nozzle for wide surface treatment is effective.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.10a
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• pp.854-856
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• 2014

Has been released of make it possible to control the using for smart devices of a wide variety home appliances and electronics in smart appliances in accordance with the one person multi devices. In addition, is increasing rapidly for the number of the product on cleaning robot and refrigerator, air conditioning, TV, etc. these devices are using the implement up DLNA system. And at home and abroad for development and has provided with Iot and Alljoyn such systems. But currently using home appliances or electronic devices of there are a lot of the operating system non installed than the installed products. In addition, smart appliances do not use for user than buying existing electronic products a lot more. In addition, more occur for smart appliances of that do not use for the user on smart appliances rather than buying existing electronics. In this paper, Suggested and implemented for system of control such as smart devices to existed home appliance on not have an operating system, Using mobile device for want users to quantify the data to transfer from arduino board.

• Journal of the Korean Society of Industry Convergence
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• v.22 no.2
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• pp.163-171
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• 2019

Recently, rural housing in urban areas has been increasing due to the improvement of income level. With the increase of the construction of the power house, the installation of the heating system using the harmonious fuel for the purpose of heating and the beauty of the room is increasing rapidly. In addition to the increasing use of firewood heating equipment, the incidence of fire is also increasing. Analysis of the National Fire Data System of the Fire Department The result of the analysis of the National Fire Data System Many parts of the fire are incinerated by the accumulation of tar due to the incompleteness of periodic cleaning inside the cylinder. The distance between the fire extinguisher and the combustible materials such as ceiling, Resulting in fire. In addition, it was found that much of the fire of the firewood heating system in the time zone occurs during the sleeping and resting time and there is not enough time for the residents to cope. This, in turn, causes serious harm to the lives and property of the users of the pyrotechnic heating system. Therefore, in this study, domestic and foreign standards and laws related to fuel oil heating facilities were analyzed and 12 cases of fire accidents were analyzed. Through the revision of the fire prevention and firefighting facilities installation and maintenance law, the installation standards of the alarm and fire extinguishing facilities were presented.

• Journal of Korean Society of Water Science and Technology
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• v.26 no.6
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• pp.109-115
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• 2018

This study was conducted to solve the water shortage problem by reclaiming urine from homes or public places and using it as cleaning water for toilets. The process used in this experiment is a chemical oxidation process combining ozone, hydrogen peroxide, and UV. We set the key substance that is to be removed as chromaticity and conducted the experiment to remove it. If the quantity or concentration of injected ozone, UV, and hydrogen peroxide is insufficient, then the chromaticity will initially increase due to low oxidizing power, and will later decrease. In addition, the efficiency of removing chromaticity appeared to be higher, depending on the quantity of ozone injected, for medium concentrated urine than highly concentrated urine. However, the absolute quantity of removed chromaticity was about 68% higher for highly concentrated urine, when 16 g/hr of ozone was injected. The higher the pH level, the reaction time and efficiency of removing chromaticity were higher, and in normal conditions, in reference to a pH of 8.55, there was a 6% difference in efficiency between a pH level of 5.05 and a pH level of 10.12. Finally, when processing urine through an ozone-only process, COD decreased steadily over time, but DOC did not decrease. This is because ozone reacts selectively with organic matter.

• Journal of the Korean Society for Heat Treatment
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• v.36 no.5
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• pp.311-317
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• 2023

An autofilter is a device that removes impurities contained in heavy fuel oil used in diesel engines of ships or power plants, and also automatically removes impurities accumulated in the filter through a reverse washing function. The reducer-integrated motor serves to rotate the filter at low speed to enable reverse automatic cleaning in the autofilter device. To achieve a low speed of 0.65 to 0.75 rpm in a reducer-integrated motor, a small motor that can operate at 97rpm at a rated voltage of 110 V and 112.5 rpm at 220 V is required. Additionally, a large gear ratio of 1/150 is required. To ensure the durability and reliability of these reducers, the strength of the gear must be evaluated at the design stage. In general, there is a limit to evaluating the stress and strain state according to the vibration characteristics acting on each gear in the driving state of the reducer through quasi-static analysis. Therefore, in this study, the operation characteristics of the auto filter's reducer-integrated motor were first analyzed using the rigid body dynamics analysis method. Then, this rigid body dynamics analysis model was extended to a flexible multibody dynamics analysis model to analyze the stress and strain states acting on each gear and evaluate the design feasibility of the gear.