• Clean Technology
• /
• v.19 no.3
• /
• pp.264-271
• /
• 2013

In this study, we optimized the removal condition of contaminants attached on the scrap surface to recycle the scrap generated from the Zr alloy tube manufacturing process back to the nuclear grade. The main contaminant is remnant of watersoluble cooling lubricant that is used in the pilgering manufacture during the tube production, and it is assumed to be compressed and carbonized on the surface of tube. Zirlo alloy tube of ${\phi}9.50mm$, which has high occurrence frequency of scrap, was selected as the object to be cleaned, and cleaning abilities of reagents were evaluated by measuring the characteristics of contaminants remained and by analyzing the surface of the tube after cleaning process. For evaluation of each cleaning agent, we selected two types of sodium hydroxide series and three types of potassium hydroxide series. Furthermore, to confirm dependence on tempe-rature and ultrasonic intensities, cleaning at the room temperature, $40^{\circ}C$, and $60^{\circ}C$ was conducted, and results showed that higher the cleaning temperature and higher the ultrasonic intensity, better the cleaning effect. As a result of the bare-eye inspection, while the use of sodium hydroxide provided satisfactory condition on the tube surface, the use of potassium hydroxide series provided satisfactory condition on the tube surface only when the ultrasonic intensity was over 120 W. In the cleaning effect analysis using the gravimetric method, cleaning efficiency of sodium hydroxide series was as high as 97.6% ($60^{\circ}C$, 120 W), but since the tube surface condition was poor after the use of potassium hydroxide, the gravimetric method was not appropriate. In the analytical result of surface contaminants on the tube surface, C, O, Ca, and Zr were detected, and mainly C and O dominated the proportion of contaminants. It was also found that the degree of cleaning on the tube affected the componential ratio of C and O; if the degree of cleaning is high, or if cleaning is well-conducted, the proportion of C is decreased, and the proportion of O is increased. Based on these results, optimal cleaning for application in the industry can be expected by categorizing cleaning process into three steps of Alkali cleaning, Rinsing, and Drying and by adjusting cleaning parameters in each step.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.88-89
• /
• 2009

In this paper, we investigated about wet cleaning effect as deep trench formation methods for Power chip devices. Deep trench structure was classified by two methods, PSU (Poly Stick Up) and Non-PSU structure. In this paper, we could remove residue defect during wet. cleaning after deep trench etch process for non-PSU structure device as to change wet cleaning process condition. V-SEM result showed void image at the trench bottom site due to residue defect and residue component was oxide by EDS analysis. In order to find the reason of happening residue defect, we experimented about various process conditions. So, defect source was that oxide film was re-deposited at trench bottom by changed to hydrophobic property at substrate during hard mask removal process. Therefore, in order to removal residue defect, we added in-situ SCI during hard mask removal process, and defect was removed perfectly. And WLR (Wafer Level Reliability) test result was no difference between normal and optimized process condition.

• Journal of the Korean institute of surface engineering
• /
• v.28 no.1
• /
• pp.23-33
• /
• 1995

AISI 304 stainless steel has high resistance to corrosion due to the presence of a self-healing chromium oxide film on the surface, which also accounts for the difficulty in plating. Surface cleaning of this alloy is of fundamental importance in gold plating since its effectiveness puts an upper limit on the quality of the final coating. The cleaning of AISI 304 stainless steel was investigated with elimination of artificial passive oxide film and degreasing of remaining buffing wax as stearic acid. The familiar cleaning methods i.e. ultrasonic cleaning, electro-cleaning and activation treatment were fabricated in this study. Activation treatment showed best cleaning efficiency for elimination of passive oxide film among these methods, which was also confirmed by AES (Auger electron spectrometer) analysis. However, the best condition of cleaning was obtained by combining these methods. Electrocleaning time, for degreasing the stearic acid layer, was decreased with increasing amount of added KCN.

• The Journal of the Acoustical Society of Korea
• /
• v.16 no.1E
• /
• pp.49-56
• /
• 1997

Ultrasonic cleaning at high frequency around 1 MHz, called megasonic cleaning, is commonly used to remove particles less than 1 ㎛ by generating high frequency accelerations on the cleaning objects. Cleaning is performed in an ultrasonically-excited liquid contained in a double-structured container. Ultrasonic waves generated by piezoelectric transducers propagate in the outer container and are transmitted through the inner container. The bottom of the inner container is inclined to make oblique incidence of the ultrasonic wave in order to raise the efficiency of the transmission through the bottom plate. This work deals with the efficiency of the transmission, which directly affects the cleaning performance. The transmission characteristics of the ultrasonic wave in the megasonic cleaner have been obtained analytically and numerically for the variations of some parameters, such as the thickness and inclined angle of the bottom plate of the inner container and the chemical ratio and temperature of the cleaning liquid. The calculated results have yielded the optimum cleaning condition in terms of the sound power transmitted into the cleaning liquid.

• Journal of Korean Society of Water and Wastewater
• /
• v.13 no.1
• /
• pp.140-145
• /
• 1999

This study was carried out a investigate the effect of chemical cleaning of corrosion product in cooling system made of copper and copper alloy as basic material and used cooling water as pure water. We studied chemical cleaning condition that minimizes the influence on basic material by means of EDTA solution so as to eliminate the slurry in cooling system. As a result, we found that the main components of sludge in cooling system produced by corrosion of copper were $Cu_2O$, CuO, Cu, and Fe. The optimum condition of chemical cleaning was 400 ppm EDTA solution at $60^{\circ}C$.

• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.9
• /
• pp.109-115
• /
• 2008

The cleaning process of contaminant particles adhering to the microchips, integrated circuits (ICs) or the like is essential in modern microelectronics industry. In the cleaning process particularly working with the application of inert gases, the removal of contaminant particles of submicron scale is very difficult because the particles are prone to reside inside the boundary layer of the working fluid, The use of cryogenic $CO_2$ cleaning method is increasing rapidly as an alternative to solve this problem. In contrast to the merits of high efficiency of this process in the removal of minute particles compared to the others, even fundamental parametric studies for the optimal process design in this cleaning process are hardly done up to date, In this study, we attempted to measure the cleaning efficiency with the variations of some principal parameters such as mass flow rate, injection distance and angle, and tried to draw out optimal cleaning conditions by measuring and evaluating an effective cleaning width called $d_{50}$.

• Journal of Korean Society of Water and Wastewater
• /
• v.25 no.3
• /
• pp.399-405
• /
• 2011

In a desalination technology using RO membranes, chemical cleaning makes damage for membrane surface and membrane life be shortened. In this research cleaning technology using direct osmosis (DO) was introduced to apply it under the condition of high pH and high concentration of feed. When the high concentration of feed is injected to the concentrate side after release of operating pressure, then backward flow occurred from treated water toward concentrated for osmotic pressure. This flow reduces fouling on the membrane surface. Namely, flux of DO was monitored under pH 3, 5, 10 and 12 conditions at feed concentrations of NaCl 40,000 mg/L, 120,000 mg/L and 160,000 mg/L. As a result, DO flux in pH 12 increased about 21% than pH 3. DO cleaning was performed under the concentrate NaCl 160,000 mg/L of pH 12 during 20 minutes. Three kinds of synthetic feed water were used as concentrates. They consisted of organic, inorganic and seawater; chemicals of SiO2 (200 mg/L), humic acid (50 mg/L) sodium alginate (50 mg/L) and seawater. As a result, fluxes were recovered to 17% in organic fouling, 15% in inorganic fouling and 14% of seawater fouling after cleaning using DO under the condition of concentrate NaCl 160,000 mg/L of pH 12.

• Journal of the Korean Society of Safety
• /
• v.14 no.1
• /
• pp.86-92
• /
• 1999

This study was carried out to investigate the effect of chemical cleaning of corrosion product on cooling system made of copper as a basic material and using cooling water as pure water. We studied chemical cleaning condition that minimizes the influence on basic material by means of EDTA solution so as to eliminate the slurry in cooling system. In addition, the proper amount of NALCO-39L (Nitrite-Borate-BZT mixture) as a inhibitor was determined in order to protect the copper in cooling system against corrosion after chemical cleaning and the effect of corrosion resistance on the copper surface treated was excelent in comparison with surface untreated. As a result, we found that the main components of sludge in cooling system produced by corrosion of copper were $Cu_2O$, CuO, Cu, and Fe. The optimum condition of chemical cleaning was 400ppm EDTA solution at $60^{\circ}C$. Inhibitor concentration needed to treat the surface of pure copper was 15～20ppm per unit area and corrosion rate of copper treated with 500ppm inhibitor solution for 72 hrs at $60^{\circ}C$ was remarkably decreased as compared with that of pure copper.

• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.2005-2010
• /
• 2004

Ultrasonic cleaning is performed by cavitation which is caused by the change of the sound pressure due to the vibration in a cleaning tank. In this study, experiments on electric power and sound pressure with various temperatures, dissolved oxygen and the level of the fluid was done in order to find out how the changes in a cleaning tank affect cavitation. As a result of a series of experiments, we found that transducer impedance changes periodically in response to the variances of fluid and have a direct influence on cleaning efficiency.

• Journal of Conservation Science
• /
• v.25 no.2
• /
• pp.219-231
• /
• 2009

The purpose of this study is to provide basic information necessary for the cleaning of excavated costumes. For the purpose, these researchers reviewed previous records of the actual cleaning of excavated costumes and then implemented and documented the processes of cleaning the Yeosan Song's costumes excavated at Mokdal-dong, Daejeon, which could date back to the early and mid periods of Choseon Dynasty. The excavated clothes of the family provide good examples for comparing men's costume of the 15th century with men's and women's of the mid and late 16th century. The total quantity of excavated remains were 184 and textiles were cotton, silk, hemp, ramie, and union cloth. The clothing remains were processed through wet or dry cleaning in accordance with their fabric condition and the extent to which they were worn or polluted. In detail, the excavated costumes of the Yeosan Song family were cleaned in two stages. For wet cleaning, both anionic(LAS) and nonionic(Triton X-100) surfactants were respectively used as cleaning agents and for dry cleaning, a mixture of n-hexane and n-decane(the ratio of 4 to 6) and petrolic dry cleaning solvent were used. After first cleaning, some cotton, ramie and hemp which had still the stains were processed bleaching and silk which were good condition was processed dry cleaning with the organic solvent again.