• JSTS:Journal of Semiconductor Technology and Science
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• 제13권3호
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• pp.198-206
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• 2013

This paper presents a wide band, fine-resolution digitally controlled oscillator (DCO) with an on-chip 3-D solenoid inductor using the 0.13 ${\mu}m$ digital CMOS process. The on-chip solenoid inductor is vertically constructed by using Metal and Via layers with a horizontal scalability. Compared to a spiral inductor, it has the advantage of occupying a small area and this is due to its 3-D structure. To control the frequency of the DCO, active capacitor and active inductor are tuned digitally. To cover the wide tuning range, a three-step coarse tuning scheme is used. In addition, the DCO gain needs to be calibrated digitally to compensate for gain variations. The DCO with solenoid inductor is fabricated in 0.13 ${\mu}m$ process and the die area of the solenoid inductor is 0.013 $mm^2$. The DCO tuning range is about 54 % at 4.1 GHz, and the power consumption is 6.6 mW from a 1.2 V supply voltage. An effective frequency resolution is 0.14 kHz. The measured phase noise of the DCO output at 5.195 GHz is -110.61 dBc/Hz at 1 MHz offset.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권7호
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• pp.339-343
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• 2006

In this study, the variations of the important characteristics of solenoid-type RF chip inductors utilizing a low-loss A1203 core material on inductor dimensions were investigated systematically. Four dimensions of the chip inductors fabricated in this work were $1.0\times0.5\times0.5mm^3,\;1.5\times1.0\times0.7mm^3,\;2.1\times1.5\times1.0mm^3,\;and\;2.4\times2.0\times1.4mm^3$ and copper (Cu) wire with $40{\mu}m$ diameter was used as the coils. High frequency characteristics of the inductance, quality factor, and impedance of developed inductors as a function of inductor dimensions were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). It was observed that the developed inductors with the number of turns of 6 have the inductance (L) of 12 to 82 nH and exhibit the self-resonant frequency (SRE) of 3.6 to 1.2 GHz. The SRF of inductors decreases with increasing the inductor size while the L increases with the inductor size. The smallest inductors of $1.0\times0.5\times0.5mm^3$ exhibited the L of 12 nH, SRF of 3.6 GHz, and the quality factor of 67 near the frequency of 1.1 GHz. The calculated data predicted the high-frequency data of the L, and Q of the developed inductors well.

• 한국전자파학회논문지
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• 제23권12호
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• pp.1359-1364
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• 2012

칩 인덕터를 이용하여 넓은 저지 대역과 소형화 특성을 갖는 C-밴드 semi-lumped 저역 통과 여파기를 제안하였다. 칩 인덕터의 자기 공진 주파수(SRF: Self Resonance Frequency) 특성을 유지하기 위하여 추가된 분리형 인덕터와 SRF 특성으로 인해 발생되는 감쇠 폴을 이용하여 광대역 저지 대역과 높은 저지 특성을 얻을 수 있었다. 3차 elliptic function 여파기에 칩 인덕터(L: 9.1 nH, SRF: 5.5 GHz, Q: 25)를 적용한 결과, 마이크로스트립 라인 인덕터로 구현한 여파기보다 크기가 37.4 % 감소하였으며, 삽입 손실이 0.38 dB, 차단 주파수는 920 MHz, 1.43~7.8 GHz의 넓은 저지 대역(20 dB 이하) 특성을 가졌다.

• 대한전자공학회논문지SD
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• 제45권5호
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• pp.58-64
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• 2008

CMOS $0.18{\mu}m$ 공정을 이용하여 1.8V supply voltage에서 6Gbps 이상의 처리속도를 가지는 1:2 demultiplexer(DEMUX)를 구현하였다. 높은 동작속도를 위하여 Current mode logic(CML)의 Flipflop을 사용하였으며 추가적인 동작속도 향상을 위하여 On-chip micro stacked spiral inductor($10{\times}10{\mu}m^2$)를 사용하였다. 총 12개의 인덕터를 사용하여 $1200{\mu}m^2$의 면적증가만으로 Inductive peaking의 효과를 나타낼 수 있었다. Chip의 측정은 wafer상태로 진행하였고 Micro stacked spiral inductor가 있는 1:2 demultiplexer와 그것이 없는 1:2 demultiplexer를 비교하여 측정하였다. 6Gbps에서 측정결과 Micro stacked spiral inductor를 1:2 demultiplexer가 inductor를 사용하지 않은 구조보다 Eye width가 약3%정도 증가하였고 또한 Jitter가 43%정도 감소하여 개선효과가 있음을 확인하였다. 소비전력은 76.8mW, 6Gbps에서의 Eye height는 180mV로 측정되었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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• pp.48-50
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• 2005

As technology is developed, customers want to use many functions in one system. Manufacturers want to reach the customer's needs, make systems more small, thin, light-weight. To make them real, it is necessary to make components to be small and thin. But components of power stage are big, thick and heavy-weighted yet. especially power inductor is the most significant component. This paper proposed a novel chip-type power inductor I-type inductor. Inductor that proposed has 3225-size, 5.6uH and 1.3A of max saturation current. And it has $R_{DC}$ of $0.25{\Omega}$ which is smaller than $0.45{\Omega}$ of chip-type inductor and $0.9{\Omega}$ of coil-type inductor.

• 대한전자공학회논문지SD
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• 제44권8호
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• pp.22-29
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• 2007

[ $0.18{\mu}m$ ] CMOS공정을 이용하여 supply voltage 1.8V에서 2.5Gb/s 이상의 데이터 처리속도를 가지는 2:1 Multiplexer(MUX) 설계를 하였다. High speed 동작을 위한 주파수의 한계를 극복하기 위해서 4.7 nH의 on-chip micro spiral micro inductor $(20\times20{\mu}m2)$가 설계 되었고, 10개 이상의 inductor를 사용하고도 칩 면적 증가가 거의 없으면서 inductive peaking 효과를 극대화할 수 있었다. 칩 측정은 on-wafer로 진행되었고, micro spiral inductor가 있는 2:1 MUX와 그것이 없는 2:1 MUX 각각 측정하여 그 결과를 비교하였다. 측정결과 micro spiral inductor를 가진 2:1MUX가 rise time과 fall time이 1.25Gb/s에서는 rise time이 23%, fall time은 3%의 peaking 개선 효과가 있는 것을 확인하였다. 2.5Gb/s에서는 fall time이 약 5.3%, rise time 3.5%의 개선 효과를 보았다. 전체 소비전력은 61.2mW, 2.5Gb/s에서 voltage output swing은 $180mV_{p-p}$로 측정되었다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권5호
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• pp.283-288
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• 2000

In this work, small-size, high-performance simple solenoid-type RF chip inductors utilizing an Al2O3 core material were investigated. Copper (Cu) wire with $40\mum$ diameter was used as the coils and the size of the chip inductor fabricated in this work was $2.1mm\times1.5mm\times1.0mm$. The external current source was applied after bonding Cu coil leads to gold pads electro-plated on each end of backsides of a core material. High frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. The developed inductors have the self-resonant frequency (SRF) of 1.1 to 3.1 GHz and exhibit L of 22 to 150 nH. The L of the inductors decreases with increasing the SRF. The Z of the inductors has the maximum value at the SRF and the inductors have the quality factor of 70 to 97 in the frequency range of 500 MHz to 1.5 GHz.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제53권11호
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• pp.680-686
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• 2004

An integrated inductor using the low temperature cofiring ceramics(LTCC) technology was fabricated. The inductor has Ag circular spiral coil with 16 turns (2-turn x 8-layer) and has a dimension of 11.52mm diameter and 0.71mm thick. For the fabricated inductor, calculation method of inductance was given and it is confirmed that the calculated value is very close to the measured one. Finally as an application of the LTCC integrated inductor to low power electronic circuits, a LTCC buck DC/DC converter with 1.32W output power and 1MHz switching frequency using the inductor fabricated was developed. For the converter the maximum efficiency of about 81% was obtained.

• 한국전기전자재료학회논문지
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• 제19권8호
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• pp.780-784
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• 2006

We present high aspect ratio air-core solenoid inductors with $100{\mu}m\;and\;200{\mu}m$ tall via structures on Pyrex wafer. The effect of various parameters such as different number of turns, via heights, pitch distance between turns on inductor's radio frequency (RF) characteristics have been studied. The highest Q factor we obtained from various solenoid inductors is 72.8 at 9.7 GHz, which was produced by a 3-turn inductor.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 하계종합학술대회 논문집(1)
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• pp.221-224
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• 2004

This paper has researched on-chip spiral inductor in digital CMOS technology by modeling physical structure based on foundry parameter. To show the possibility of its application to RF design, we designed dual band RF front-end receiver. The simulated receiver have gain of 23/23.5 dB and noise figure of 2.8/3.36 dB at 2.45/5.25 GHz, respectively. It occupies $16mm^2$ in $0.25{\mu}m$ CMOS with 5 metal layer.