• 한국전기전자재료학회논문지
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• 제21권5호
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• pp.397-401
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• 2008

Most of the topic in PCB industry was about increasing the volume of product for the development of electronics in numerous industrial application area. However, it has been emerged that yield improvement quality manufacturing via detecting any suspicious process in order to minimize the scrapped product and material waste. In addition, recently, restriction of hazardous substances (RoHS) claims that electronic manufacturing environment should reduce the harmful chemicals usage, thus the importance of monitoring copper etchant and detecting any mis-processing is crucial for electronics manufacturing. In this paper, we have developed real-time chemical monitoring system using RGB sensor, which is simpler but more accurate method than commercially utilized oxidation reduction potential (ORP) technique. The developed Cu etchant monitoring system can further be utilized for copper interconnect process in future nano-semiconductor process.

• 펄프종이기술
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• 제41권5호
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• pp.44-49
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• 2009

Old newspaper was deinked using commercial cellulolytic enzymes and a surfactant complex at low alkalinity. The properties of the deinked pulp(DIP) were evaluated and the suspended solids content, cationic demand, turbidity, and chemical oxygen demand(COD) of the process water were measured. The results can summarized as follows, 1. The brightness and yield of the DIP were improved using enzymatic surfactant complex deinking. 2. The amount of foaming during deinking with the enzyme surfactant complex was higher than that with synthetic surfactant deinking. However, it was not sufficient to cause process problem. 3. The pH and turbidity of the white water from deinking with the enzyme surfactant complex were similar to those of the white water from surfactant deinking. 4. The suspended solids content, cationic demand, and COD of the white water from deinking with the enzyme surfactant complex were improved compared to those of the white water from surfactant deinking.

• 한국산업보건학회지
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• 제25권3호
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• pp.294-300
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• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• 한국재료학회지
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• 제29권11호
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• pp.697-702
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• 2019

In this study, using a wet chemical process, we evaluate the effectiveness of different solution concentrations in removing layers from a solar cell, which is necessary for recovery of high-purity silicon. A 4-step wet etching process is applied to a 6-inch back surface field(BSF) solar cell. The metal electrode is removed in the first and second steps of the process, and the anti-reflection coating(ARC) is removed in the third step. In the fourth step, high purity silicon is recovered by simultaneously removing the emitter and the BSF layer from the solar cell. It is confirmed by inductively coupled plasma mass spectroscopy(ICP-MS) and secondary ion mass spectroscopy(SIMS) analyses that the effectiveness of layer removal increases with increasing chemical concentrations. The purity of silicon recovered through the process, using the optimal concentration for each process, is analyzed using inductively coupled plasma atomic emission spectroscopy(ICP-AES). In addition, the silicon wafer is recovered through optimum etching conditions for silicon recovery, and the solar cell is remanufactured using this recovered silicon wafer. The efficiency of the remanufactured solar cell is very similar to that of a commercial wafer-based solar cell, and sufficient for use in the PV industry.

• 청정기술
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• 제15권3호
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• pp.165-171
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• 2009

본 연구에서는 전자산업에서 주로 사용되는 invar 강판재료를 식각한 후 생성되는 $FeCl_2$을 $FeCl_3$로 환원하여 회수한 후 재사용하기 위한 식각액 재생공정에서 $FeCl_3$의 회수 농도와 재생공정의 단수와의 관계를 규명하고 원하는 $FeCl_3$ 회수 농도를 얻기 위한 공정의 최적단수를 얻어낼 수 있는 simulation program을 개발하였다. 이 프로그램을 위한 여러 가지 parameter는 pilot 실험을 통해 얻었다. 개발된 프로그램에 의한 공정 모사는 폐액의 발생량 및 처리비용을 극소화할 수 있다. 또한 개발된 프로그램은 원하는 $FeCl_3$의 농도를 얻기 위한 식각액 재생시스템의 최적단수와 공정시간을 계산할 수 있다. 개발된 프로그램은 실제 전자산업에서 식각액 재생 장치의 최적 용량 산정과 식각액 회수 시스템 최적단수 계산에 활용되었다.

• 한국재료학회지
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• 제27권5호
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• pp.281-288
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• 2017

In this study, Fe-Ni slag, converter slag and dephosphorization slag generated from the steel industry, and fly ash or bottom ash from a power plant, were mixed at an appropriate mixing ratio and melted in a melting furnace in a mass-production process for glass ceramics. Then, glass-ceramic products, having a basalt composition with $SiO_2$, $Al_2O_3$, CaO, MgO, and $Fe_2O_3$ components, were fabricated through casting and heat treatment process. Comparison was made of the samples before and after the modification of the process conditions. Glass-ceramic samples before and after the process modification were similar in chemical composition, but $Al_2O_3$ and $Na_2O$ contents were slightly higher in the samples before the modification. Before and after the process modification, it was confirmed that the sample had a melting temperature below $1250^{\circ}C$, and that pyroxene and diopside are the primary phases of the product. The crystallization temperature in the sample after modification was found to be higher than that in the sample before modification. The activation energy for crystallization was evaluated and found to be 467 kJ/mol for the sample before the process modification, and 337 kJ/mol for the sample after the process modification. The degree of crystallinity was evaluated and found to be 82 % before the process change and 87 % after the process change. Mechanical properties such as compressive strength and bending strength were evaluated and found to be excellent for the sample after process modification. In conclusion, the samples after the process modification were evaluated and found to have superior characteristics compared to those before the modification.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1991년도 한국자동제어학술회의논문집(국제학술편); KOEX, Seoul; 22-24 Oct. 1991
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• pp.1705-1711
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• 1991

On-line fault detection and diagnosis has an increasing interest in a chemical process industry, especially for a process control and automation. The chemical process needs an intelligent operation-aided workstation which can do such tasks as process monitoring, fault detection, fault diagnosis and action guidance in semiautomatic mode. These tasks can increase the performance of a process operation and give merits in economics, safety and reliability. Aiming these tasks, series of researches have been done in our lab. Main results from these researches are building appropriate knowledge representation models and a diagnosis mechanism for fault detection and diagnosis in a chemical process. The knowledge representation schemes developed in our previous research, the symptom tree model and the fault-consequence digraph, showed the effectiveness and the usefulness in a real-time application, of the process diagnosis, especially in large and complex plants. However in our previous approach, the diagnosis speed is its demerit in spite of its merits of high resolution, mainly due to using two knowledge models complementarily. In our current study, new knowledge representation scheme is developed which integrates the previous two knowledge models, the symptom tree and the fault-consequence digraph, into one. This new model is constructed using a material balance, energy balance, momentum balance and equipment constraints. Controller related constraints are included in this new model, which possesses merits of the two previous models. This new integrated model will be tested and verified by the real-time application in a BTX process or a crude unit process. The reliability and flexibility will be greatly enhanced compared to the previous model in spite of the low diagnosis speed. Nexpert Object for the expert system shell and SUN4 workstation for the hardware platform are used. TCP/IP for a communication protocol and interfacing to a dynamic simulator, SPEEDUP, for a dynamic data generation are being studied.

• 한국인쇄학회지
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• 제12권1호
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• pp.47-65
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• 1994

Synthetic photoresist have partially displaced the natural materials, but bichromated casein have remained in use until recently at etching industry such as chemical milling. The object of this paper is that the mutual relations among factors and suitable latitude in pattern formation or etching process when is to be applied the casein ammonium bichromate photoresist.

• 문화기술의 융합
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• 제3권3호
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• pp.43-49
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• 2017

본 연구는 중소기업의 정보화를 추진함에 있어, 정보화 중에서도 중단기적인 도입 성과를 낼 수 있는 생산정보관리시스템 구축을 위하여, 화학제조업 분야의 핵심 업무 프로세스에 대하여 표준화를 연구하고 그에 따른 생산정보관리시스템을 구축 적용하는데 제공하고자 한다. 화학제조업 생산정보관리시스템 표준화를 위한 개발방법론은 중소기업기술정보진흥원에서 기 연구 개발된 생산정보관리시스템 개발 방법론(PSDM)을 적용하며, 표준화 대상은 시스템 구성도, 업무절차 흐름도, Menu Structure 등과 같이 시스템구축 시 골격이 되는 핵심 업무 프로세스이다. 본 연구로 생산정보관리시스템을 구축하고자 하는 화학제조업 중소기업 및 관련 전문 IT업체들이 표준화된 핵심 업무 프로세스를 적용하여 시스템을 보다 효과적으로 구축 할 수 있으며, 시스템에 대한 구축 용이성과 신뢰성을 제공하며 아울러 핵심 업무 프로세스의 활용이 극대화되기 위해서 사후관리 교육훈련 및 유지보수 방안도 제시하고 있다. 본 연구 결과를 적용함으로써 생산 공정의 불합리한 요소제거, 생산제품 품질 향상, 생산비용절감이 가능하다.

• 한국수소및신에너지학회논문집
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• 제16권4호
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• pp.391-399
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• 2005

This paper deals with the survey of domestic hydrogen production, consumption, and distribution. The amount of domestic hydrogen production and consumption has not been identified, and we survey the amount of domestic hydrogen production and consumption by industries. The hydrogen production industries are classified into the oil industry, the petrochemical industry, the chemical industry, and the other industry. In 2004, the amount of domestic hydrogen production was 972,601 ton, which corresponded to 1.9% of the global hydrogen production. The oil industry produced 635,683 ton(65.4%), the petrochemical industry produced 241,970 ton(24.9%), the chemical industry produced 66,250 ton(6.8%), the other industry produced 28,698 ton(2.9%). The hydrogen consumptions of corresponding industries were close to the hydrogen productions of industries except that of the other industry. Most hydrogen was used as non-energy for raw materials and hydrogen additions to the process. Only 122,743 ton(12.6%) of domestic hydrogen was used as energy for heating boilers. In 2004, 47,948 ton of domestic hydrogen was distributed. The market shares of pipeline, tube trailers and cylinders were 84.4% and 15.6%, respectively. The purity of 31,848 ton(66.4%) of the distributed hydrogen was 99.99%, and 16,100 ton(33.6%) was greater than or equal to 99.999%. Besides domestic hydrogen, we also identify the byproduct gases which contain hydrogen. The iron industry produces COG( coke oven gas), BFG(blast furnace gas), and LDG(Lintz Donawitz converter gas) that contain hydrogen. In 2004, byproduct gases of the iron industry contained 355,000 ton of hydrogen.