DOI QR코드

DOI QR Code

PCB 제조공정을 위한 화학약품 용액의 실시간 모니터링 시스템

Real-time Chemical Monitoring System using RGB Sensor toward PCB Manufacturing

  • 발행 : 2008.05.01

초록

Most of the topic in PCB industry was about increasing the volume of product for the development of electronics in numerous industrial application area. However, it has been emerged that yield improvement quality manufacturing via detecting any suspicious process in order to minimize the scrapped product and material waste. In addition, recently, restriction of hazardous substances (RoHS) claims that electronic manufacturing environment should reduce the harmful chemicals usage, thus the importance of monitoring copper etchant and detecting any mis-processing is crucial for electronics manufacturing. In this paper, we have developed real-time chemical monitoring system using RGB sensor, which is simpler but more accurate method than commercially utilized oxidation reduction potential (ORP) technique. The developed Cu etchant monitoring system can further be utilized for copper interconnect process in future nano-semiconductor process.

키워드

참고문헌

  1. O. Cakir, 'Copper etching with cupper chloride and regeneration of waste etchant', J. Materials Processing Technology, Vol. 175, No. 1-3, p. 63, 2006 https://doi.org/10.1016/j.jmatprotec.2005.04.024
  2. O. Ikawa and M. Shibata, 'Cleaning of soldered silicon surface after alkaline etching and contamination with lead impurities', J. Electrochem. Soc., Vol. 154, No. 8, p. D369, 2007 https://doi.org/10.1149/1.2740002
  3. S. Lee and C. Spanos, 'RTSPC: A software utility for real-time SPC and tool data analysis', IEEE Trans. Semi. Manufac., Vol. 8, No. 1, p. 17, 1995 https://doi.org/10.1109/66.350754
  4. 이강, 'RGB컬러센서를 이용한 도금용액 및 표면산화용액의 측정재생 장치 및 방법', 10- 0536096-0000 12.06. 2005
  5. S. Han, J. Park, and S. Hong, 'Incipiant fault detection of reactive ion etching process', Trans. EEM, Vol. 6, No. 6, p. 262, 2005 https://doi.org/10.4313/TEEM.2005.6.6.262