• Transactions on Electrical and Electronic Materials
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• 제16권6호
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• pp.334-337
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• 2015

Pure ZnO, ZnO nanowires doped with 3 wt.% Ga (3GZO) and doped with 3 wt.% Ag (3SZO) were grown by a hot-walled pulse laser deposition (HW-PLD) technique. The optical and chemical properties of Ga and Ag doped nanowires was analyzed. Nanowires were determined to be under 200 nm in diameter and several μm in length. Change of significant resistance was observed and the gas detection sensitivities of ZnO, 3GZO and 3SZO nanawires were compared. The sensitivities of ZnO, 3GZO, and 3SZO nanowire sensors were measured at 300℃ for 1 ppm of ethanol gas at 97%, 48%, and 203%, respectively.

• 센서학회지
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• 제14권1호
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• pp.1-6
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• 2005

This paper describes a novel concept of a chemically sensitive scanning force microscope (CS-SFM). It consists of the conventional SFM and the time-of-flight mass spectrometer (TOF-MS). A switchable cantilever (SC) fabricated by the micromachining technology combines each advantage of two completely different systems, SFM and TOF-MS. The CS-SFM offers to produce both images of topography and chemical information simultaneously. First we employed a rotatable tip holder based on 4 piezotube actuators for demonstration of the possibility of the CS-SFM concept. Second the CS-SFM concept is optimized with the micromachining technology. The micromachined SC with an integrated bimorph actuator and a piezoresistive strain sensor provides a reasonable switching speed of ${\sim}10$ ms which is very attractive for the CS-SFM application. The SC is currently being integrated in an ultra-high-vacuum system to perform various experiments.

• 센서학회지
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• 제4권4호
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• pp.55-61
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• 1995

가변 입력전압을 이용하여 ISFET의 문턱전압을 검출하는 새로운 개념의 ISFET array chip을 설계하였다. 설계된 칩은 240개의 pH-ISFET와 신호처리회로를 포함하며, 증가된 신뢰성 및 정확성, 디지탈 출력 그리고 멀티센서로의 응용성 등의 특성을 가진다. 칩제조를 위해 CMOS 공정을 응용한 새로운 공정을 설계하였고 칩을 layout 하였다.

• 한국염색가공학회:학술대회논문집
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• 한국염색가공학회 2011년도 제44차 학술발표회
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• pp.67-67
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• 2011

Recently, Phthalocyanine dye has attentions due to their excellent photochemical properties and used to optical applications such as chemical sensors. And azo groups can change photochemical properties in the UV irradiation because their molecualr structure reverse cis-trans isomer and changes cooperative motion, aggregation and so on. In this study, we synthesized the azo compound between amino pyridine and phenol. this azo derivative used the combination with 3-nitro phthalonitrile and makes phthalocyanine structure through the synthesis with 1,8-diazabicyclo[5.4.0]undec-7-ene(DBU), zinc acetate. Finally, we synthesized a new photoswiching dye zinc-phthalocyanine azo compound. This compound was studied by phothoswichiing phenomenon by UV irradiation and analyzed molecular aggregation through the SEM images.

• 센서학회지
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• 제17권3호
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• pp.157-161
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• 2008

An optical sensor was developed to detect nanoparticles, turbid materials and microorganisms in water simultaneously. Three different light sources like UV-LED, NIR-LED and laser diode have been employed to develop the optical sensor based on the scattering light and fluorescence light. The sensor system has high selectivity and sensitivity, that it can be used to monitor the quality of drinking water.

• 대한의용생체공학회:의공학회지
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• 제26권5호
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• pp.271-282
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• 2005

There are strong demands for accurate, fast, and inexpensive devices in the medical diagnostic laboratories, such as biosensors and chemical sensors. Biosensors can provide the reliable and accurate informations on the desired biochemical parameters, which is an essential prerequisite for a patient before going for a treatment. They can be used for continuous measurements of metabolites, blood cations, gases, etc. Of these, electrochemical biosensors play an important role in the improvement of public health, because rapid detection, high sensitivity, small size, and specificity are achievable for clinical diagnostics. In this paper, the clinical applications with electrochemical biosensors are reviewed. An attempt is also made to highlight some of the trends that govern the research and developments of the important biosensors that are associated to clinical diagnosis.

• 한국응용과학기술학회지
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• 제27권1호
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• pp.56-60
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• 2010

Titanium dioxide particles are used as photocatalysts, sensors, adsorbents and catalyst. Core-shell polymers of inorganic/organic pair, which have both core and shell component, were synthesized by sequential emulsion polymerization using Acrylate as a shell monomer and potassium persulfate (KPS) as an initiator. We found that when Acrylate core prepared by adding 0.5~2.0 wt% EU-S133D, Titanium dioxide / Acrylate core-shell polymerization was carried out on the surface of Titanium dioxide particle without forming the new Titanium dioxide particle during acrylate shell polymerized in the inorganic/organic core-shell polymer preparation. The structure of core-shell polymer were investigated by measuring to the thermal decomposition of polymer composite using thermogravimetric analyzer(TGA) and morphology of latex by scanning electron microscope(SEM).

• 한국전기전자재료학회논문지
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• 제17권3호
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• pp.294-298
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• 2004

Carbon nanotubes(CNTs) were synthesized by thermal chemical vapor deposition(CVD) method. To fabricate CNT gas sensor, catalyst metal layer was deposited on microstructure. The CNT gas detecting layer was grown by thermal CVD method on the catalyst metal layer. In order to investigate the gas sensing characteristics of the fabricated CNT gas sensor, it was exposed in NO$_2$ gas and sensitivity, response, and recovery time were measured. As the result, this sensor has better reproductibility and faster recovery time than another CNT gas sensors.

• E2M - 전기 전자와 첨단 소재
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• 제11권10호
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• pp.78-80
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• 1998

Metallo-phthalocyanines(MPcs) are very sensitive to toxic molecules such as electron affinitive NO2 gas and also chemically and thermally stable since losts of MPcs have been studied for the potential chemcial gas sensors for $NO_2$ using their electrical conductivity. In this study, thin films of octa-dodecyloxy copper -phthalocyanine were prepared by Langmuir-Blodgett(LB) method and characterized by using UV/Vis absorption spectroscopy, and ellipsometry. It was found that the proper transfer surface pressure for the film deposition was 25mN/m and the limiting area per molecule was $112\AA$/molecule. The film thickness of one layer was $64\AA$. Current-voltage(I-V) characteristics of these films were investigated as a function of film thickness.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.376-377
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• 2006

Chemical Mechanical Planarization (CMP) has emerged as an enabling technology for the manufacturing of multi-level metal interconnects used in high-density Integrated Circuits (IC). Recently, multi-level structures have been also widely used m the MEMS device such as micro engines, pressure sensors, micromechanical fluid pumps, micro mirrors and micro lenses. Especially, among the thin films available in IC technologies, polysilicon has probably found the widest range of uses in silicon technology based MEMS. This paper presents the characteristic of polysilicon CMP for multi-level MEMS structures. Two-step CMP process verifies that is possible to decrease dishing amount with two type of slurries characteristics. This approach is attractive because two-step CMP process can be decreased dishing amount considerably more then just one CMP process.