Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication and Sensing Characteristics of Multi-Walled Carbon Nanotube Gas Sensor for No2 Detection

이산화질소 감지용 다중벽 탄소나노튜브 가스센서의 제작 및 감응 특성

  • 조우성 (한국과학기술연구원 마이크로시스템 연구센터) ;
  • 문승일 (한국과학기술연구원 마이크로시스템 연구센터) ;
  • 김영조 (청운대학교 전자공학과) ;
  • 이윤희 (고려대학교 물리학과) ;
  • 주병권 (한국과학기술연구원 마이크로시스템 연구센터)
  • Published : 2004.03.01
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Abstract

Carbon nanotubes(CNTs) were synthesized by thermal chemical vapor deposition(CVD) method. To fabricate CNT gas sensor, catalyst metal layer was deposited on microstructure. The CNT gas detecting layer was grown by thermal CVD method on the catalyst metal layer. In order to investigate the gas sensing characteristics of the fabricated CNT gas sensor, it was exposed in NO$_2$ gas and sensitivity, response, and recovery time were measured. As the result, this sensor has better reproductibility and faster recovery time than another CNT gas sensors.

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References

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