• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.176.2-176.2
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• 2014

In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.

• Korean Chemical Engineering Research
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• 제55권6호
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• pp.767-770
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• 2017

Quadruple tank liquid level systems are popular in testing multivariable control systems for multivariable processes with positive or negative zeros. The liquid level system is nonlinear and it will help to illustrate the robustness of control systems. However, due to nonlinearity, it can be cumbersome to obtain process parameters for testing linear control systems. Perturbation sizes are limited for valid linearized process models, requiring level sensors with high precision. A simple method where the outlet orifice is replaced to a long tube is proposed here. The effluent flow rate becomes proportional to the liquid level due to the friction loss of long tube and the liquid level system shows near linear dynamics. It is applied to the quadruple tank system for easier experiments.

• 한국가스학회지
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• 제21권2호
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• pp.41-49
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• 2017

최근 화학물질을 사용하는 시설이 증가하면서 취급양도 급속하게 증가하고 있다. 그러나 화학물질 누출사고는 꾸준히 발생되고 있으며 때에 따라 다량의 화학물질이 누출되는 경우에는 큰 피해로 이어질 가능성이 크다. 이러한 산업단지에는 수많은 센서로부터 얻는 정보를 이용해 누출 발생지역을 감지 감시하고 있으며, 기존의 고정식 센서를 로봇이나 드론에 적용하여 산업현장에 이용되고 있다. 이에 따라 화학물질을 취급하는 공정의 누출조건, 환경조건을 반영한 다양한 누출 시나리오를 토대로 빠른 감지와 대응을 위해 경계면의 센서 배치 방안을 제시할 필요가 있다. 따라서 본 연구에서는 화학물질이 누출되는 경우에 대해 COMSOL을 사용하여 주요 파라미터를 적용, 실질적인 사고 시나리오를 해석하였다. 그리고 사고 시나리오를 바탕으로 센서의 감지 확률, 감지시간과 감지시나리오 수의 각 항목마다 중요도를 부여하여 이동식 센서의 위치별 속도가 산출되도록 목적함수를 선정하였다. 또한 예상치 못한 누출사고에 대해 신뢰성 분석을 통해 제안방법의 타당성을 확인하였다. 이상의 결과로부터 추후 적용될 이동식 센서의 농도 데이터를 기반으로 누출원의 역추적에도 도움을 줄 수 있을 것으로 기대한다.

• 공업화학
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• 제34권5호
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• pp.493-500
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• 2023

본 연구에서는 스크린 프린팅 공정을 통해 탄소 잉크 기반의 2상 전극을 제작하고, 전극 표면에 이리듐 산화물(IrO_x)을 코팅함으로써 전극의 분극 현상을 제어할 수 있는 임피던스 센서를 개발하였다. IrO_x는 순환 전압 전류법으로 탄소 전극의 표면 위에 순환 수(0~50 cycles)에 따라서 코팅되었다. 전자주사현미경을 이용하여 cycle 수가 증가할수록 IrO_x 입자의 크기와 수가 증가하는 경향성을 확인하였다. 전기화학 임피던스 분석을 이용하여 상기 제조된 센서들의 NaCl 농도에 따른 임피던스 변화 값을 조사하였다. 50 cycle에서 제조된 센서가 가장 우수한 결정계수와 재현성을 나타내었으며, 이는 분극 현상이 잘 제어되었기 때문이다. 실제 용액 샘플들을 이용한 삼투압 장비와 비교 측정 실험을 수행함으로써 IrO_x 기반 센서의 안구건조증 진단 센서로의 활용가치를 증명하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1767-1772
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• 2008

A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors.

• Elastomers and Composites
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• 제56권2호
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• pp.57-64
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• 2021

This paper reviews recent developments and applications of dielectric elastomers (DEs) and suggests various techniques to improve DE properties. DEs as smart materials are a variety of electro-active polymers (EAPs) that convert electrical energy into mechanical energy and cause a large deformation when a voltage is applied. The dielectric constant, modulus, and dielectric loss of DEs determine the efficiency of deformation. Among these, the dielectric constant significantly affects their performance. Therefore, various recent approaches to improve the dielectric constant are reviewed, including the enhancement of polarization, introduction of microporous structures in the matrix, and introduction of ferroelectric fillers. Furthermore, the basic principles of DEs are examined, as well as their various applications such as actuators, generators, sensors, and artificial muscles.

• Bulletin of the Korean Chemical Society
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• 제33권10호
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• pp.3269-3273
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• 2012

In this study, we report a new method for the high contrast imaging of biomolecular interactions at roller printed protein surfaces using thermotropic liquid crystals (LCs). Avidin was roller printed and covalently immobilized onto the obliquely deposited gold surface that was decorated with carboxylic acid-terminated self-assembled monolayers (SAMs). The optical response of LCs on the roller printed film of avidin contrasted sharply with that on the obliquely deposited gold surface. The binding of biotin-peroxidase to the roller printed avidin was then investigated on the obliquely deposited gold substrate. LCs exhibited a non-uniform and random orientation on the roller printed area decorated with the complex of avidin and biotin-peroxidase, while LCs displayed a uniform and planar orientation on the area without roller printed proteins. The orientational transition of LCs from uniform to non-uniform state was triggered by the erasion of nanometer-scale topographies on the roller printed surface after the binding of biotin-peroxidase to the surface-immobilized avidin. The specific binding events of protein-receptor interactions were also confirmed by atomic force microscopy and ellipsometry. These results demonstrate that the roller printing of proteins on obliquely deposited gold substrates could provide a high contrast signal for imaging biomolecular interactions using LC-based sensors.

• Bulletin of the Korean Chemical Society
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• 제34권6호
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• pp.1632-1636
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• 2013

$Ga_2O_3$ one-dimensional (1D) nanostructures were synthesized by using a thermal evaporation technique. The morphology, crystal structure, and sensing properties of the $Ga_2O_3$ nanostructures functionalized with Pt to $NO_2$ gas at room temperature under UV irradiation were examined. The diameters of the 1D nanostructures ranged from a few tens to a few hundreds of nanometers and the lengths ranged up to a few hundreds of micrometers. Pt nanoparticles with diameters of a few tens of nanometers were distributed around a $Ga_2O_3$ nanorod. The responses of the nanorods gas sensors fabricated from multiple networked $Ga_2O_3$ nanorods were improved 3-4 fold at $NO_2$ concentrations ranging from 1 to 5 ppm by Pt functionalization. The Pt-functionalized $Ga_2O_3$ nanorod gas sensors showed a remarkably enhanced response at room temperature under ultraviolet (UV) light illumination. In addition, the mechanisms via which the gas sensing properties of $Ga_2O_3$ nanorods are enhanced by Pt functionalization and UV irradiation are discussed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.126-126
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• 2009

Noninvasive plasma diagnostic technique is introduced to analyze and characterize HICP (Helmholtz Inductively Coupled Plasma) source during the plasma etching process. The HICP reactor generates plasma mainly through RF source power at 13.56MHz RF power and RF bias power of 12.56MHz is applied to the cathode to independently control ion density and ion energy. For noninvasive sensors, the RF sensor and the OES (Optical emission spectroscopy) were employed since it is possible to obtain both physical and chemical properties of the reactor with plasma etching. The plasma impedance and optical spectra were observed while altering process parameters such as pressure, gas flow, source and bias power during the poly silicon etching process. In this experiment, we have found that data measured from these noninvasive sensors can be correlated to etch results. In this paper, we discuss the relationship between process parameters and the measurement data from RF sensor and OES such as plasma impedance and optical spectra and using these relationships to analyze and characterize H-ICP source.

• 센서학회지
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• 제13권4호
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• pp.287-291
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• 2004

A capacitive type humidity sensor has been fabricated using a polyimide film without hydrophobic elements and its characteristics has been evaluated for hermeticity measurement of micro packages. For a highly sensitive humidity sensor, a polyimide film without hydrophobic elements has been synthesized and used instead of using a commercial one in which 7 group elements such as fluorine or chlorine are included. Sensitivity, stability and hysteresis has been performed to characterize the fabricated sensors. The sensitivity defined as normalized percent capacitance change was 0.3751%RH and hysteresis was 0.77% in the range of 10%RH to 90%RH. Maximum deviation from the average capacitance measured for 120 minutes at 50%RH was 0.25%. The proposed humidity sensor can be used for hermeticity measurement of micro packages.