• Journal of the Korean Applied Science and Technology
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• v.31 no.3
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• pp.394-401
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• 2014

In order to minimize a building energy consumption with ventilation, a development of smart ventilation system is very important. In this study, a dry adsorbent that is main element of smart ventilation system was developed for removing indoor $CO_2$, and evaluate the adsorption performance. Specific surface area, pore characteristic and crystal structure of the modified sorbent was measured to analyze physical properties. From this analysis, it was found that the developed absorbent has a low specific surface area, due to mesopores of substrate was filled with metal contained raw material. Additionally, through analysis of the adsorption properties, the developed adsorbent was shown a adsorption form of mesopore (type IV), which means adsorption amount was rapidly increased at the part of high-pressure. Order to applying for the field, chamber test was performed. Continuous column tests (2,500 ppm) and batch chamber tests ($4m^3$, 5,000 ppm) showed $CO_2$ removal efficiency of 95% and 88% within 1 hour, respectively.

• Journal of Practical Engineering Education
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• v.10 no.2
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• pp.125-129
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• 2018

This paper is about the numerical analysis on optimized internal flow of LTP furnace and uniformity of temperature. The LTP Furnace is the device that generates heat by electricity. And performs an annealing function for annealing the silicon wafer in the pre-semiconductor manufacturing process. Especially, the maximum temperature inside the chamber is maintained at a high temperature of about $400^{\circ}C$ to strengthen the wafer. When the process is completed at high temperature, the operation is repeated to reduce the temperature through the heat exchanger and carry it out. From this analysis, the ultimate goal is to derive the optimum design of the insulation volume supply/exhaust structure of the chamber through the flow analysis of the LTPS furnace. And to find cases for curriculum development.

• Journal of the Korean Society for Heat Treatment
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• v.35 no.1
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• pp.27-32
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• 2022

Microbubble technology has been widely applied in various industrial fields. Recently, research on many types of microbubble application technology has been conducted experimentally, but there is a limit in deriving the optimal design and operating conditions. Therefore, if the computational fluid dynamics (CFD) analysis of multiphase flow is used to supplement these experimental studies, it is expected that the time and cost required for prototype production and evaluation tests will be minimized and optimal results will be derived. However, few studies have been conducted on multiphase flow CFD analysis to interpret fluid flow in microbubble generators using swirl flow. In this study, CFD simulation of multiphase flow was performed to analyze the air-water mixing process and fluid flow characteristics in a microbubble generator with a dual-chamber structure. Based on the simulation results, it was confirmed that a negative pressure was formed on the central axis of rotation due to the strong swirling flow. And it could be seen that the air inside the suction tube was introduced into the inner chamber of the microbubble generator. In addition, as the high-speed mixed fluid collided with external water sucked by the negative pressure near the outlet, a large amount of microbubbles was ejected due to the shear force between the two flows flowing in opposite directions.

• Journal of Conservation Science
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• v.8 no.1 s.11
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• pp.40-50
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• 1999

A geotechnical research including observation of the movement of wall-structure, monitoring of groundwater, non-destructive geophysical investigation was conducted to workout a countermeasure to conserve the Muryong Royal Tomb which is the most extinguishable cultural property of the Baekje dynasty. Movement of the structure of Muryong Royal Tomb generally arises to the front chamber and its amplitude in a rainy season is twice of that in the dry season. It represents serious problem concerned about structural safety of the royal tomb in the rainy season. Movement of wall-structure is caused due to the rain infiltration through cracks in the quicklime layer within the soil mound on the top of the royal tomb and the change of the temperature inside of the tomb. Cracks found around the Muryong Royal Tomb are mostly spread in NW and SE of the tomb structure and it harmonizes with the direction of movement of wall-structure of the Muryong Royal Tomb. Counter-plans for safety and prevention of water-leakage that obstruct the movement of wall structures towards the direction of south are very important for the conservation of Muryong Royal Tomb. After getting rid of the cause of structural change by the restoration of the front chamber of the Muryong Royal Tomb, it needs to reinforce the quicklime layer for prevention of waterleak.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.39-42
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• 2000

As gate dimensions continue to shrink below $0.2{\mu}m$, improving CD (Critical Dimension) control has become a major challenge during CMOS process development. Anti-Reflective Coatings are widely used to overcome high substrate reflectivity at Deep UV wavelengths by canceling out these reflections. In this study, we have investigated Batchtype system for PECVO SiOxNy as Anti-Reflective Coatings. The Singletype system was baseline and Batchtype system was new process. The test structure of Singletype is SiON $250{\AA}$ + Cap Oxide $50{\AA}$ and Batchtype is SiON $250{\AA}$ + Cap Oxide $50{\AA}$ or N2O plasma treatment. Inorganic chemical vapor deposition SiOxNy layer has been qualified for bottom ARC on Poly+WSix layer, But, this test was practiced on the actual device structure of TiN/Al-Cu/TiN/Ti stacks. A former day, in Batchtype chamber thin oxide thickness control was difficult. In this test, Batchtype system is consist of six deposition station, and demanded 6th station plasma treatment kits for N2O treatment or Cap Oxide after SiON $250{\AA}$. Good reflectivity can be obtained by Cap Oxide rather than N2O plasma treatment and both system of PECVD SiOxNy ARC have good electrical properties.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.230-230
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• 2013

In amorphous or microcrystalline thin-film silicon solar cells, p-i-n structure is used instead of p/n junction structure as in wafer-based Si solar cells. Hence, these p-i-n structured solar cells inevitably consist of many interfaces and the cell efficiency critically depends on the effective control of these interfaces. In this study, in-situ plasma treatment process of the interfaces was developed to improve the efficiency of a-Si:H solar cell. The p-i-n cell was deposited using a single-chamber VHF-PECVD system, which was driven by a pulsed-RF generator at 80 MHz. In order to solve the cross-contamination problem of p-i layer, high RF power was applied without supplying SiH4 gas after p-layer deposition, which effectively cleaned B contamination inside chamber wall from p-layer deposition. In addition to the p-i interface control, various interface control techniques such as thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, multiple applications of thin i-layer deposition and H2 plasma treatment, H2 plasma treatment of i-layer prior to n-layer deposition, etc. were developed. In order to reduce the reflection at the air-glass interface, anti-reflective SiO2 coating was also adopted. The initial solar cell efficiency over 11% could be achieved for test cell area of 0.2 $cm^2$.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.159-159
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• 2011

Among the semiconductor ternary compounds in the I-III-$VI_2$ series, $CulnS_2$ ($CulnSe_2$) are one of the promising materials for photovoltaic applications because of the suitability of their electrical and optical properties. The $CuInS_2$ thin film is one of I-III-$VI_2$ type semiconductors, which crystallizes in the chalcopyrite structure. Its direct band gap of 1.5 eV, high absorption coefficient and environmental viewpoint that $CuInS_2$ does not contain any toxic constituents make it suitable for terrestrial photovoltaic applications. A variety of techniques have been applied to deposit $CuInS_2$ thin films, such as single/double source evaporation, coevaporation, rf sputtering, chemical vapor deposition and chemical spray pyrolysis. This is the first report that $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) technique which is a novel and attractive method because thin films with high deposition rate can be grown at very low cost. In this study, $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) method which employs a nozzle expansion. The mixed fluid is expanded through the nozzle into the chamber evacuated in a lower pressure to deposit $CuInS_2$ films on Mo coated glass substrate. In this AJD system, the characteristics of $CuInS_2$ films are dependent on various deposition parameters, such as compositional ratio of precursor solution, flow rate of carrier gas, stagnation pressure, substrate temperature, nozzle shape, nozzle size and chamber pressure, etc. In this report, $CuInS_2$ thin films are deposited using the deposition parameters such as the compositional ratio of the precursor solution and the substrate temperature. The deposited $CuInS_2$ thin films will be analyzed in terms of deposition rate, crystal structure, and optical properties.

• Journal of the Korean Society of Industry Convergence
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• v.25 no.3
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• pp.443-449
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• 2022

In this study, in order to improve the disadvantages of the environmental error of the infusion set that performs infusion therapy in the existing clinical practice and to maximize the user's convenience by miniaturizing the existing infusion pump system, the structure of the muscle pump of the human vein was imitated. As a double check valve method, a method for preventing the backflow of fluid and discharging a constant fluid in one direction by external pressure was proposed. The proposed bio-mimic muscle pump uses a check valve that controls the flow of fluid in one direction and a silicone tube with elasticity, and a chamber is constructed. A peristaltic pump for applying intermittent pressure to the tube chamber was constructed using a multi-cam structure roller. In order to verify the performance of the proposed pump, optimization was performed while changing the number of multi-cam rollers and adjusting the speed of the roller driving motor, and the reproducibility of the instantaneous discharge amount and the continuous discharge amount of the pump was compared and tested. The performance of the muscle pump proposed in this study was verified through experiments that it can inject up to 1L of fluid within 12 hours, and that it is possible to inject the fluid with an accuracy of ±0.1ml. Real-time monitoring of the fluid injection volume through the bio-mimic muscle pump proposed in this study not only increases the convenience of the administrator, but also provides a precise fluid administration environment to more patients at a low cost, and additionally applies bubble detection and occlusion detection technology If so, it is believed that a safer medical environment can be provided to patients.

• Transactions of the Korean Society of Automotive Engineers
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• v.4 no.2
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• pp.137-146
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• 1996

Behaviour of ultra-high pressure diesel spray and its structure in a constant-volume pressure chamber were studied with injection pressure ranging from 35 to 110MPa. Sprays were observed by using the back illumination scattering method and righ angle scattering method. The spray process mechanism were investigated with both photographs. As a result, the spray angle and air entrainment angle was larger as injection pressure and back pressure increase. It becomes clear that mean air-fuel ratio is increased by increasing the injection pressure.

• Journal of Powder Materials
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• v.10 no.1
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• pp.51-56
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• 2003

To investigate the effect of the parameters of the plasma arc discharge process on the particle formation and particle characteristics of the iron nano powder, the chamber pressure, input current and the hydrogen volume fraction in the powder synthesis atmosphere were changed. The particle size and phase structure of the synthesized iron powder were studied using the FE-SEM, FE-TEM and XRD. The synthesized iron powder particle had a core-shell structure composed of the crystalline $\alpha$-Fe in the core and the crystalline $Fe_3O_4$ in the shell. The powder generation rate and particle size mainly depended on the hydrogen volume fraction in the powder synthesis atmosphere. The particle size increased simultaneously with increasing the hydrogen volume fraction from 10% to 50%, and it ranged from about 45nm to 130 nm.