• Title/Summary/Keyword: Chamber Geometry

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Design Parameter Analysis for a Planar Type Reactive Ion Etcher (평판형 반응성 이온 식각기의 설계변수 분석)

  • 강봉구;박성호;전영진
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.11
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    • pp.1658-1665
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    • 1989
  • Reactor design considerations over several critical parameters for a planar type reactive ion etcher are given. The etch uniformity is taken as a principal design constraint. The characteristics of economicaly available vacuum pumping system are taken as practical design constraints. A set of theoretical conditions on the chamber geometry and on the gas delivery and vacuum system, that satisfy the design constraints, are derived from basic properties of RF glow discharge and gas dynamics. The theoretical results are applied to decide design parameters of a practical single-wafer-per-chamber planar type reactive ion etching machine.

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Flow Analysis for the Geometry Optimization of Combustion Chamber of Central Flow Type Waste Incinerator (중간류식 폐기물 소각로 연소실의 최적형상 설계를 위한 유동해석)

  • Lee, Jin-Uk;Kim, Seong-Bae;Yun, Yong-Seung;Kim, Hyeon-Jin;Heo, Il-Sang
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.2
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    • pp.252-259
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    • 2001
  • Computational study has been performed to observe the flow characteristics of combustion chamber for geometrical modification in municipal solid waste incinerator. A series of geometrical modification has been carried out as an attempt to reduce the size of recirculation zone, to obtain uniform flow field in the secondary combustion chamber and to improve the mixing of combustion gas. Two dimensional non-reacting turbulent flow has been studied as the first step to get such goals and the result of design optimization is presented. In addition, three dimensional non-reacting and reacting flow analyses were performed to verify the validity of two dimensional approach.

Numerical Analysis for Linear and Nonlinear Attenuation Characteristics of Exhaust Silencer Systems (배기 소음기의 선형 및 비선형 감쇄 특성에 대한 수치해석)

  • 김종태;김용모;맹주성;류명석;구영곤
    • Transactions of the Korean Society of Automotive Engineers
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    • v.4 no.4
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    • pp.179-189
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    • 1996
  • An unstructured grid finite-volume method has been applied to predict the linear and nonlinear attenuation characteristics of the expansion chamber silencer system. In order to achieve a grid flexibility and a solution adaptation for geometrically silencer system. In order to achieve a grid flexibility and a solution adaptation for geometrically complex flow regions associated with the actual silencers, the unstructured mesh algorithm in context with the node-centered finite volume method has been employed. The present numerical model has been validated by comparison with the analytical solutions and the experimental data for the acoustic field of the concentric expansion chamber with and without pulsating flows, as well as the axisymmetric blast flowfield with open end. Effects of the chamber geometry on the nonlinear wave attenuation characteristics is discussed in detail.

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Fluid Flow and Temperature Distribution in the Simplified Chamber (단순화한 챔버에서 유체의 흐름과 온도분포)

  • Han Hyun-Kak
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.6 no.4
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    • pp.302-308
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    • 2005
  • The temperature distribution and fluid flow in the chamber was investigated using FLUENT code. It provides comprehensive modeling capabilities for a wide range of incompressible or compressible and laminar or turbulent fluid flow problems. And a broad range of mathematical models for transport phenomena is combined with the ability to model for complex geometries. The geometry of the chamber was very complex, and a simplified model of the chamber was used in the simulation experiment. It was important that the temperature deviation of test site. This datum were provided in the improving the control algorithm. Using this algorithm, the results were with in $0.1^{\circ}C.$

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An Study on the Optimization of Sub-chamber Geometry in CVC with Sub-chamber (부실을 가진 정적연소기에서 부실형상의 최적화 연구)

  • Park, Jong-Sang;Kang, Byung-Mu;Yeum, Jung-Kuk;Ha, Jong-Yul;Chung, Sung-Sik
    • Journal of ILASS-Korea
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    • v.10 no.2
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    • pp.1-9
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    • 2005
  • An experimental study was carried out to obtain the fundamental data about the effects of radical ignition on premixture combustion. A CVC(constant volume combustor) divided into the sub-chamber and the main chamber was used. Numerous narrow passage holes are arranged between the main chamber and the sub-chamber. The products including radicals generated by spark ignition in tile sub-chamber derives the simultaneous multi-point ignition in the main chamber. We have examined the effects of the sub-chamber volume, the diameter and number of passage holes, and the equivalence $ratio({\Phi})$ on the combustion characteristics by means of burning pressure measurement and flame visualization. In a CVC, the overall burning time including the ignition delay became very short and the maximum burning pressure was slightly increased by the radical ignition(RI) method in comparison with those by the conventional spark ignition(SI) method. Combustible lean limit by RI method is extended by ${\Phi}=0.25$ compared with that by SI method. Also, In cases of charging the number and the diameter for the fixed total cross section of the passage holes, combustion period increased significantly at a sub-chamber with a single hole, but those of the other conditions had almost a similar tendency in the sub-chamber with 4 or more holes. regardless of equivalence ratio. Therefore, it was Proved that a critical cross section exists with the number of passage holes.

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Effect of Internal Flow inside Recirculation Chamber Nozzle for Automative Head Lamp on Cleaning Spray (자동차 헤드램프 세척용 재순환 챔버 노즐의 내부유동이 분무장에 미치는 영향)

  • Shin, J.H.;Lee, I.C.;Kang, Y.S.;Kim, J.H.;Koo, J.S.;Koo, J.Y.
    • Journal of ILASS-Korea
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    • v.16 no.2
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    • pp.90-96
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    • 2011
  • Atomized liquid jets from the washing nozzle which configured with recirculation chamber for cleaning hot-zone area are accelerated and impinged on the head lamp surface. Cleaning efficiency of head lamp can be increased with injecting washing fluids into the hot-zone area. Experimental and numerical studies with various design parameters were executed to reveal the relations between internal geometry and internal flow in the washing nozzle. Spray structures were fitted with each of the head lamp surfaces and spray nozzles were optimized to the spray pattern. The recirculation chamber induces a recirculation flow and can be decreased the pressures perturbation inside the chamber. Orifice determines the mass flow rate. When the diameter of orifice is excessively large, it showed an unstable spray pattern. As a nozzle exit angle increases, density distributions are separated with two section. Also, as a protrusion length of nozzle exit increases, spray patterns are spread into a large area and density distributions showed unstable trend.

Analysing NOx and soot formations of an annular chamber with various types of biofuels

  • Joanne Zi Fen, Lim;Nurul Musfirah, Mazlan
    • Advances in aircraft and spacecraft science
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    • v.9 no.6
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    • pp.537-551
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    • 2022
  • The rapid decrease of fossil fuel resources and increase of environmental pollution caused by aviation industries have become a severe issue which leads to an increase in the greenhouse effect. The use of biofuel becomes an option to alleviate issues related to unrenewable resources. This study presents a computational simulation of the biofuel combustion characteristics of various alternative fuels in an annular combustion chamber designed for training aircraft. The biofuels used in this study are Sorghum Oil Methyl Ester (SOME), Spirulina Platensis Algae (SPA) and Camelina Hydrotreated Esters and Fatty Acids (CHEFA). Meanwhile, Jet-A is used as a baseline fuel. The fuel properties and combustion characteristics are being investigated and analysed. The results are presented in terms of temperature and pressure profiles in addition to the formation of NOx and soot generated from the combustion chamber. Results obtained show that CHEFA fuel is the most recommended biofuel among all four tested fuels as it is being found that it burns with 37.6% lower temperature, 15.2% lower pressure, 89.5% lower NOx emission and 8.1% lower soot emission compared with the baseline fuel in same combustion chamber geometry with same initial parameters.

Effects of Combustion Chamber Shape on the Stratified Combustion of a GDI Engine (직접분사식 가솔린엔진의 연소실 형상이 성층화 연소에 미치는 영향)

  • 송재원;김미로;조한승;여진구;조남효
    • Transactions of the Korean Society of Automotive Engineers
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    • v.10 no.1
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    • pp.67-75
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    • 2002
  • A study to investigate the influence of combustion chamber shape, especially piston top face configuration, on the combustion stability is presented with CFD analysis and single cylinder GDI engine test. Initial configuration of the piston bowl was designed with CFD analysis and further parametric studies of the design factors on the piston top face were carried out through the single cylinder GDI engine test. It was found that both the geometry of piston top face and the compression ratio have great influences on the combustion stability. Of interest is that the design factors of the GDI piston to prevent mixture diffusion out of the piston bowl have important roles for the stable combustion at the stratified mixture condition. Also the relationship between spray impingement and flow pattern in a GDI piston bowl should be considered to design an optimal bowl configuration for stable stratified combustion.

Visualization of the Flow in a Diesel Injection Nozzle In case of the Steady Flow Condition (정상류 조건에서의 디젤 연료 분사 노즐내의 유동가시화)

  • 김장헌;송규근
    • Transactions of the Korean Society of Automotive Engineers
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    • v.7 no.6
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    • pp.49-56
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    • 1999
  • The effects of the internal flow in a D.I. Diesel injection nozzle on the atomization of a spray were analyzed experimentally. Flow visualization studies were made using a transparent acrylic model nozzle as a diesel nozzle . Water instead of disel fuel was used as the injection liquid. The geometry of the model nozzle was scaled up 10 times of the actual nozzle and the injection pressure for the model nozzle was adjusted so as to achieve a Reynolds number at the discharge hole that was the same as the actual nozzle. Experimental results show that when the needle lift was small, the high turbulence in the sac chamber generated by the high velocity seat flow made the spread angle of the spray plume large. Cavitation, which arose from the sac chamber, makes the spread angle of the spray plume large but the discharge coefficient small.

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Transmission Loss Analysis of Simple Expansion Chambers with Multiple Inlets and Outlets (다입력/다출력관을 갖는 확장관의 투과손실 해석)

  • 박기춘;김양한
    • Journal of KSNVE
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    • v.8 no.5
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    • pp.807-813
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    • 1998
  • Transmission loss of the simple expansion chamber with multiple inlet and outlet ports is obtained. Transfer matrices which represent the relation between the power variables(pressure and velocity) of inlets and outlets depend on the input relatons as well as the acoustic system parameters(i.e. geometry of the chamber, wall admittance, etc.). The analysis has been performed analytically, including the effects of higher order modes for the 2-inlet/1-outlet, 1-inlet/2-outlet and 2-inlet/2-outlet systems. This study yeilds that phase difference between the inlet ports can significantly increase the transmission loss in low frequency range.

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