Effects of temperature and bias volatahe on wear characteristics of Tin Thin film by Cathodic arc plasma deposition (CAPD 법에서 온도와 전압이 TiN 박막의 내마모 특성에 미치는 영향)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1992.05a
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- pp.35-35
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- 1992