Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05a
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- Pages.35-35
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- 1992
Effects of temperature and bias volatahe on wear characteristics of Tin Thin film by Cathodic arc plasma deposition
CAPD 법에서 온도와 전압이 TiN 박막의 내마모 특성에 미치는 영향
Abstract
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