• 제목/요약/키워드: Carbon ion beam

검색결과 140건 처리시간 0.025초

DLC박막을 코팅한 초경공구의 Al합금에 대한 절삭성능 향상 (Improvement of Cutting Performance of DLC Coated WC against Al Alloy)

  • 이규용
    • 동력기계공학회지
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    • 제12권3호
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    • pp.66-71
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    • 2008
  • Diamond-like-carbon (DLC) coatings could be good candidates as solid lubricants for cutting tools in dry machining of aluminum alloy. In this work, DLC thin films were produced as a friction reduction coating for WC-Co insert tip using the plasma immersion ion beam deposition (PIIED) technique. DLC coatings were also coated on $Al_2O_3$ specimens and high temperature wear tested up to $400^{\circ}C$ in dry air to observe the survivability of the DLC coating in simulated severe cutting conditions using a pin-on-disc tribotester with Hertzian contact stress of 1.3GPa. It showed reduced friction coefficients of minimum 0.02 up to $400^{\circ}C$. And cutting performance of DLC coated WC-Co insert tips to Al 6061 alloy were conducted in a high speed machining center. The main problems of built-up edge formation in aluminum machining are drastically reduced with improved surface roughness. The improvements were mainly related to the low friction coefficient of DLC to Al alloy and the anti-adhesion of Al alloy to WE due to the inertness of DLC.

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DLC박막 증착시 전처리 가스 종류와 유량 변화에 따른 효과

  • 백일호;이원백;홍병유;이준신
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.247-247
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    • 2010
  • DLC(diamond-like carbon)는 비정질 고상 탄소의 하나로 다이아몬드의 유사한 높은 경도, 내마모성, 윤활성, 전기절연성, 화학적 안정성을 가지고 있는 재료이다. 이러한 우수한 특성 때문에 DLC는 박막의 형태로 여러 종류의 보호코팅에 많이 응용되고 있다. DLC의 광범위한 응용에 있어 가장 큰 문제점은 박막이 갖는 높은 잔류응력과 이에 따른 기판과의 낮은 접착성으로 알려져 있다. 최근 연구에 의하면, plasma pre-treatment를 통해 PTFE기판에 DLC박막의 adhesion strength를 증진 시킬 수 있다고 보고하였다. 또한 ion beam technique를 이용하여 잔류응력을 줄이고 기판과의 접착력을 높일 수 있다는 것도 보고 되었다. 이에 기인하여 pre-treatment가 DLC합성에 잔류응력을 낮추고 기판과의 접착성을 높이는 효과를 보일 것이라고 가정하고 연구하였다. 본 연구에서 pre-treatment가 Diamond-like Carbon의 stainless steel 합성시 stress와 adhesion에 어떤 효과가 있는지 알아보기 위해, pre-treatment시와 synthesis of DLC film시에 13.56MHz 150W RF플라즈마 화학기상 증착 (RF-PECVD) 법을 통해 합성되었다. pre-treatment시에 H2(80 sccm), O2(10 sccm), N2(20 sccm)의 가스 종류를 다르게 하였고, synthesis of DLC film시에는 CH4 (20 sccm), H2 (80 sccm)가스의 유량을 고정하였다. 합성된 DLC 박막은 Contact Angle Analyze, Raman spectroscopy, Scratch tester를 이용하여 접촉각, D peak Position, G peak Position, ID/IG ratio, 접착력을 측정하였다.

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액정 디스플레이 배향막을 위한 이온빔 표면조사에 관한 연구 (Ion beam irradiation for surface modification of alignment layers in liquid crystal displays)

  • 오병윤;김병용;이강민;김영환;한정민;이상극;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 및 기술 세미나 논문집 디스플레이 광소자
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    • pp.41-41
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    • 2008
  • In general, polyimides (PIs) are used in alignment layers in liquid crystal displays (LCDs). The rubbing alignment technique has been widely used to align the LC molecules on the PI layer. Although this method is suitable for mass production of LCDs because of its simple process and high productivity, it has certain limitations. A rubbed PI surface includes debris left by the cloth, and the generation of electrostatic charges during the rubbing induces local defects, streaks, and a grating-like wavy surface due to nonuniform microgrooves that degrade the display resolution of computer displays and digital television. Additional washing and drying to remove the debris, and overwriting for multi-domain formation to improve the electro-optical characteristics such as the wide viewing angle, reduce the cost-effectiveness of the process. Therefore, an alternative to non-rubbing techniques without changing the LC alignment layer (i.e, PI) is proposed. The surface of LC alignment layers as a function of the ion beam (IE) energy was modified. Various pretilt angles were created on the IB-irradiated PI surfaces. After IB irradiation, the Ar ions did not change the morphology of the PI surface, indicating that the pretilt angle was not due to microgrooves. To verify the compositional behavior for the LC alignment, the chemical bonding states of the ill-irradiated PI surfaces were analyzed in detail by XPS. The chemical structure analysis showed that ability of LCs to align was due to the preferential orientation of the carbon network, which was caused by the breaking of C=O double bonds in the imide ring, parallel to the incident 18 direction. The potential of non-rubbing technology for fabricating display devices was further conformed by achieving the superior electro-optical characteristics, compared to rubbed PI.

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탄소섬유/에폭시 복합재(CFRP)의 표면처리가 금속재/CFRP의 전단강도에 미치는 영향에 대한 연구 (Effect of Graphite/Epoxy (CERP) Surface Treatment on the Shear Strength of CERP/Metal Composites)

  • 지창헌;양준호
    • 한국표면공학회지
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    • 제34권3호
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    • pp.225-230
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    • 2001
  • In this study, the effect of surface treatment of CFRP (Carbon Fiber Reinforced Composites) on the shear strength of CFRP/metal composites was investigated. The surface of 14 plied unidirectional (0-dog ) CFRP was treated by an $Ar^{/}$ + ion beam under an oxygen environment. Shear strength tests were performed using SLS (Single Lap Shear) specimens based on the ASTM D906-94a procedure. The shear strength of the surface-treated CFRP/metal composites was compared with that of the untreated CFRP/metal composites. The results showed that the shear strength of surface-treated CFRP/metal composites was 36% greater than that of untreated CFRP/metal composites.

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Alignment property change in DLC alignment layer containing various hydrogen concentration

  • Kim, Jong-Bok;Kim, Kyung-Chan;Ahn, Han-Jin;Hwang, Byung-Har;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.378-380
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    • 2005
  • Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.

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Site-Specific Growth of Width-Tailored Graphene Nanoribbons on Insulating Substrates

  • 송우석;김유석;정민욱;박종윤;안기석
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.145.2-145.2
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    • 2013
  • The band-gap opening in graphene is a key factor in developing graphene-based field effect transistors. Although graphene is a gapless semimetal, a band-gap opens when graphene is formed into a graphene nanoribbon (GNR). Moreover, the band-gap energy can be manipulated by the width of the GNR. In this study, we propose a site-specific synthesis of a width-tailored GNR directly onto an insulating substrate. Predeposition of a diamond-like carbon nanotemplate onto a SiO2/Si wafer via focused ion beam-assisted chemical vapor deposition is first utilized for growth of the GNR. These results may present a feasible route for growing a width-tailored GNR onto a specific region of an insulating substrate.

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탄소계 경질 박막의 연구 및 산업 적용 동향 (Trend in Research and Application of Hard Carbon-based Thin Films)

  • 이경황;박종원;양지훈;정재인
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2009년도 춘계학술대회 논문집
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    • pp.111-112
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    • 2009
  • Diamond-like carbon (DLC) is a convenient term to indicate the compositions of the various forms of amorphous carbon (a-C), tetrahedral amorphous carbon (ta-C), hydrogenated amorphous carbon and tetrahedral amorphous carbon (a-C:H and ta-C:H). The a-C film with disordered graphitic ordering, such as soot, chars, glassy carbon, and evaporated a-C, is shown in the lower left hand corner. If the fraction of sp3 bonding reaches a high degree, such an a-C is denoted as tetrahedral amorphous carbon (ta-C), in order to distinguish it from sp2 a-C [2]. Two hydrocarbon polymers, that is, polyethylene (CH2)n and polyacetylene (CH)n, define the limits of the triangle in the right hand corner beyond which interconnecting C-C networks do not form, and only strait-chain molecules are formed. The DLC films, i.e. a-C, ta-C, a-C:H and ta-C:H, have some extreme properties similar to diamond, such as hardness, elastic modulus and chemical inertness. These films are great advantages for many applications. One of the most important applications of the carbon-based films is the coating for magnetic hard disk recording. The second successful application is wear protective and antireflective films for IR windows. The third application is wear protection of bearings and sliding friction parts. The fourth is precision gages for the automotive industry. Recently, exciting ongoing study [1] tries to deposit a carbon-based protective film on engine parts (e.g. engine cylinders and pistons) taking into account not only low friction and wear, but also self lubricating properties. Reduction of the oil consumption is expected. Currently, for an additional application field, the carbon-based films are extensively studied as excellent candidates for biocompatible films on biomedical implants. The carbon-based films consist of carbon, hydrogen and nitrogen, which are biologically harmless as well as the main elements of human body. Some in vitro and limited in vivo studies on the biological effects of carbon-based films have been studied [$2{\sim}5$].The carbon-based films have great potentials in many fields. However, a few technological issues for carbon-based film are still needed to be studied to improve the applicability. Aisenberg and Chabot [3] firstly prepared an amorphous carbon film on substrates remained at room temperature using a beam of carbon ions produced using argon plasma. Spencer et al. [4] had subsequently developed this field. Many deposition techniques for DLC films have been developed to increase the fraction of sp3 bonding in the films. The a-C films have been prepared by a variety of deposition methods such as ion plating, DC or RF sputtering, RF or DC plasma enhanced chemical vapor deposition (PECVD), electron cyclotron resonance chemical vapor deposition (ECR-CVD), ion implantation, ablation, pulsed laser deposition and cathodic arc deposition, from a variety of carbon target or gaseous sources materials [5]. Sputtering is the most common deposition method for a-C film. Deposited films by these plasma methods, such as plasma enhanced chemical vapor deposition (PECVD) [6], are ranged into the interior of the triangle. Application fields of DLC films investigated from papers. Many papers purposed to apply for tribology due to the carbon-based films of low friction and wear resistance. Figure 1 shows the percentage of DLC research interest for application field. The biggest portion is tribology field. It is occupied 57%. Second, biomedical field hold 14%. Nowadays, biomedical field is took notice in many countries and significantly increased the research papers. DLC films actually applied to many industries in 2005 as shown figure 2. The most applied fields are mold and machinery industries. It took over 50%. The automobile industry is more and more increase application parts. In the near future, automobile industry is expected a big market for DLC coating. Figure 1 Research interests of carbon-based filmsFigure 2 Demand ratio of DLC coating for industry in 2005. In this presentation, I will introduce a trend of carbon-based coating research and applications.

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수직성장된 탄소나노튜브의 선택적 패터닝 (Laser Patterning of Vertically Grown Carbon Nanotubes)

  • 장원석
    • 대한기계학회논문집B
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    • 제36권12호
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    • pp.1171-1176
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    • 2012
  • 실리콘 기판 위에 플라즈마 기상층착법을 이용하여 합성된 탄소나노튜브를 화학적인 방법이나 전자빔 혹은 이온빔과 같은 진공 챔버 내에서의 공정없이 펨토초레이저를 이용하여 선택적으로 패터닝 하는 방법을 구현하였다. 플라즈마 기상층착법으로 합성된 탄소나노튜브는 수직성장이 가능하며 탄소나노튜브 간의 간격을 조절하여 성장이 가능하다. 이러한 장점으로 전계방출소자, 바이오센서 등의 응용을 위하여 이용되는 합성 방법이다. 이러한 응용을 위하여 선택적으로 나노튜브를 제거하고 탄소나노튜브 끝의 촉매금속을 제거하는 것이 응용의 효율을 높이는데 매우 중요하다. 본 연구에서는 탄소나노튜브의 전기적, 구조적 특성에 영향을 줄 수 있는 화학적인 방법을 사용하지 않고 펨토초레이저를 사용하여 패터닝과 촉매금속을 제거하는 방법을 구현하였다.

치료계획 시스템을 이용한 Varian Standard Couch 모델링의 유용성 평가 (The evaluation for the usability ofthe Varian Standard Couch modelingusing Treatment Planning System)

  • 양용모;송용민;김진만;최지민;최병기
    • 대한방사선치료학회지
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    • 제28권1호
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    • pp.77-86
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    • 2016
  • 목 적 : 방사선 치료 시 Carbon Fiber Couch에 의한 감약이 일어난다. 본 연구에서는 치료계획 시스템(Treatment Planning System: TPS)을 이용해 Varian사의 Varian Standard Couch(VSC)를 모델링 하여 유용성을 평가하고자 한다. 대상 및 방법 : 선형가속기(Clinac IX, VARIAN, USA)의 CBCT(Cone Beam Computed Tomography)를 이용하여 VSC의3가지 조건Side Rail Out Grid(SROG), Side Rail InGrid(SRIG), Side Rail In OutSpine Down Bar(SRIOS)로 스캔 한 후 TPS(Pinnacle9.8, Philips, USA)로 전송하여 Side Rail, Side Bar Upper, Side Bar Lower, Spine Down Bar를 Automatic Contouring하여 모델링 하였다. 전산화 단층촬영(Light Speed RT 16, GE, USA)으로 스캔 한 Cheese Phantom(Middelton, USA) 을 TPS로 전송하여 모델링 한 VSC를 적용하였다. 측정 점은 Cheese Phantom내의 Ion Chamber(A1SL, Standard imaging, USA)이며 Isocenter에 위치시켜 Energy(4, 10MV), Gantry Angle($5^{\circ}$간격으로 측정), Field Size($3{\times}3cm^2$, $10{\times}10cm^2$)에 변화를 주어 각 100MU의 동일한 조건에서 얻은 계산 값과 측정값을 비교하였으며 Side Bar Upper에 의한 감약을 비교하기 위해 SRIG조건에서 $127^{\circ}$를 포함하였다. 결 과 : CBCT를 이용해 얻은 VSC의 Density를 TPS에서 확인한 결과 $0.9g/cm^3$였으며 Spine Down Bar의 경우 $0.7g/cm^3$로 나타났다.Side Rail, Side Bar Upper, Side Bar Lower, Spine Down Bar에서 각 17.49%, 16.49%, 8.54%, 7.59%의 감약이 일어났으며모델링의 정확성을 평가하기 위해 계산 값과 측정값을 비교한 결과 평균 1.13%의 오차가 보였으며 Spine Down Bar를 지나는 $170^{\circ}beam$에서 1.98%로 가장 많은오차를 보였다. 결 론 : TPS이용해 모델링 한 VSC의 유용성을 평가하기 위해계산 값과 측정값을 비교한 결과 최대1.98%의 오차를 보였다. 방사선 치료계획 시 VSC를 모델링 하여 적용한다면선량에 대한 예측이 가능해 더욱 정확한 치료를 하는데 도움이 될 것으로 사료된다.

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졸-겔법에 의한 유·무기 TiO2-SiO2 혼성(Hybrid)코팅재료의 제조 및 부식 특성 평가 (Preparation of TiO2-SiO2 Organic-Inorganic Hybrid Coating Material by Sol-gel Method and Evaluation of Corrosion Characteristics)

  • 노정준;맹완영
    • Corrosion Science and Technology
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    • 제14권2호
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    • pp.64-75
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    • 2015
  • Single $TiO_2$ coating prepared by sol-gel process usually experiences cracks in coating layer. In order to prevent cracks, an inorganic-organic hybrid $TiO_2-SiO_2$ coating was synthesized by combining precursors with an organic functional group. Five different coatings with various ratios of (1:8, 1:4, 1:1, 1:0.25 and 1:0.125) titanium alkoxide (TBOT, Tetrabutylorthotitanate) to organo-alkoxysilane (MAPTS, ${\gamma}$-Methacryloxy propyltrimethoxysilane) on carbon steel substrate were made by sol-gel dip coating. The prepared coatings were analyzed to study the coating properties (surface crack, thickness, composition) by scanning electron microscope (SEM), focused ion beam (FIB), and Fourier transform infrared spectroscopy (FT-IR). Potentiodynamic polarization tests and electrochemical impedance spectroscopy (EIS) were also performed to evaluate the corrosion characteristics of the coatings. Crack free $TiO_2-SiO_2$ hybrid coatings were prepared with the optimization of the ratio of TBOT to MAPTS. The corrosion rates were significantly decreased in the coatings for the optimized precursor ratio without cracks.