한국정보디스플레이학회:학술대회논문집
- 2005.07a
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- Pages.378-380
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- 2005
Alignment property change in DLC alignment layer containing various hydrogen concentration
- Kim, Jong-Bok (Department of Metallurgical Engineering, Yonsei University) ;
- Kim, Kyung-Chan (Department of Metallurgical Engineering, Yonsei University) ;
- Ahn, Han-Jin (Department of Metallurgical Engineering, Yonsei University) ;
- Hwang, Byung-Har (Department of Metallurgical Engineering, Yonsei University) ;
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Baik, Hong-Koo
(Department of Metallurgical Engineering, Yonsei University)
- Published : 2005.07.19
Abstract
Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.
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