• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.672-676
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• 2004

In this paper, measuring system of 5 DOF motion errors are proposed using two capacitive type sensor, a straight edge and a laser interfoerometer. Yawing error and pitching error are measured using the laser interferometer, and rolling error is measured by the reversal method using a capacitive type sensor. Linear motion errors of horizontal and vertical direction are measured using the sequential two point method. In this case, influence of angular motion errors is compensated using the previously measured angular motion errors. In the horizontal direction, measuring accuracy is within 0.05 $\mu$m and 0.27 arcsec, and in the vertical direction, it is within 0.15 $\mu$m and 0.5 arcsec. From these results, it is confirmed that the proposed measureing system is very effective to the measurement of 5 DOF motion errors in the ultra precision feed tables.

• 로봇학회논문지
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• 제11권3호
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• pp.140-145
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• 2016

In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various $O_2$ plasma treatment conditions. Through the tests, we can confirm that non-$O_2$ plasma treated PVP layer and $O_2$ plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• 한국전기전자재료학회논문지
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• 제22권9호
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• pp.786-791
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• 2009

Transformer failures are mostly due to partial discharges (PDs) caused by the deteriorated insulation. It is, therefore, important to monitor PD occurrence in insulation system and prevent their deterioration. The presented paper deals with a PD detection method by a capacitive probe, which easily apply to cast - resin dry - type transformers. The PD detection system consists of a capacitive probe and a low noise amplifier having the frequency bandwidth of 500 $Hz{\sim}30$ MHz. In the experimental set-up, sensitivity of the system is 7.16 mV/pC.

• 대한의용생체공학회:의공학회지
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• 제35권6호
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• pp.203-210
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• 2014

Wearable medical device has been a resurgence of interest thanks to the development of technology and propagation of smart phone in recent years. Various types of wearable devices have been introduced and available in market. Capacitive coupled electrode which measures electrocardiogram over cloth is able to be applied wearable device. In previous approaches of capacitive electrode, they need proper pressure for stable contact of the electrode to body surface. However, wearable device that gives pressure on body surface is not suitable for long-term monitoring. In this study, we proposed adhesive polyurethane-based capacitive electrode for patch-type wearable electrocardiogram (ECG) monitoring device. Self-adhesive polyurethane make the electrode and whole system be adhered to the surface of skin without any pressure. The patch-type system is consisted of analog filter, analog-to-digital converter and wireless transmission module and designed to be attached on the body as a patch. To validate the feasibility of the developed system, we measured ECG signal in stable and active state and extracted heart rate. Therefore, we observed skin response after long-term attachment for biocompatibility of the adhesive polyurethane and adhesive strength of it. The result shows the possibility of applying the developed system for ECG monitoring in real-life.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2015년도 춘계학술대회
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• pp.509-512
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• 2015

본 논문에서는 유압 실린더내의 피스톤 위치를 측정하기 위한 정전용량 센서(Capacitive Sensor) 구조를 연구하였다. 기존에 유압 실린더 내 피스톤 위치 측정을 위해 인덕티브(Inductive) 방식을 응용한 LVDT(Linear Variable Differential Transformer) 센서가 사용되고 있으며, 높은 정확도를 갖지만, 고가이며 구조적으로 복잡하다는 단점이 있다. 본 논문에서는 이러한 단점을 극복하기 위한 방법으로 유압실린더 내 최적화된 구조를 바탕으로 여러 가지 비접촉 정전용량 센서 구조 방식을 연구하였다. 실험을 통하여 본 논문의 제안구조를 사용하면 유압 실린더 내 피스톤 위치측정이 가능함을 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2087-2089
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• 2004

Capacitive pressure sensor는 Piezo type sensor에 비해 온도의 영향이 적어 공업계측, 전기용품 등 그 용도가 다양하여 폭넓게 사용되어지고 있지만, 측정값의 비선형성이 존재하여 측정값에 대한 신뢰도가 떨어지는 단점이 있다. 본 연구에서는 기존 capacitive pressure sensor의 비선형적 output을 개선하기 위한 방법으로 touch mode capacitive pressure sensor를 제안하였다. 또한, 실제 Device제작에 앞서 FEM 해석을 수행하였다. 2mm X 2mm 크기의 diaphragm, $25{\mu}m$의 두께, $20{\mu}m$의 gap을 갖는 Sensor를 Simulation하였으며 설계 변수를 추출하여 각각의 설계변수에 대한 해석을 실시하였다. 그 결과 15.2psi${\sim}$31psi의 영역에서 8.58pF${\sim}$54.31pF의 capacitance가 선형적으로 나타나는 sensor임을 확인하였다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.54-57
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• 2009

차기 한국형 발사체의 추진제 수위 측정시스템은 적용하는 추진제의 극저온 환경 및 유량제어 특성을 고려하여 연속적인 정전용량 값 출력이 가능한 정전용량형이 채택될 예정이다. 현재 정전용량형 신호 감지방식은 2전극과 3전극 방식이 있으나 본 연구에서는 측정 정확도를 고려하여 모든 유체에 적용 가능한 3전극 방식을 채택하였다. 본 논문에는 3전극 방식의 감지원리에 대한 고찰 결과 및 감지부의 형상 변화가 정전용량값에 미치는 영향에 대한 분석 결과, 추진제 탱크 상단의 감지부 설치 위치에 따른 신호감지 영향을 확인하기 위하여 시뮬레이션 프로그램을 활용한 결과가 정리되어 있다. 본 연구에서 얻어진 자료는 실제 탱크 내의 추진제 수위 측정시스템 감지부 설계 및 제작에 활용 가능하다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.1103-1104
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• 2011

• 전기학회논문지P
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• 제57권1호
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• pp.1-5
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• 2008

The output voltage value of AC high voltage source has been usually obtained by multiplying low voltage value measured at both terminals of low voltage resistor by the dividing ratio of the high voltage capacitive divider. From the dividing ratio determined of each 200 kV capacitive divider, we have developed step-up method for measuring the output voltage up to 400 kV using two same type of 200 kV capacitive dividers connected in series. The theoretical dividing ratio of 400 kV capacitive dividers connected in series coincides with that of manufacturer's certification within measurement uncertainty. Thus, this developed step-up method makes it possible to extend the range of output voltage from 200 kV to 400 kV. Furthermore, The dividing ratio of divider under test obtained using this step-up method is consistent with that obtained using one 200 kV high voltage divider within corresponding uncertainties.