• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.57-62
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• 2022

The plasma resistance of multi-component glasses containing La, Gd, Ti, Zn, Y, Zr, Nb, and Ta was analyzed in this study. The plasma etching was performed via inductively coupled plasma-reactive ion etching (ICP-RIE) using CF₄/O₂/Ar mixed gas. After the reaction, the glass with a low fluoride sublimation temperature and high content of P, Si, and Ti elements showed a high etching rate. On the other hand, the glass containing a high fluoride sublimation temperature component such as Ca, La, Gd, Y, and Zr exhibited high plasma resistance because the etch rate was lower than that of sapphire. Glass with low plasma resistance increased surface roughness after etching or nanoholes were formed on the surface, but glass with high plasma resistance showed little change in surface microstructure. Thus, the results of this study demonstrate the potential for the development of plasma-resistant glasses (PRGs) with other compositions besides alumino-silicate glasses, which are conventionally referred to as plasma-resistant glasses.

• Korean Journal of Materials Research
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• v.5 no.1
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• pp.63-74
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• 1995

Process optimization experiments based on the Taguchi method were performed in order to set up the optimal process conditions for the contact oxide etching process module which was built in order to be attached to the cluster system of multi-processing purpose. From the two times experiments of Taguchi method, the overall behaviors of the etchmg characteristics depending upon the equipment parameters were understood at the 1st Taguchi experiment, the detail and optimal process conditions were extracted from the 2nd Taguchi experiment. As a final analysis of experimental results, the optimal etching characteristics were obtalned at the process conditions of $CHF_{3}/CF_{4}$ gas flow rate=72/8 sccm, chamber pressure=50 mTorr, RF power=300 Watts, magnetic field intensity=90 Gauss.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.5
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• pp.353-357
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• 2010

Recently, silicon etching have received much attention for display industry, nano imprint technology, silicon photonics, and MEMS application. After the etching process, removing of etch mask and residue of sidewall is very important. The investigation of the etched mask removing was carried out by using the ashing, HF dipping and acid cleaning process. Experiment shows that oxygen component of reactive gas and photoresist react with silicon and converting them into the mask fence. It is very difficult to remove by using ashing or acid cleaning process because mask fence consisted of Si and O compounds. However, dilute HF dipping is very effective process for SiOx layer removing. Finally, we found optimized condition for etched mask removing.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• Carbon letters
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• v.4 no.4
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• pp.168-174
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• 2003

Silver nitrate ($AgNO_3$) powder was mixed into a reformed pitch precursor. Then, the silver-containing pitch was melt spun to form round and "C" shape fibers. A wire mesh was inserted prior to the nozzle to improve the spinnability of the silvercontaining precursor pitch. Silver particles in the carbon fibers (CFs) were detected by XRD and TEM. These tests showed that silver particles were uniformly distributed and the total amount of silver remained constant during stabilization and carbonization. Next, the silver-containing CFs were activated by steam diluted in nitrogen gas. Silver particles accelerated the activation rate, but the specific surface areas of the silver-containing ACFs were similar to those of non-silver containing ACFs at the same burn-off levels. The specific surface area of the C-shaped activated carbon fibers was larger than that of the round activated carbon fibers. The likely reason is that the surface area of a C-shaped CF is about two times larger than that of a round CF when equivalent cross-sectional areas are compared. A small amount of silver particles in the periphery of the CFs was removed during the activation, but the remainder of silver was stayed within the ACFs.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.1
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• pp.79-84
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• 2002

An accurate cross sections set is necessary for the quantitatively understanding and modeling of plasma phenomena. By using the electron swarm method, we determine an accurate electron cross sections set for objective atoms or molecule at low electron energy range. It is general calculation that used in this method to an two-term approximation of Boltzmann equation. But it may give erroneous transport coefficients for CF$_4$ molecule treated in this paper having \`C2v symmetry\`, therefore, multi-term approximation of the Boltzmann equation analysis which can consider anisotropic scattering exactly is carried out. It is necessary to require understanding of the fundamental principle of analysis method. Therefore, in this paper, we compared the electron transport coefficients(W and ND$\_$L/) in pure Ar, O$_2$, and CF$_4$ gas calculated by using two-term approximation of the Boltzmann equation analysis code uses the algorithm proposed by Tagashira et al. with those by multi-term approximation by Rubson and Ness which was developed at James-Cook university, and discussed an application and/or validity of the calculation method by comparing these calculated results.

• The Plant Pathology Journal
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• v.38 no.1
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• pp.33-45
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• 2022

To screen antagonistic fungi against plant pathogens, dual culture assay (DCA) and culture filtrate assay (CFA) were performed with unknown soil-born fungi. Among the different fungi isolated and screened from the soil, fungal isolate ANU-301 successfully inhibited growth of different plant pathogenic fungi, Colletotrichum acutatum, Alternaria alternata, and Fusarium oxysporum, in DCA and CFA. Morphological characteristics and rDNA internal transcribed spacer sequence analysis identified ANU-301 as Aspergillus terreus. Inoculation of tomato plants with Fusarium oxysporum f. sp. lycopersici (FOL) induced severe wilting symptom; however, co-inoculation with ANU-301 significantly enhanced resistance of tomato plants against FOL. In addition, culture filtrate (CF) of ANU-301 not only showed bacterial growth inhibition activity against Dickeya chrysanthemi (Dc), but also demonstrated protective effect in potato tuber against soft rot disease. Gas chromatography-tandem mass spectrometry analysis of CF of ANU-301 identified 2,4-bis(1-methyl-1-phenylethyl)-phenol (MPP) as the most abundant compound. MPP inhibited growth of Dc, but not of FOL, in a dose-dependent manner, and protected potato tuber from the soft rot disease induced by Dc. In conclusion, Aspergillus terreus ANU-301 could be used and further tested as a potential biological control agent.

• Carbon letters
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• v.12 no.4
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• pp.236-242
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• 2011

The oxyfluorination effects of activated carbon nanofibers (OFACFs) were investigated for $CO_2$ storage. Electrospun CFs were prepared from a polyacrylonitrile/N,N-dimethylformamide solution via electrospinning and heat treatment. The electrospun CFs were chemically activated in order to generate the pore structure, and then oxyfluorination was used to modify the surface. The samples were labeled CF (electrospun CF), ACF (activated CF), OFACF-1 ($O_2:F_2$ = 7:3), OFACF-2 ($O_2:F_2$ = 5:5) and OFACF-3 ($O_2:F_2$ = 3:7). The functional group of OFACFs was investigated using X-ray photoelectron spectroscopy analysis. The C-F bonds formed on surface of ACFs. The intensities of the C-O peaks increased after oxyfluorination and increased the oxygen content in the reaction gas. The specific surface area, pore volume and pore size of OFACFs were calculated by the Brunauer-Emmett-Teller and density functional theory equation. Through the $N_2$ adsorption isotherm, the specific surface area and pore volume slightly decreased as a result of oxyfluorination treatment. Nevertheless, the $CO_2$ adsorption efficiency of oxyfluorinated ACF improved around 16 wt% due to the semi-ionic interaction effect of surface modificated oxygen functional groups and $CO_2$ molecules.

• Journal of Magnetics
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• v.15 no.3
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• pp.132-137
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• 2010

Plasma etching of $SiO_2$ contact holes was statistically analyzed by a fractional factorial experimental design. The analysis revealed the dependence of the etch rate and DC self-bias voltage on the input factors of the magnetically enhanced reactive ion etching reactor, including gas pressure, magnetic field, and the gas flow rates of $CHF_3$, $CF_4$, and Ar. Empirical models of the DC self-bias voltage and etch rate were obtained. The DC self-bias voltage was found to be determined mainly by the operating pressure and the magnetic field, and the etch rate was related mainly to the pressure and the flow rates of Ar and $CHF_3$.

• Korean Journal of Soil Science and Fertilizer
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• v.45 no.6
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• pp.1173-1178
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• 2012

Water competition among domestic, industrial and agricultural sectors has been gradually heightened recently in Korea as the lack of water supply is expected in the near future. About 46% of nation's water use is consumed in paddy farming to produce rice. And the conservation of water resource and quality in agricultural sector is a pending issue in the nation's long term water management plan. New paddy rice farming techniques that use significantly less irrigation water are urgently required. System of Rice Intensification (SRI) that is now well known to produce more rice with less water consumption has not been tried in Korea yet. And environmental effect of SRI on greenhouse gases (GHGs) has not been well investigated. The objective of this study was to measure the effect of SRI on GHGs as well as water use and rice yield in a Korean paddy condition. Three experimental runoff plots $5{\times}15m$ in size were prepared at an existing paddy field. Runoff, GHGs emission and water quality were measured during the 2011 growing seasons while a Japonica rice variety was cultivated. Rice plants grew better and healthier in SRI plots than in continuously flooded (CF) and intermittently drained (ID) plots. Rice yield from SRI plots increased 112.8 (ID)~116.1 (CF)% compared with CF and ID plots. Irrigation requirement of SRI plots compared to CF plot reduced by 52.6% and ID plot reduced by 62.0%, meaning that about 37.9~47.4% of irrigation water could be saved. GHGs emission from SRI plots reduced by 71.8% compared to that from CF plot and by 18.4% compared to that from ID plot, meaning that SRI could help contribute to ease the greenhouse gas accumulation in the atmosphere. It was believed that SRI is a promising paddy farming technique that could increase rice yield, and reduce irrigation water requirement and GHGs emission not just in Korea but also other rice farming countries all over the world. However, it was recommended that long term studies under different conditions including rice variety, soil texture, water source, climate need to be conducted for reliable data for the development of environmental policies related to GHGs emission control and management.