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An Application of Two-term and Multi-term Approximation of Boltzmann Equation to Electron Swarm Method

전자군 방법에 이용되는 2항근사와 다항근사 볼츠만 방정식의 적용

  • 하성철 (동국대학교 전기공학과) ;
  • 전병훈 (중부대학교 정보공학부 전기전자공학과)
  • Published : 2002.01.01

Abstract

An accurate cross sections set is necessary for the quantitatively understanding and modeling of plasma phenomena. By using the electron swarm method, we determine an accurate electron cross sections set for objective atoms or molecule at low electron energy range. It is general calculation that used in this method to an two-term approximation of Boltzmann equation. But it may give erroneous transport coefficients for CF$_4$ molecule treated in this paper having \`C2v symmetry\`, therefore, multi-term approximation of the Boltzmann equation analysis which can consider anisotropic scattering exactly is carried out. It is necessary to require understanding of the fundamental principle of analysis method. Therefore, in this paper, we compared the electron transport coefficients(W and ND$\_$L/) in pure Ar, O$_2$, and CF$_4$ gas calculated by using two-term approximation of the Boltzmann equation analysis code uses the algorithm proposed by Tagashira et al. with those by multi-term approximation by Rubson and Ness which was developed at James-Cook university, and discussed an application and/or validity of the calculation method by comparing these calculated results.

Keywords

References

  1. J.Phys. v.B2 The determination of the total excitation cross section in neon by comparison of theoretical and experimental values of Townsend's primary ionization coefficient W.R.L.Thomas
  2. J.Phys v.D10 The development of elecron avalanches in argon at high E/N values:Ⅱ Boltzmann equation analysis H.Tagashira;Y.Sakai;S.Sakamoto
  3. Aust.J.Phys v.33 Kinetic theory of charged particle swarms in neutral gases K.Kumar;H.R.Skullerud;R.E.Robson https://doi.org/10.1071/PH800343b
  4. Phys.Rev. v.A33 Velocity distribution function and transport coefficients of electron swarms in gases:spherical-harmonics decomposition of Boltzmann's equation R.E.Robson;K.R.Ness
  5. J.Phys v.D21 Electron transport parameters in argon and its momentum transfer cross section Y.Nakamura;M.Kurachi
  6. J.Phys. v.D31 Measurement of drift velocity and longitudinal diffusion coefficient of electrons in pure oxygen and in oxygen-argon mixtures B.H.Jeon;Y.Nakamura
  7. 한국전기전자재료학회 2001춘계학술대회 The analysis of electron transport coefficients in CF₄ molecular gas by two-term approximation of the Boltzmann equation B.H.Jeon;S.C.Ha
  8. Aust.J.Phys v.37 Model calculations of negative differential conductivity in gases Z.L.Petrovic;R.W.Crompton;G.N.Haddad https://doi.org/10.1071/PH840023
  9. Trans. on ZZM v.2 no.1 Determination of the inelastic cross sections for C₃F8 molecule by electron swarm study B.H.Jeon;S.C.Ha;J.M.Yang