• Title/Summary/Keyword: Bottom electrode

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Surface Treatment Effect on Electrical Characteristics of Ink-Jet Printed Pentacene OTFTs Employing Suspended Source/Drain Electrode

  • Park, Young-Hwan;Kim, Yong-Hoon;Kang, Jung-Won;Oh, Myung-Hwan;Han, Jeong-In
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1312-1314
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    • 2007
  • The effect of gate insulator surface treatment on electrical characteristics of bottom contact (BC) and suspended source/drain (SSD) organic thinfilm transistors (OTFTs) was studied. Triisopropylsilylethynyl pentacene was used as an active material and was printed by ink-jet printing method. In case of the BC OTFTs, threshold voltage was shifted from positive to near zero, and the fieldeffect mobility was increased when the gate insulator surface was treated with hexamethyldisilazane. However, in case of SSD OTFT, threshold voltage shift was not observed and the field-effect mobility was decreased.

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Dielectric properties of ZrTiO4 thin films deposited by DC magnetron reactive sputtering

  • Kim, Taeseok;Park, Byungwoo;Hong, Kug-Sun
    • Journal of Korean Vacuum Science & Technology
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    • v.3 no.2
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    • pp.130-133
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    • 1999
  • Paraelectric ZrTiO4 thin films were synthesized on a Si(100) substrate using DC magnetron reactive sputtering. Films deposited above-400$^{\circ}C$ exhibited crystalline characteristics. The dielectric constants ($\varepsilon$) and dielectric losses (tan$\delta$) of as-deposited and annealed films were measured in the 1 MHz range using a Pt upper electrode and a phosphorous-doped si bottom electrode. Preliminary data showed that as the deposition temperature increased, the dielectric losses decreased while the dielectric constants did not change significantly. similar trends for dielectric losses were observed when the as-deposited samples were annealed at 800$^{\circ}C$. The reduction of dielectric losses at high-deposition temperatures and post annealing correlated well with the x-ray diffraction peak widths.

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Improvement of source-drain contact properties of organic thin-film transistors by metal oxide and molybdenum double layer

  • Kim, Keon-Soo;Kim, Dong-Woo;Kim, Doo-Hyun;Kim, Hyung-Jin;Lee, Dong-Hyuck;Hong, Mun-Pyo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.270-271
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    • 2008
  • The contact resistance between organic semiconductor and source-drain electrode in Bottom Contact Organic Thin-Film Transistors (BCOTFTs) can be effectively reduced by metal oxide/molybdenum double layer structure; metal oxide layers including nickel oxide (NiOx/Mo) and moly oxide(MoOx) under molybdenum work as a high performance carrier injection layer. Step profiles of source-drain electrode can be easily achieved by simultaneous etching of the double layers using the difference etching rate between metal oxides and metal layers.

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The performance of the Co gate electrode formed by using selectively chemical vapor deposition coupled with micro-contact printing

  • Yang, Hee-Jung;Lee, Hyun-Min;Lee, Jae-Gab
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1119-1122
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    • 2005
  • A selective deposition of Co thin films for thin film transistor gate electrode has been carried out by the growth with combination of micro-contact printing and metal organic chemical vapor deposition (MOCVD). This results in the elimination of optical lithography process. MOCVD has been employed to selectively deposit Co films on preformed OTS gate pattern by using micro-contact printing (${\mu}CP$). A hydrogenated amorphous silicon TFT with a Co gate selectively formed on SAMs patterned structure exhibited a subthreshold slope of 0.88V/dec, and mobility of $0.35cm^2/V-s$, on/off current ratio of $10^6$, and a threshold voltage of 2.5V, and thus demonstrating the successful application of the novel bottom-up approach into the fabrication of a-Si:H TFTs.

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Ballistic Electron Emitter using Nanocrystallized Poly-Si (Nanocrystallized Poly-Si을 이용한 Ballistic 전자 에미터)

  • Choi, Yong-Woon;Lee, Byung-Cheol
    • Proceedings of the IEEK Conference
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    • 2008.06a
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    • pp.489-490
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    • 2008
  • As anodizing method using poly-Si (polycrystalline silicon) grown by LPCVD (Low Pressure Chemical Vapor Deposition), a ballistic electron emitter was made. An OPPS (Oxidized Porous Poly-Si) structure can generate ballistic electron which can pass through without scattering owing to electric field of oxide layer wrapped around nanocrystal due to applied voltage of between surface and bottom electrode. As electrode, (Al, Au and Pt/ti) were used. In this case, there were the better characteristics in Al and Pt/ti than in Al and Au.

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Fabrication and characteristics of ITO thin films on CR39 substrate for transparent OTFT

  • Kwon, Sung-Yeol
    • Journal of Sensor Science and Technology
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    • v.16 no.3
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    • pp.229-233
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    • 2007
  • The indium tin oxide (ITO) films were deposited on CR39 substrate using DC magnetron sputtering. The ITO thin films deposited at room temperature because CR39 substrate its glass-transition temperature is $130^{\circ}C$. The ITO thin films used bottom and top electrode and for organic thin film transparent transistors (OTFTs). The ITO thin film electrodes electrical properties and optical transparency properties in the visible wavelength range (300-800 nm) strongly dependent on volume of oxygen percent. For the optimum resistivity and transparency of the ITO thin film electrode achieved with a 75 W plasma power, 10 % volume of oxygen and a 27 nm/min deposition rate. Above 85 % transparency in the visible wavelength range (300-800 nm) measured without post annealing process and a low resistivity value $9.83{\times}10^{-4}{\Omega}cm$ was measured thickness of 300 nm. All fabrication process of ITO thin films did not exceed $80^{\circ}C$.

Preparation of Al Thin Film with Magnetic Field Distribution (자계 분포 변화에 따른 OLED용 Al 박막의 제작)

  • Kim, Hyeon-Ung;Jo, Beom-Jin;Keum, Min-Jong;Kim, Kyung-Hwan
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.65-67
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    • 2005
  • The Al electrode for OLED was prepared by Facing Targets Sputtering(FTS) system which can reduce the damage of organic layer. The Al thin films were deposited on the cell (Lif/EML/HTL/Bottom electrode : ITO) for examination the current-voltage properties of OLED with magnetic field distribution between two faced targets. Thickness and current-voltage properties of Al thin films are measured by ${\alpha}-step$ and semiconductor parameter analyzer (HP4156A), respectively.

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The study of phase-change according to temperature and voltage in chalcogenide thin film (칼코게나이드 박막의 온도, 전압에 따른 상변화에 관한 연구)

  • Yang, Sung-Jun;Shin, Kyung;Park, Jung-Il;Nam, Lee-Ki;Chung, Hong-Bay
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.416-419
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    • 2003
  • There is a growing need for a nonvolatile memory technology with faster speed than existing nonvolatile memories. We studied of phase-change according to temperature and voltage in chalcogenide thin film base on $Ge_2Sb_2Te_5$. Searching for Tg(Glass transition temperature) temperature controlled on hotplate with RT quenching. We measure I-V characteristic through out bottom electrode(ITO) and top electrode(Al) between $Ge_2Sb_2Te_5$. And compared with I-V characteristics after impress the variable stress.

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High-efficiency Organic Light-emitting Diodes(OLEDs) with optimized multilayer transparent electrodes

  • Yun, Chang-Hun;Cho, Hyun-Su;Yoo, Seung-Hyup
    • Journal of Information Display
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    • v.11 no.2
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    • pp.52-56
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    • 2010
  • High-efficiency organic light-emitting diodes (OLEDs) based on multilayer transparent electrodes (MTEs) are reported. The dielectric/metal/dielectric (DMD) multilayer electrode based on a thin silver layer achieved high sheet conductance as small as $6{\Omega}/sp$ and a tuning capability in the optical and electrical properties by engineering the inner and outer dielectric layers. In the conventional normal bottom-emitting structure, a DMD-based OLED can be fabricated with 90% higher forward luminous efficiency and 30% higher external quantum efficiency (EQE) compared to ITO-based devices. Special attention was paid to the optimization method of such MTE structure considering both the injection and optical structures.

Antireflective ZTO/Ag bilayer-based transparent source and drain electrodes for highly transparent thin film transistors

  • Choe, Gwang-Hyeok;Kim, Han-Gi
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.110.2-110.2
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    • 2012
  • We reported on antireflective ZnSnO (ZTO)/Ag bilayer and ZTO/Ag/ZTO trilayer source/drain (S/D) electrodes for all-transparent ZTO channel based thin film transistors (TFTs). The ZTO/Ag bilayer is more transparent (83.71%) and effective source/drain (S/D) electrodes for the ZTO channel/Al2O3 gate dielectric/ITO gate electrode/glass structure than ZTO/Ag/ZTO trilayer because the bottom ZTO layer in the trilayer increasea contact resistance between S/D electrodes and ZTO channel layer and reduce the antireflection effect. The ZTO based all-transparent TFTs with ZTO/Ag bilayer S/D electrode showed a saturation mobility of 4.54cm2/Vs and switching property (1.31V/decade) comparable to TTFT with Ag S/D electrodes.

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