• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.355-360
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• 2013

A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.

• Current Research on Agriculture and Life Sciences
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• 제32권2호
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• pp.79-84
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• 2014

본 논문에서는 저가, 저전력 및 소형의 IMU를 구성하기 위한 MEMS 관성 센서를 이용하여 자세 정보를 제공받는 ARHES에 위의 센서를 사용하기 위해 자이로 센서 및 가속도센서의 데이터 출력 특성을 검증하여 오차 및 정확도를 분석하였다. 센서 실험을 위하여 진자 실험 장치를 제작하였고, 진자 운동에 대한 센서 데이터를 수집하였다. 이론적인 수식을 유추하여 센서 데이터의 정확성 분석을 위한 기준 값으로 설정하였다. 센서값과 이론값을 비교하면 각속도에서 4.32~5.72%, 가속도에서 x-, z-축 방향에 대하여 각각 3.53~6.74% 및 3.91~4.16%의 오차율을 나타냈다. 진자실험 장치를 이용한 센서 검증에서 무인헬리콥터에 사용될 센서로서 적합한 것으로 평가되었으며 이는 짐벌장치 등을 이용한 자세추정 알고리즘을 구성하는데 기초가 되었다. 또한, 더욱 정밀한 실험을 위해서는 온도 등 주변 환경 요인에 대한 보정이 요구된다.

• 센서학회지
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• 제17권1호
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• pp.75-80
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• 2008

In this work, we optimized a microbolometer for application of a $CO_2$ detector by using MEMS technology. We fabricated a stable thermal isolation structure by varying the lengths of supporting legs which affect bolometer performance. We could fabricate more stable thermal isolation structure for the microbolometer through the results of ANSYS simulations, and minimize the fabrication processes by using bulk micromachining to use a $CO_2$ detector. The microbolometer shows a detectivity of $2.5{\times}109$ cmHz$^{1/2}$/W at a chopper frequency of 8 Hz and a bias current of $6.25\;{\mu}A$ with a vacuum package of about $3.0{\times}10.3$ torr. Therefore, we put to conclusion that the microbolometer optimized in this experiment could be useful for the application of a $CO_2$ detector.

• 한국정밀공학회지
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• 제25권11호
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• pp.22-29
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• 2008

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제6권11호
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• pp.2901-2919
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• 2012

Recent research in MEMS (Micro-Electro-Mechanical Systems) and wireless communication has enabled tracking of continuous objects, including fires, nuclear explosions and bio-chemical material diffusions. This paper proposes an energy-efficient scheme that detects and tracks different dynamic shapes of a continuous object (i.e., the inner and outer boundaries of a continuous object). EBCO (Efficient Boundary detection and tracking of Continuous Objects in WSNs) exploits the sensing capabilities of sensor nodes by automatically adjusting the sensing range to be either a boundary sensor node or not, instead of communicating to its neighboring sensor nodes because radio communication consumes more energy than adjusting the sensing range. The proposed scheme not only increases the tracking accuracy by choosing the bordering boundary sensor nodes on the phenomenon edge, but it also minimizes the power consumption by having little communication among sensor nodes. The simulation result shows that our proposed scheme minimizes the energy consumption and achieves more precise tracking results than existing approaches.

• 소성∙가공
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• 제14권5호
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• 센서학회지
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• 제18권3호
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• 센서학회지
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• 제17권6호
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Bulletin of the Korean Chemical Society
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• 제32권4호
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• pp.1298-1302
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• 2011

This study describes the development of an electrochemical array immunochip for the detection of IgG. Interdigitated immunochip platforms were fabricated by sputtering gold on a glass wafer by using MEMS process and then were coated with Eudragit S100, an enteric polymer, forming an insulating layer over the working area of immunochips. The breakdown of the polymer layer was exemplified by the catalytic action of urease which, in the presence of urea, caused an alkaline pH change. This subsequently caused an increase of the double layer capacitance of the underlying electrode. Used in conjunction with a competitive immunoassay format, this allowed the ratio of initial to final electrode capacitance to be directly linked with the concentration of analyte, i.e. IgG. Responses to IgG could be detected at IgG concentration as low as $250\;ngmL^{-1}$ and showed good linearity up to IgG concentration as high as $20\;{\mu}gmL^{-1}$.

• Smart Structures and Systems
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• 제8권1호
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• pp.53-67
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• 2011

Human state in human-machine systems highly affects the overall system performance, and should be detected and monitored. Physiological cues are essential indicators of human state and useful for the purpose of monitoring. The study presented in this paper was focused on developing a bio-inspired sensing system, i.e., Nano-Skin, to non-intrusively measure physiological cues on human-machine contact surfaces to detect human state. The paper is presented in three parts. The first part is to analyze the relationship between human state and physiological cues, and to introduce the conceptual design of Nano-Skin. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography are closely related with human state. They can be measured through human-machine contact surfaces using Nano-Skin. The second part is to discuss the technologies for skin temperature measurement. The third part is to introduce the design and manufacture of the Nano-Skin for skin temperature measurement. Experiments were performed to verify the performance of the Nano-Skin in temperature measurement. Overall, the study concludes that Nano-Skin is a promising product for measuring physiological cues on human-machine contact surfaces to detect human state.