Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Structure optimization and characterization of a microbolometer for a CO2 detector

이산화탄소 감지소자를 위한 마이크로볼로미터 구조 최적화 및 특성연구

  • Seo, Ho-Won (Nano Bio Research Center, Korea Institute of Science and Technology) ;
  • Kim, Tae-Geun (School of Electronics & Engineering, Korea University) ;
  • Moon, Sung (Nano Bio Research Center, Korea Institute of Science and Technology)
  • 서호원 (한국과학기술연구원 나노바이오연구센터) ;
  • 김태근 (고려대학교 전기전자공학부) ;
  • 문성욱 (한국과학기술연구원 나노바이오연구센터)
  • Published : 2008.01.31
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Abstract

In this work, we optimized a microbolometer for application of a $CO_2$ detector by using MEMS technology. We fabricated a stable thermal isolation structure by varying the lengths of supporting legs which affect bolometer performance. We could fabricate more stable thermal isolation structure for the microbolometer through the results of ANSYS simulations, and minimize the fabrication processes by using bulk micromachining to use a $CO_2$ detector. The microbolometer shows a detectivity of $2.5{\times}109$ cmHz$^{1/2}$/W at a chopper frequency of 8 Hz and a bias current of $6.25\;{\mu}A$ with a vacuum package of about $3.0{\times}10.3$ torr. Therefore, we put to conclusion that the microbolometer optimized in this experiment could be useful for the application of a $CO_2$ detector.

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References

  1. Joda Wormhoudt 'Infrared methods for gaseous measurements', Optica Acta, vol. 33, no. 9, pp. 1095-1095, 1986
  2. Currie, J.F., 'Micromachined thin film solid state electgrochemical $CO_2$, $NO_2$, and $SO_2$ gas sensors', Sensors and Actuators, B, Chemical, vol. 59, no. 2/ 3, pp. 235-241, 1999 https://doi.org/10.1016/S0925-4005(99)00227-0
  3. Andreas H., Oliver B., and Christoph H. Henry B., 'Microfabrication techniques for chemical/biosensors', proc. of the IEEE, vol. 91, no. 6, 2003
  4. Paul W. Kruse and David D. Skatrud, 'Uncooled infrared imaging arrays and systems', Academic press, 1997
  5. A.D. Parsons, 'Thin-film infrared absorber structures for advanced thermal detectors', J. Vac. Sci. Technol. A, vol. 6, no. 3, pp. 1686-1689, 1998
  6. Nguyen chi-Anh, H-J Shin, K-Te Kim, Y-H Han, and Sung Moon, 'Characterization of uncooled bolometer with vanadium tungsten oxide infrared active layer', Sensors and Actuators A 123-124, 2005
  7. Y-H Han, K-T Kim, H-J Shin, and Sung Moon, 'Enhanced characteristics of an uncooled microbolometer using vanadium- tungsten oxide as a thermometric material', Applied Physics letters 86, 2005
  8. Nguyen Chi-Ahn and Sung Moon, 'Excess noise in vanadium tungsten oxide bolometric material', Infrared Physics & Technology, 38-41, 2007
  9. I.Y. Park, I.K. Lee, S.K. Lee, K.M. Kang, S.W. Kang, and J.H. Cho, 'Animplementation fo NDIR type $CO_2$ gas sample chamber and measuring hardware for capnograph system in consideration of the time response characteristics', J. Korean Sensors Soc., vol. 10, no. 5, pp. 279-285, 2001
  10. S-K Kim, Y-H Han, K-T Kim, M-S An, H-J Shin, and Sung Moon, 'Application of mcirobolometer to integrated $CO_2$ sensor', Proc. of the International Sensors Conference, 2004
  11. G-J Lee, D-H Oh, J-H Lee, and S-J Kim, 'The diaphragm structure using the local surface etching for the improvement of sensitivity characteristics', J. Korean Sensors Soc., vol. 13, no. 4, pp. 156-160, 2004