• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.828-831
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• 2003

The benefits of the pneumatic valve with piezoelectric element are faster response times, low energy consumption, and the ability to be used in hazardous environments and field bus systems. In this paper, PZT actuator, 2 and 3 stages pneumatic valve were designed and manufactured. Also. characteristics of the pneumatic valve with piezoelectric element were tested with a testing system. It is confirmed that the PZT actuator is useful one for controlling the direction of pilot valve.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.475-480
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• 2000

A new positioning mechanism with Parallel type actuator using piezoelectric material and with dual type actuators using voice coil motor (VCM) and piezoactuator is proposed for optical disk drive or near-field recording type drive, and high speed position and vibration control are investigated. Parallel type bimorph piezoactuator is used as a fine motion actuator with self-sensing technique, which allows a piezoelectric material to concurrently sense and actuate in a closed loop frame work, and positive position feedback control algorithm is adopted to further control residual vibration. For positioning control of VCM, PID control algorithm is adopted.

• Electrical & Electronic Materials
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• v.10 no.5
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• pp.434-439
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• 1997

It this paper, the piezoelectric and electro-induced strain properties of (P $b_{1-}$2x/3/B $i_{x}$ )[N $i_{1}$3/N $b_{2}$3/)$_{0.4}$( $Ti_{0.6}$Z $r_{0.4}$)$_{0.6}$] $O_3$ceramics (x=0, 0.005, 0.02) were investigated with the substitution of B $i^{3+}$, and the feasibility of the application for bimorph actuator was evaluated by measuring the dynamic properties of the piezoelectric bimorph fabricated with above ceramics. Dielectric constant was enhanced with the increase of B $i^{3+}$ substitution, and appeared the maximum value of 5032 at x=0.01 composition. Increasing the substitution of B $i^{3+}$, the electromechanical coefficient( $k_{p}$ , $k_{31}$ ) was increased up to the substitution of 0.5 mol% B $i^{3+}$, showed the value of 0.656, 0.439, respectively. The piezoelectric constant( $d_{33}$ $d_{31}$ ) had the highest value of 344, 825 with the substitution of 0.5 mol% B $i^{3+}$. The strain, generated by 60 Hz AC electric field, had the largest value of 1200($\times$10$^{-6}$ $\Delta$1/1) in the composition with the substitution of 0.5 mol% B $i^{3+}$. The dynamic properties of the bimorph actuator, fabricated with the composition substitution of 0.5 mol% B $i^{3+}$, showed the largest value of 325 $\mu$m at $\pm$150 V square pulse. square pulse.are pulse..

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.10
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• pp.601-607
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• 2016

Piezoelectric thick films of soft $Pb(Zr,Ti)O_3$ (PZT) based commercial material (S55) were fabricated using a conventional tape casting method. Ag-Pd electrodes were printed on the piezoelectric film at room temperature and all 5 layered films with a dimension of $12mm{\times}16mm$ were successfully laminated for a multi-layered piezoelectric ceramic actuator. The laminated specimens were co-fired at $1,100^{\circ}C$ for 1 h. A flat layered and dense microstructure was obtained for the $112{\mu}m$ thick piezoelectric actuator after sintering process. Thereafter, a prototype piezoelectric speaker was fabricated using the multi-layered piezoelectric ceramic actuator which can operate as a bimorph. Its SPL (sound pressure level) characteristic was also evaluated for speaker application. Frequency response revealed that the output SPL with a root mean square voltage of 10 V increased gradually to the highest peak of 87.5 dB for 1.5 kHz and exhibited a relatively stable behavior over the measured frequency range (${\leq}20kHz$) at a distance of 10 cm, implying that the fabricated piezoelectric speaker is potential for speaker applications.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.225-228
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• 2001

A new three-dimensional thin shell element for the structure containing an integrated distributed piezoelectric sensor and actuator is proposed. A finite element formulation for the static response of the shell with piezoelectric sensor／actuator is derived. The assumed strain formulation and the bubble function improves the performance of the shell element. The verification through the calculation of the static response for the piezoelectic bimorph beam shows that the results agree with those from the theoretical analysis very well.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.5
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• pp.385-393
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• 2004

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.397-400
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• 1996

In this paper, robust motion control of a flexible micro-actuator is presented. The actuator is made of a bimorph piezoelectric high-polymer material (PVDF). No mathematical model system can exactly model a physical system such a flexible micro-actuator. For this reason we must be aware of how modeling errors might adversely affect the performance of a control system for such a model. The H method addresses a wide range of the control problems, combining the frequency and time domain approaches. The design is an optimal one in the sense of minimization of the maximum of the closed-loop transfer function. It includes colored measurement and process noise. It also addresses the issues of robustness due to model uncertainties, and is applicable to the, flexible micro-actuator control problem. Therefore, we adopt the H control problem to the robust motion control of the flexible micro-actuator. Theoretical and experimental results demonstrate the satisfactory performance and the effectiveness of the designed controller. the effectiveness of the designed controller.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.4 s.247
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• pp.409-419
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• 2006

The actuating performance of plate-type unimorph piezoelectric composite actuators having various stacking sequences was evaluated by three dimensional finite element analysis on the basis of thermal analogy model. Thermal residual stress distribution at each layer in an asymmetrically laminated plate with PZT ceramic layer and thermally induced dome height were predicted using classical laminated plate theory. Thermal analogy model was applied to a bimorph cantilever beam and LIPCA-C2 actuator in order to confirm its validity. Finite element analysis considering thermal residual deformation showed that the bending behavior of piezoelectric composite actuator subjected to electric loads was significantly different according to the stacking sequence, thickness of constituent PZT ceramic and boundary conditions. In particular, the increase of thickness of PZT ceramic led to the increase of the bending stiffness of piezoelectric composite actuator but it did not always lead to the decrease of actuation distance according to the stacking sequences of piezoelectric composite actuator. Therefore, it is noted that the actuating performance of unimorph piezoelectric composite actuator is rather affected by bending stiffness than actuation distance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.424-429
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• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.883-889
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• 2005

Micro robots have been developed for many applications: medical, industrial, military, and so on. A small mobile robot was built and it has three legs made of bimorph piezoelectric actuators. It proceeds by vibrating the rear leg and it rotates by vibrating one of the front legs. The locomotion of the robot is described by relative position of mass center and the friction between the legs and the floor. This paper describes the principles of locomotion and modeling of the robot Modeling was simulated to investigate the dynamics of its mobility. The simulation results verified the modeling by showing similar movement of the robot as measured. It remained, however, several problems through experiments such as crooked direction of forward movement and proceeding speed.