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Characteristics and Fabrication of Multi-Layered Piezoelectric Ceramic Actuators for Speaker Application

스피커 응용을 위한 적층형 압전 세라믹 액츄에이터 제조 및 특성

  • Lee, Min-seon (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Yun, Ji-sun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Woon Ik (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Hong, Youn-Woo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Paik, Jong Hoo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Jeong Ho (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Yong-Ho (Department of Material Science and Engineering, Pusan University) ;
  • Jeong, Young-Hun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology)
  • 이민선 (한국세라믹기술원 전자소재부품센터) ;
  • 윤지선 (한국세라믹기술원 전자소재부품센터) ;
  • 박운익 (한국세라믹기술원 전자소재부품센터) ;
  • 홍연우 (한국세라믹기술원 전자소재부품센터) ;
  • 백종후 (한국세라믹기술원 전자소재부품센터) ;
  • 조정호 (한국세라믹기술원 전자소재부품센터) ;
  • 박용호 (부산대학교 재료공학과) ;
  • 정영훈 (한국세라믹기술원 전자소재부품센터)
  • Received : 2016.07.05
  • Accepted : 2016.07.23
  • Published : 2016.10.01

Abstract

Piezoelectric thick films of soft $Pb(Zr,Ti)O_3$ (PZT) based commercial material (S55) were fabricated using a conventional tape casting method. Ag-Pd electrodes were printed on the piezoelectric film at room temperature and all 5 layered films with a dimension of $12mm{\times}16mm$ were successfully laminated for a multi-layered piezoelectric ceramic actuator. The laminated specimens were co-fired at $1,100^{\circ}C$ for 1 h. A flat layered and dense microstructure was obtained for the $112{\mu}m$ thick piezoelectric actuator after sintering process. Thereafter, a prototype piezoelectric speaker was fabricated using the multi-layered piezoelectric ceramic actuator which can operate as a bimorph. Its SPL (sound pressure level) characteristic was also evaluated for speaker application. Frequency response revealed that the output SPL with a root mean square voltage of 10 V increased gradually to the highest peak of 87.5 dB for 1.5 kHz and exhibited a relatively stable behavior over the measured frequency range (${\leq}20kHz$) at a distance of 10 cm, implying that the fabricated piezoelectric speaker is potential for speaker applications.

Keywords

References

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