• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• 복식
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• 제58권6호
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• pp.35-41
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• 2008

The purposes of this study lied in the analysis and classification of neck-base circumference shapes of the women in their twenties, by the application of three-dimensional automatic measurement data of human body, and thereby in the understanding of neck-base circumference shapes by the classified type. The findings are as follows: 1. The comparison of three-dimensional human body measurement items relating to the neck-base circumference part of the women in their twenties indicated that the largest individual difference was found in cervicale-center-anterior neck radius than in other items. 2. The factor analysis, which was conducted to extract the factors constituting the neck-base circumference, showed the shape of cervicale(factor 1), the shape of section neck(factor 2), the thickness of neck(factor 3), the shape of anterior neck(factor 4), and the shape of side neck(factor 5). 3. The classification of the neck-base circumference shapes resulted in three types. Type 1 was the shape of a reverse triangle hanging forward, Type 2 was that of a circle, and Type 3 was that of an oval open to the sides.

• 제어로봇시스템학회논문지
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• 제14권2호
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• pp.125-132
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• 2008

This paper describes a mobile inspection robot with an automatic pipe tracking system for a feeder pipe inspection in a PHWR. The robot is composed of two inch worm mechanisms. One is for a longitudinal motion along a pipe, and the other is for a rotational motion in a circumferential direction to access all of the outer surfaces of a pipe. The proposed mechanism has a stable gripping capability and is easy to install. An automatic pipe tracking system is proposed based on machine vision techniques to make the mobile robot follow an exact outer circumference of a curved feeder pipe as closely as possible, which is one of the requirements of a thickness measurement system for a feeder pipe. The proposed sensing technique is analyzed to attain its feasibility and to develop a calibration method for an accurate measurement. A mobile robot and control system are developed, and the automatic pipe tracking system is tested in a mockup of a feeder pipe.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 추계학술대회 논문집
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• pp.395-401
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• 1993

The purpose of this paper is to develop an automatic measuring system based on the digital image processing which can be applied to the in-process measurement of the characteristics of the thin thickness. The derivative operators is used for edge detection in gray level image. This concept can be easiliy illustrated with the aid of object shows an image of a simple light object on a dark background, the gray level profile along a horizontal scan line of the image, and the first and second derivatives of the profile. The first derivative of an edge modeled in this manner is () in all regions of constant gray level, and assumes a constant value during a gray level transition. The experimental results indicate that the developed qutomatic inspection system can be applied in real situation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1191-1194
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• 2003

At present, the fabrication of optical filter for optical communication mostly depends on handwork, and only a few companies are propelling semi-automatic systems compounded with automatic and hand-operated methods. The measurement evaluation of optical filters is not commonly useful, so it causes difficulties in the producing field. And the packaging process becomes a very unstable process because the filters are judged from the results that they are not measured and immediately packaged during that process. In this situation, the automatic assembly system of optical filter for communication is extremely important and has begun to make its appearance as the most necessary technology for developing optical communication component with high-functionality. In this paper, we constructed systems of assembly and performance evaluation for micro optical collimator. And by using that, we designed a system capable of performance evaluation and assembly of film filter of about 30 $\mu\textrm{m}$ thickness as well as optical filter for common communication.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 1999년도 제3회 압연심포지엄 논문집 압연기술의 미래개척 (Exploitation of Future Rolling Technologies)
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• pp.150-157
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• 1999

As the customer demands thickness quality stricter, new techniques of automatic thickness control(AGC), is adopted to continuous cold rolling mills. The cold rolling mills of Pohang Works have revamped the existing conventional AGC system that control the thickness at all-stands automatically by the mass flow AGC based on the measurement of strip-speed and thickness between mill stands. The No. 2 Cold Rolling Mill be has adopted the New AGC system since Oct. 1995, and The No.1 Cold Rolling Mill since June. 1999. Thanks to the New AGC system, precise control of thickness is possible not only at constant rolling speed region, but also during line speed up and down. This report describes application techniques of the New AGC system and performance of the system.

• 전자공학회논문지CI
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• 제40권4호
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• pp.206-213
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• 2003

본 논문에서는 고성능의 하드웨어 장비가 아닌 일반적으로 사용되는 개인용 컴퓨터와 CCD 카메라를 이용하여 자동으로 경량기포 콘크리트(autoclaved lightweight concrete) 블록간의 상하 경사도, 두께의 불균일성, 그리고 불량 여부를 판별할 수 있는 알고리즘을 제안하였다. 제안한 치수측정 및 불량검사 자동화 알고리즘은 실제 작업환경을 고려하여 일반적인 조명조건에서의 전처리과정과 작업공정내의 피사체의 진동을 고려한 단위길이 결정방법, 카메라의 곡률보정에 의한 치수오차 보정 방법 등을 적용하였으며, 실제공정에서의 실험 결과를 통해 블록군의 계측에 있어서 0.8초 이내에 측정오차 1%이내의 데이터를 산출해 냄으로서 제안한 불량검사 자동화시스템의 신뢰성을 검증할 수 있었다.

• Smart Structures and Systems
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• 제1권1호
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• pp.47-61
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• 2005

A ring-shaped lead zirconate titanate (PZT) piezoceramic sensor has been integrated with the Langevin-type piezoceramic driver of an ultrasonic wire-bonding transducer to form a smart transducer for in-situ measurement of three essential bonding parameters: namely, impact force, ultrasonic amplitude and bond time. This sensor has an inner diameter, an outer diameter and a thickness of 12.7 mm, 5.1 mm and 0.6 mm, respectively. It has a specifically designed electrode pattern on the two major surfaces perpendicular to its thickness along which polarization is induced. The process-test results have indicated that the sensor not only is sensitive to excessive impact forces exerted on the devices to be bonded but also can track changes in the ultrasonic amplitude proficiently during bonding. Good correlation between the sensor outputs and the bond quality has been established. This smart transducer has good potential to be used in automatic process-control systems for ultrasonic wire bonding.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.541-545
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• 1996

In this paper, The performance and functions of automatic flatness control system installed on the 4 hi-reversing mill and has been investigated under actualconditions. A new automatic flatness control system incorporates a measuring roll for measurement and correction calculations, hydraulic roll benders, selective roll cooling, and a programmable controller for interface and data logging. The test results are as following. The more the exit steel strip thickness is thick, the smaller the I value, and the more it is thin, the larger the I value. And, a complex distribution of strip tension was controlled, for example, not only a quarter buckle but also a simple center wave and edge wave. Because the tension deviation is larger at acceleration speed and deceleration speed than steady speed, so automatic flatness control system of contact type is better to adopt over 450 m/min, automatic flatness control system reduces rapidly large flatness deviation. The maximum I value of strip has been decreased to 13 I, and defects caused by poor flatness have been drastically decreased. And coolant temperature for work roll cooling system on the automatic flatness control system is better to adopt about 50-55 .deg. C.

• 한국컴퓨터정보학회논문지
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• 제25권5호
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• pp.81-90
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• 2020

직접 측정방법을 기반으로 3차원 스캔 데이터에서 유방의 자동측정을 위한 유방과 관련된 측정점 설정과 이상적인 3차원 스캔 자세를 제안하였다. 특히 직접 측정법에서의 유방 바깥쪽점은 체형과 자세에 따라 변동되기 쉬우므로 3차원 측정법에서는 유방에서 찾는 새로운 방법을 제안하였다. 유방의 윤곽선이 뚜렷하지 않은 유방 위쪽의 유방 위쪽점은 겨드랑접힘점을 기준으로 설정되는데 직접측정법에서의 유방 위쪽점이 3차원 스캔데이터에서 측정된 유방위쪽점보다 높게 설정됨을 알 수 있었다. 그러므로 직접 측정치와 3차원 측정치 간의 오차를 줄이기 위해서는 유방 위쪽점 설정에 관여되는 겨드랑앞접힘점 위치가 명확해야 할 것이다. 유방과 관련된 깊이 항목에서는 유방 바깥쪽점을 제외한 모든 깊이에서 직접 측정치가 높게 나타났는데 이는 피부 눌림에 의한 것으로 판단된다. 또 유방의 굴곡이 심한 유방아래길이와 유방아래 접힘선길이, 유방 안쪽점사이 간격은 굴곡에 의해 3차원 측정치가 직접 측정치보다 높게 나타나 유방에 대한 3차원 측정법이 일반화되기 위해서는 다양한 유방유형에 따른 측정치의 변화를 연구할 필요가 있다.