• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.151-152
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• 2012

라만(Raman) 분광법은 실리콘의 결정화도를 분석하는데 가장 유용하게 쓰이는 기법이다. 본 논문에서는 상압 플라즈마 화학기상증착법 (atmospheric pressure plasma-enhanced chemical vapor deposition, AP-PECVD)에 의해 형성된 실리콘 박막의 결정화도를 라만 분광법에 의해 분석하였다. 라만 분석 시, 조사하는 레이져의 파장에 따라서 실리콘 박막 내로의 침투깊이가 결정된다. 또한 레이져의 파워가 임계점을 넘게 되면, 레이져에 의한 실리콘의 결정화가 진행되는 것을 확인하였다.

• Composites Research
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• v.25 no.6
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• pp.198-204
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• 2012

The objective of this study is to improve the mechanical properties in abaca fabric/epoxy composites produced using a VARTM process. The mechanical properties were improved by increasing the surface roughness of the fabric through plasma polymerization and improving the interfacial adhesion between the epoxy and the fabric through changing its hydrophilic properties to the hydrophobic properties. Plasma polymerization at atmospheric pressure and room temperature was used, and the optimal polymerization time to improve the mechanical properties was investigated. NaOH treatment on the fabric was also carried out for the comparison. The composite fabricated using the fabric polymerized for 10 seconds shows the highest tensile strength compared to that of none-polymerized or NaOH treated. Plasma polymerization for more than 20 seconds exhibits decrease in the tensile strength. As a result, the plasma polymerization for more than 20 seconds may have caused some damages on the surface of the fabrics. Also, the hydrophilic abaca represents a tendency of presenting the hydrophobic properties in absorption and sedimentation tests.

• Applied Chemistry for Engineering
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• v.25 no.4
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• pp.386-391
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• 2014

Atmospheric-pressure nonthermal corona discharge plasma was applied to the sterilization of biologically contaminated scoria powder. Escherichia coli (E. coli) culture solution was uniformly sprayed throughout the scoria powder for artificial inoculation, which was well mixed to ensure uniformity of the batch. The effect of the key parameters such as discharge power, treatment time, type of gas and electrode distance on the sterilization efficiency was examined and discussed. The experimental results revealed that the plasma treatment was very effective for the sterilization of scoria powder; 5-min treatment at 15 W could sterilize more than 99.9% of E. coli inoculated into the scoria powder. Increasing the discharge power, treatment time or applied voltage led to an improvement in the sterilization efficiency. The effect of type of gas on the sterilization efficiency was in order of oxygen, synthetic air (20% oxygen) and nitrogen from high to low. The inactivation of E. coli under the influence of corona discharge plasma can be explained by cell membrane erosion or etching resulting from UV and reactive oxidizing species (oxygen radical, OH radical, ozone, etc.), and the destruction of E. coli cell membrane by the physical action of numerous corona streamers.

• Composites Research
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• v.26 no.3
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• pp.170-174
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• 2013

Atmospheric glow plasma polymerization was applied to wood powder before fabricating polypropylene (PP) matrix composites. Seven different types of monomers (Oxygen, Benzene, CH4, Acrylic-acid, Hexafluoroethane, Trifluorotolune, Hexamethyl-disiloxane) were analyzed to determine the most suitable precursor for plasma polymerization. The surface energy was calculated from measured contact angle about each monomer on PP. Hexamethyl-disiloxane (HMDSO) had a highest surface energy and is selected as the most suitable monomer. Wood powder and polypropylene were mixed as pellets by twin screw extruder and then 50 wt% wood powder/PP composites were produced by an injection machine. Tensile strength and Flexural strength have improved by 7.59% and 12.43% at the maximum respectively. SEM (Scanning Electron Microscope) observation on the fracture surface revealed that the plasma polymerization have improved the interfacial bonding and the mechanical properties of the composites.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05a
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• pp.172-175
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• 2002

The technique of induced discharge by a pulsed CO2 laser is being applied to control electrical discharge path, material processing, triggered lightning for protecting the power equipments. In this paper, we have investigated about the characteristics of the induced discharge at atmospheric conditions by using a plasma channel, which is produced when a pulsed CO2 laser radiation is focused by a focusing mirror as a trigger source. A plasma channel produced by laser radiation has an effect on decreasing the threshold voltage and inducing the discharge in both needle electrodes. We have confirmed a delay time between a produced plasma channel and an electrical discharge after laser radiation. We provided the decreased voltage lower than the natural discharge voltage between electrode type of needles and was induced the discharge by forming a plasma channel between them. In this research we could understand the time delay of induced discharge by laser radiation, and the characteristics of the discharge cause by the decrease in the threshold voltage, and the polarity effect by changes of plasma channel positions between two electrodes.

• Applied Chemistry for Engineering
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• v.22 no.1
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• pp.31-36
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• 2011

Tetrafluoromethane ($CF_4$) has been used as the plasma etching and chemical vapor deposition (CVD) gas for semiconductor manufacturing processes. However, the gas need to be removed efficiently because of their strong absorption of infrared radiation and the long atmospheric lifetime which cause global warming effects. A waterjet gliding arc plasma system in which plasma is combined with the waterjet was developed to effectively produce OH radicals, resulting in efficient destruction of $CF_4$ gas. Design factors such as electrode shape, electrode angle, gas nozzle diameter, electrode gap, and electrode length were investigated. The highest $CF_4$ destruction of 93.4% was achieved at Arc 1 electrode shape, $20^{\circ}$ electrode angle, 3 mm gas nozzle diameter, 3 mm electrode gap and 120 mm electrode length.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.109-114
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• 2021

We investigated the effects of atmospheric hydrogen plasma treatment on Cu-Cu direct bonding. Hydrogen plasma was effective in reducing the surface oxide layer of Cu thin film, which was confirmed by GIXRD analysis. It was observed that larger plasma input power and longer treatment time were effective in terms of reduction and surface roughness. The interfacial adhesion energy was measured by DCB test and it was observed to decrease as the bonding temperature decreased, resulting in bonding failure at bonding temperature of 200℃. In case of wet treatment, strong Cu-Cu bonding was observed above bonding temperature of 250℃.

• Applied Chemistry for Engineering
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• v.29 no.4
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• pp.479-483
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• 2018

Our group reported the thermal decomposition of R-22 ($CHClF_2$) refrigerants by nitrogen thermal plasma in previous studies. However, it was proposed that the wastewater generated from the end part of the process contains high concentration of fluoride ion which is a component of R-22. The additional post-treatment process to neutralize the $F^-$ ions in the wastewater was investigated in this study. The wastewater generated through the decomposition of R-22 with the same procedure in the previous work was treated using the neutralizer, $Ca(OH)_2$, and the atmospheric pressure plasma jet (APPJ) independently as a post-treatment process. Wastewater samples were collected directly after the treatment for ion-chromatography analysis to trace the change of the concentration of $F^-$ ion in the wastewater. The fluoride concentration in the wastewater showed the highest value when the single water was used as a neutralizer, and the concentration of fluoride in the wastewater was dramatically reduced when the post-treatments were performed.

• Korean Journal of Food Science and Technology
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• v.50 no.2
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• pp.165-171
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• 2018

Atmospheric-pressure plasma (APP) was applied to determine quality characteristics of brown rice (BR) and white rice (WR) of Samkwang and Palbangmi. APP (250 W, 15 kHz, ambient air) was generated and dielectric barrier discharge was applied for 0, 10, and 20 min for 2 weeks at 4 and $25^{\circ}C$. The growth of total aerobic bacteria and mold increased depending on the storage. Water content of BR and WR decreased by storage temperature and periods. No viable counts were detected for molds by APP-treated 20 min at $4^{\circ}C$. Changes in protein and damaged starch contents in plasma were not observed. Amylose contents were not changed, but WR (Palbangmi) showed a tendency to increase. The results show that APP improved the microbial quality of BR and WR of Samkwang and Palbangmi, although further studies should be conducted to determine change in quality by APP.

• Journal of the Korean Recycled Construction Resources Institute
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• v.9 no.3
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• pp.295-302
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• 2021

Surface modification of recycled plastic film-based aggregates is demonstrated to enhance the interaction between aggregates and cement paste. It is shown that the oxygen(O₂) atmospheric pressure plasma(APP) treatment leads to a drastic increase in hydrophilicity. In case of the plasma treatment at 100W of RF power, 15/4sccm of O₂/Ar flow rate and 30sec of discharging time, the water contact angle on the aggregates surface decreased from 104.5° to 44.0°. In addition, the contact angle of surface modified aggregates kept in air increased with time elapse. Improvement of hydrophilicity can be explained by the formation of new hydrophilic oxygen functional groups which is identified as C-OH, C-O-C, C=O, -COOH by X-ray photoelectron spectroscopy(XPS) analysis and Fourier-transform infrared spectroscopy(FT-IR). Therefore, it can be concluded that the plasma treatment process is an effective method to improve adhesion of the recycled plastic film-based aggregates and cement paste.