• Title/Summary/Keyword: As(V) ion

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Dry Etching Characteristics of TiN Thin Films in BCl3-Based Plasma

  • Woo, Jong-Chang;Park, Jung-Soo;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.3
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    • pp.106-109
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    • 2011
  • We investigated the etching characteristics of titanium nitride (TiN) thin film in $BCl_3$/Ar inductively coupled plasma. The etching parameters were the gas mixing ratio, radio frequency (RF) power, direct current (DC)-bias voltages and process pressures. The standard conditions were as follows: total flow rate = 20 sccm, RF power = 500 W, DC-bias voltage = -100 V, substrate temperature = $40^{\circ}C$, and process pressure = 15 mTorr. The maximum etch rate of TiN thin film and the selectivity of TiN to $Al_2O_3$ thin film were 54 nm/min and 0.79. The results of X-ray photoelectron spectroscopy showed no accumulation of etch byproducts from the etched surface of TiN thin film. The TiN film etch was dominated by the chemical etching with assistance by Ar sputtering in reactive ion etching mechanism, based on the experimental results.

Basic Rotation Characteristics and Energy Efficiencies of a Blade-Type Corona Motor (날개전극형 코로나 모터의 기초 회전특성 및 에너지 효율)

  • Jung, Jae-Seung;Moon, Jae-Duk
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.10
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    • pp.1862-1868
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    • 2010
  • A corona motor, as one of a powerful cooling means of microelectronic devices, has been employed because of its very simple structure of no coils and no brushes. In this paper, the effect of polarity of applied voltage and the number of blade corona electrodes on the fundamental properties of rotation of the motor was investigated. The I-V and rotation characteristics of the blade corona electrode were significantly different from the different polarities of applied voltages and the blade corona electrode numbers, due to the different space charge effect resulted by the different migration mobility of the positive and negative ions generated near the blade corona electrode tip of the rotor of the motor. The rotation speed of the motor was influenced significantly by the polarity of corona discharge, the number of blades, and mass of rotor. At the same corona current, an effective rotation can be obtained with the positive corona caused by the lower ion mobility. On the other hand, the higher rotation speed can be obtained with the negative corona resulted from its higher corona current. The highest rotation speed and energy efficiency can be obtained with the rotor having 4 blades.

PlV Measurement of Channel Cavity Flow with Bottom Heat surface of Constant Heat Flux (일정 열유속의 하부 가열면을 갖는 채널캐비티 내부유동의 PIV 계측)

  • 조대환;김진구
    • Journal of Advanced Marine Engineering and Technology
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    • v.21 no.4
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    • pp.437-442
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    • 1997
  • An experimental study was carried out in a channel cavity with square heat surface by visual¬ization equipment with Mach - Zehnder interferometer and laser apparatus. The image processing system consists of one commercial image board slit into a personal computer and 2-dimensional sheet light by Argon-Ion Laser with cylindrical lens and flow picture recording system. Instant simultaneous velocity vectors at whole field were measured by 2-D PIV system which adopted two¬frame grey-level cross correlation algorithm. Heat source was uniform heat flux(o.4W/cm$^2$, , O.8W/cm$^2$, 1.2W/cm$^2$). Obtained result showed various flow patterns such as kinetic energy distribution. Severe unsteady flow fluctuation within the cavity are remarkable and sheared mixing layer phenomena are also found at the region where inlet flow is collided with the counter-clockwise rotating main primary vortex. Photographs of Mach ~ Zehnder are also compared in terms of constant heat flux.

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Impedance Calculation for Vacuum Components in Pohang Light Source Storage Ring

  • Ju, Yeong-Do;Lee, Byeong-Jun;Son, Yeong-Uk;Yu, In-Ha;Jeon, Myeong-Hwan;Park, In-Su;Kim, Seung-Hwan;Ha, Tae-Gyun;Gong, Hyeong-Seop;Son, Yun-Gyu;Park, Yong-Jeong;Park, Jong-Do;Nam, Sang-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.151.2-151.2
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    • 2014
  • Broadband impedances for the 3-GeV pohang light source-II (PLS-II) storage ring have been numerically estimated using a full three dimensional finite-difference time-domain code, CST particle studio. The total broadband impedance of all the vacuum components was estimated as 0.256 ohm, which is a small fraction of the total machine impedance budget.

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Purification and Characterization of a Keratinase from a Feather-Degrading Fungus, Aspergillus flavus Strain K-03

  • Kim, Jeong-Dong
    • Mycobiology
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    • v.35 no.4
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    • pp.219-225
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    • 2007
  • A keratinolytic enzyme secreted by Aspergillus flavus K-03 cultured in feather meal basal medium (FMBM) containing 2% (w/v) chicken feather was purified and characterized. Keratinolytic enzyme secretion was the maximal at day 16 of the incubation period at pH 8 and $28^{\circ}C$. No relationship was detected between enzyme yield and increase of fungal biomass. The fraction obtained at 80% ammonium sulfate saturation showed 2.39-fold purification and was further purified by gel filtration in Sephadex G-100 followed by ion exchange chromatography on DEAE-Sephadex A-50, yielding an active protein peak showing 11.53-fold purification. Sodium dodecyl sulfate polyacrylamide gel electrophoresis (SDS-PAGE) and zymograms indicated that the purified keratinase is a monomeric enzyme with 31 kDa molecular weight. The extracellular keratinase of A. flavus was active in a board range of pH ($7{\sim}10$) and temperature ($30^{\circ}C{\sim}70^{\circ}C$) profiles with the optimal for keratinase activity at pH 8 and $45^{\circ}C$. The keratinase activity was totally inhibited by protease inhibitors such as phenylmethylsulfonyl fluoride (PMSF), iodoacetic acid, and ethylenediaminetetraacetate (EDTA) while no reduction of activity by the addition of dithiothreitol (DTT) was observed. N-terminal amino acid sequences were up to 80% homologous with the fungal subtilisins produced by Fusarium culmorum. Therefore, on the basis of these characteristics, the keratinase of A. flavus K-03 is determined to be subtilisins-like.

Study on mechanism for etching of $SrBi_{2}Ta_{2}O_{9}$ thin film in $SF_6$/Ar gas plasma ($SF_6$/Ar 가스 플라즈마에 의한 $SrBi_{2}Ta_{2}O_{9}$ 박막의 식각 메커니즘 연구)

  • Kim, Dong-Pyo;Seo, Jung-Woo;Kim, Chang-Il
    • Proceedings of the KIEE Conference
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    • 1999.11d
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    • pp.867-869
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    • 1999
  • In this study, $SrBi_{2}Ta_{2}O_{9}$(SBT) thin films were etched as a function of $SF_6$/Ar gas mixing ratio in magnetically enhanced inductively coupled plasma(MEICP) system fer a fixed rf power, dc-bias voltage, and chamber pressure. The etch rate of SBT thin film was $1500{\AA}/min$ and the selectivities of photoresist (PR) and $SiO_2$ to SBT thin film were 0.48 and 0.62, respectively when the samples were etched at a rf power of 600W, a dc-bias voltage of -150V, a chamber pressure of 10 mTorr and a gas mixing ratio of $SF_6/(SF_6+A)$=0.1. In order to examine the chemical reactions on the etched surface, X-ray photoelectron spectroscopy(XPS) and secondary ion mass spectrometry(SIMS) were done.

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Effects of α-particle beam irradiation on superconducting properties of thin film MgB2 superconductors

  • Kim, Sangbum;Duong, Pham van;Ha, Donghyup;Oh, Young-Hoon;Kang, Won Nam;Hong, Seung Pyo;Kim, Ranyoung;Chai, Jong Seo
    • Progress in Superconductivity and Cryogenics
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    • v.18 no.2
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    • pp.8-13
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    • 2016
  • Superconducting properties of thin film MgB2 superconductors irradiated with 45 MeV ${\alpha}$-particle beam were studied. After the irradiation, enhancement of the critical current density and pinning force was observed, scaling close to strong pinning formula. Double logarithmic plots of the maximum pinning force density with irreversible magnetic field show a power law behavior close to carbon-doped MgB2 film or polycrystals. Variation of normalized pinning force density in the reduced magnetic field suggests scaling formulas for strong pinning mechanism like planar defects. We also observed a rapid decay of critical current density as the vortex lattice constant decreases, due to the strong interaction between vortices and increasing magnetic field.

Ion Conduction Properties of PVDF/PAN based Polymer Electrolyte for Lithium Polymer Battery (리튬 폴리머전지용 PVDF/PAN계 고분자 전해질의 이온 전도 특성)

  • 이재안;김종욱;구할본
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.4
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    • pp.306-311
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    • 2000
  • The purpose of this study is to research and develop solid polymer electrolyte(SPE) for Li polymer battery. The temperature dependence of conductivity impedance spectroscopy and electrochemical properties of PDF/PAN electrolytes as a function of a mixed ratio were reported for PVDF/PAN based polymer electrolyte films which were prepared by thermal gellification method of preweighed PVDF/PAN plasticizer and Li salt. The conductivity of PVDF/PAN electrolytes was 10$\^$-3/S/cm. 20PVDF5PEN LiCiO$\_$4//PC$\_$10//EC$\_$10/ electrolyte has the better conductivity compared to others. 20PVDF5PANLICIO$\_$4//PC$\_$10//EC$\_$10/ electroylte remains stable up to 5V vs. Li/Li$\^$+/. Steady state current method and ac impedance were used for the determination of transference numbers in PVDF/PAN electrolyte film. The transference number of 20PVDF5PANLiCO$\^$4//PC$\_$10//EC$\_$10/ electrolyte is 0.48.

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Purification and characterzation of the $\alpha$-L-Arabinofuranosidase from Escherichia coli Cells Harboring the Recombinant Plasmid pKMG11 (재조합 균주 Escherichia coli가 생산하는 Bacillus stearothermophilus $\alpha$-L-Arabinofuranosidase의 정제 및 특성)

  • 엄수정;조쌍구;최용진
    • Microbiology and Biotechnology Letters
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    • v.23 no.4
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    • pp.446-453
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    • 1995
  • $\alpha $-Arabinofuranosidase was produced by E. coli HB101 haboring the recombinant plasmid pKMG11 which contained the arfI gene of Bacillus stearothermophilus. The maximum production of the enzyme was observed when E. coli HB101 cells were grown at 37$\circ$C for 20 hours in the medium containing 0.5% arabinose, 1.0% tryptone, 0.5% yeast extract, and 1% NaCl. The $\ALPHA $-arabinofuranosidase produced was purified to homogeneity using a combination of 20-50% ammonium sulfate precipitation, DEAE-Sepharose CL-6B ion exchange column chromatography and Sepharose 6B-100 gel filtration. The purified enzyme was most active at 55$\circ$C and pH 6.5. The K$_{m}$ and V$_{max}$ values of the enzyme on $\rho $-nitrophenyl-$\alpha $-arabinofuranoside was determined to be 2.99 mM and 0.43 $\mu $mole/min (319.74 $\mu $mole/min/mg), respectively. The pI value was 4.5. The molecular weight of the native protein was estimated to be 289 kDa. The SDS-polyacrylamide gel clectrophoresis analysis suggested that the functional protein was a trimer of the 108 kDa identical subunits. The N-terminal amino acid sequence of the a-arabinofuranosidase was identified as X-Ser-Thr-Ala-Pro-Arg( \ulcorner )-Ala-Thr-Met-Val-Ile-Asp-X-Ala-Phe.

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Size Distribution of Ambient Aerosol Measured at a Coastal Site in Jeju Island (제주도 해안가에서 측정된 에어로졸의 성분별 입경분포 특성)

  • 이기호;양희준;허철구
    • Journal of Environmental Science International
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    • v.12 no.10
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    • pp.1043-1054
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    • 2003
  • During the period from April to September 2002, the size distributions of ambient aerosol were measured at the coastal site at Hamduk in Jeju Island. Na$\^$+/, K$\^$+/, Mg$\^$2+/, Ca$\^$2+/and Cl$\^$-/ exhibited mostly a bimodal coarse mode size distribution, while ammonium and sulfate were mainly in the fine size range, with maximum at around 0.54$\mu\textrm{m}$. The average molar concentration ratio of ammonium to sulfate for fine particles was equal to 2.0${\pm}$0.9. Nitrate was evenly found in both the coarse and fine modes. Elements like Al, Fe, Cu, Mg, Na, Ti, Sr and Mn were dominant in coarse particles, with the maximum at around 5.25$\mu\textrm{m}$. S and Pb were mainly in the submicrometer size range. Other elements with a fine and coarse modes were V, Ni, Cu, Ba and Mo. The patterns of the size distributions of trace elements measured at the downtown in Jeju City were very similar to those at the coastal site in Hamduk. However, the amplitude of size fractional concentrations at Jeju City was narrower than that at Hamduk. While the mass median diameters for the chemical species originated from the natural origin such as marine and crust were relatively large, those for ammonium, sulfate, S and Pb were very small.