• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.408-411
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• 2008

In an attempt to enhance luminance efficiency and to reduce discharge delays of test panels with aluminum fence-electrodes, various designs of the electrodes were prepared by chemically etching the aluminum foils bonded to soda-lime glass substrate via anodic bonding process. The effects of fence design on luminance and discharge characteristics were investigated and compared with conventional ac-PDPs. These results showed a possibility of using fence-type aluminum electrode at front plates of ac-PDDs without sacrificing its performance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.60-63
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• 2004

Recently, carbon nanotubes(CNTs) have been demonstrated to possess remarkable mechanical and electronic properties, in particular, for field emission applications. Its high aspect ratio and extremely small diameter, hollowness, together with high mechanical strength and high chemical stability, are advantages for use in field emitter. In this paper, we demonstrate electrical discharge properties from carbon nanotube cathode electrodes to use as an emitter electrode of vacuum gauges. Vertically aligned $2{\times}2mm^2$ CNT arrays on the silicon substrate were synthesized by the thermal CVD method on Fe catalytic metal, and a glass patterning by the sand blast method and the silicon/glass anodic bonding processes were applied to make samples with 2 electrodes. The field emission was examined under the vacuum range of $10^{-3}$ Torr.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.5
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• pp.405-410
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• 2006

We fabricated gas sensors using carbon nanotubes (CNTs) as electron emitters for the purpose of detecting inert gases. By using the silicon-glass anodic bonding and glass patterning technologies with the typical Si process, we improved the compactness of the sensors and the reliability in process. The proposed sensor, based on, an electrical discharge theory known as Paschen's law in principle, works by figuring the variation of the discharge current depending on gas concentration. In the experiment, the initial breakdown characteristics were measured for air and Ar as a function of gas pressure. As the result, even though it should be realized that there are many other factors which have an effect on the breakdown of a gap, the sensors led to similar result as predicted by Paschen's law, and they showed a possibility as gas sensors which enable to detect the gas density ranged to the vacuum pressure from 1 to $10^{-3}$ Torr.

• Journal of the Semiconductor & Display Technology
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• v.1 no.1
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• pp.15-19
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• 2002

A new vacuum packaging process in wafer level is developed for the surface micromachining devices using glass silicon anodic bonding technology. The inside pressure of the packaged device was measured indirectly by the quality factor of the mechanical resonator. The measured Q factor was about 5$\times10^4$ and the estimated inner pressure was about 1 mTorr. And it is also possible to change the inside pressure of the packaged devices from 2 Torr to 1 mTorr by varying the amount of the Ti gettering material. The long-term stability test is still on the way, but in initial characterization, the yield is about 80% and the vacuum degradation with time was not observed.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3274-3275
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• 1999

This paper presents a new method of spacer assembly using anodic bonding method which is very simple and clean. The spacer having $100{\mu}m(W){\times}2.1{\mu}m(H)$ was bonded on amorphous silicon film of anode plate. Then, the vertical-type electrode was used for assembling of spacer in high voltage field emission display. In these results, we suggested that the vertical-type electrode provided spacer alignment for high aspect ratio and more simple batch process than conventional method.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2392-2394
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• 2005

This paper presents a tuneable bandstop resonator with two possible configurations, it can be used to tune its center frequency, or it can be used to tune its bandwidth. The tuneable bandstop resonator has potential application in microwave communications receivers, where it can be used to tune out interfering signals. The proposed resonator is comb actuated, where the resonator's displacement produces different values of frequency or bandwidth, this is achieved by decoupling electromagnetic energy from a main transmission line. The proposed fabrication process for the resonator is by anodic bonding pyrex glass and tow resistivity silicon, where the comb resonator structure is patterned by deep reactive ion etching (DRIE). This paper presents the resonator and actuator design in both configurations, as well as the fabrication process intended for its development.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1920-1922
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• 2003

We have fabricated the pyrex glass microlens using thermal reflow process. Fabricated microlens is the plano convex refractive type and was fabricated with pyrex glass-Si anodic bonding wafer. The etched circle or cylindrical pyrex glass pattern was melted in a furnace $800^{\circ}C$ to $900^{\circ}C$ for about 15min. The surface roughness of the microlenses was measured by the AFM and average surface roughness of the microlenses was below 15min. The radius of curvature of the microlens was measured with phase shift interferometer.

• Korean Journal of Metals and Materials
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• v.46 no.11
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• pp.730-736
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• 2008

$TiO_2$ nanotubes fabricated in aqueous HF-based electrolytes have been generally grown only to about 500nm in length because of the strong dissolubility of HF acid. In this paper, ethylene glycol solution has been applied for increasing the length of the anodic $TiO_2$ nanotubes, and the growth behaviors of the nanotubes according to water contents has been investigated. Anodization of Ti in ethylene glycol + 1 wt% $NH_4F$ (EG solution) with water additions up to 10 wt% were carried out at the constant voltage of 20 V. The results show that a thin titanium oxide layer is formed in the initial stage and the nanotube structure grows underneath the initial layer. And the length of $TiO_2$ nanotubes decreases with the increasing water content in the solution. It can be ascribed to the locally acidified circumstance around the barrier layer inside the nanopore due to $H^+$ ion originated from water. The XPS for the nanotubes suggests that the spectra of Ti2p and O1s are the major chemical bonding states of the $TiO_2$, and those for F1s, N1s and C1s come from the compound of $(NH_4)_2TiF_6$.

• The Journal of Advanced Prosthodontics
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• v.1 no.2
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• pp.107-112
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• 2009

STATEMENT OF PROBLEM. Macroscopic and especially microscopic properties of implant surfaces play a major role in the osseous healing of dental implants. Dental implants with modified surfaces have shown stronger osseointegration than implants which are only turned (machined). Advanced surface modification techniques such as anodic oxidation and Ca-P application have been developed to achieve faster and stronger bonding between the host bone and the implant. PURPOSE. The purpose of this study was to investigate the effect of surface treatment of titanium dental implant on implant stability after insertion using the rabbit tibia model. MATERIAL AND METHODS. Three test groups were prepared: sandblasted, large-grit and acid-etched (SLA) implants, anodic oxidized implants, and anodized implants with Ca-P immersion. The turned implants served as control. Twenty rabbits received 80 implants in the tibia. Resonance frequencies were measured at the time of implant insertion, 2 weeks and 4 weeks of healing. Removal torque values (RTV) were measured 2 and 4 weeks after insertion. RESULTS. The implant stability quotient (ISQ) values of implants for resonance frequency analysis (RFA) increased significantly (P <. 05) during 2 weeks of healing period although there were no significant differences among the test and control groups (P >. 05). The test and control implants also showed significantly higher ISQ values during 4 weeks of healing period (P < .05). No significant differences, however, were found among all the groups. All the groups showed no significant differences in ISQ values between 2 and 4 weeks after implant insertion (P >. 05). The SLA, anodized and Ca-P immersed implants showed higher RTVs at 2 and 4 weeks of healing than the machined one (P < .05). However, there was no significant difference among the experimental groups. CONCLUSION. The surface-modified implants appear to provide superior implant stability to the turned one. Under the limitation of this study, however, we suggest that neither anodic oxidation nor Ca-P immersion techniques have any advantage over the conventional SLA technique with respect to implant stability.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1196-1200
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• 2004

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. In this study, a bubble-powered micropump was fabricated and tested. The micropump consists of two-parallel micro line heaters, a pair of nozzle-diffuser flow controller and a 1 mm in diameter, 400 ${\mu}m$ in depth pumping chamber. The two-parallel micro line heaters with 20 ${\mu}m-width$ and 200 ${\mu}m-length$ were fabricated to be embedded in the silicon dioxide layer of a wafer which serves as a base plate for the micropump. The pumping chamber, the pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer (thickness of $525{\pm}15$ ${\mu}m$) having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Finally the silicon wafer of the base plate, the silicon wafer of pumping chamber and the glass wafer were aligned and bonded (Si-Si bonding and anodic bonding). A sequential photograph of bubble nucleation, growth and collapse was visualized by CCD camera. Clearly liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the end of collapsing period can be seen. The mass flow rate was found to be dependent on the duty ratio and the operation frequency. As duty ratio increases, flow rate decreases gradually when the duty ratio exceeds 60%. Also as the operation frequency increases, the flow rate of the micropump decreases slightly.