• Title/Summary/Keyword: Annealing process

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Effect of the Deposition Time onto Structural Properties of Cu2ZnSnS4 Thin Films Deposited by Pulsed Laser Deposition (펄스 레이저 증착법으로 제작한 Cu2ZnSnS4 박막의 구조 특성 변화에 대한 증착 시간 효과)

  • Byeon, Mirang;Bae, Jong-Seong;Hong, Tae-Eun;Jeong, Euh-Duck;Kim, Shinho;Kim, Yangdo
    • Korean Journal of Materials Research
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    • v.23 no.1
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    • pp.7-12
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    • 2013
  • The $Cu_2ZnSnS_4$ (CZTS) thin film solar cell is a candidate next generation thin film solar cell. For the application of an absorption layer in solar cells, CZTS thin films were deposited by pulsed laser deposition (PLD) at substrate temperature of $300^{\circ}C$ without post annealing process. Deposition time was carefully adjusted as the main experimental variable. Regardless of deposition time, single phase CZTS thin films are obtained with no existence of secondary phases. Irregularly-shaped grains are densely formed on the surface of CZTS thin films. With increasing deposition time, the grain size increases and the thickness of the CZTS thin films increases from 0.16 to $1{\mu}m$. The variation of the surface morphology and thickness of the CZTS thin films depends on the deposition time. The stoichiometry of all CZTS thin films shows a Cu-rich and S-poor state. Sn content gradually increases as deposition time increases. Secondary ion mass spectrometry was carried out to evaluate the elemental depth distribution in CZTS thin films. The optimal deposition time to grow CZTS thin films is 150 min. In this study, we show the effect of deposition time on the structural properties of CZTS thin film deposited on soda lime glass (SLG) substrate using PLD. We present a comprehensive evaluation of CZTS thin films.

Preparation of the Blends of Poly(amic acid) and PBO Precursor and Their Properties (Poly(amic acid)와 PBO 전구체의 블렌드 제조 및 특성)

  • Yoon, Doo-Soo;Choi, Jae-Kon;Jo, Byung-Wook
    • Polymer(Korea)
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    • v.32 no.1
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    • pp.77-84
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    • 2008
  • The thermal properties, morphology, mechanical properties and gas permeability of the blends of poly (amic acid) (PAA) and poly (o-hydroxyamides) (PHAs) having pendant group was investigated. The 5% weight loss and major weight loss of the b)ends occurred in the ranges of $348{\sim}407^{\circ}C$ and $589{\sim}615^{\circ}C$ upon a heating process. After a thermical annealing, the tensile strength and initial modulus of blends increased $3.7{\sim}52.9%$ and $34.4{\sim}70%$ from the value of pure PAA, respectively. Especially the tensile strength and modulus of the PAA/MP-PHA=9/1 showed the highest values (97.5 MPa and 2.67 GPa, respectively), which were 53 and 70% higher than those of pure PAA. The fine PHA domains were found to be uniformly dispersed. The interfacial adhesion between PAA and PHA was identified to be good. The gas permeabilities of PAA/M-PHA blend increased with M-PHA contents.

Diffusion and Thermal Stability Characteristics of W-B-C-N Thin Film (W-B-C-N 확산방지막의 특성 및 열적 안정성 연구)

  • Kim, Sang-Yoon;Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Magnetics Society
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    • v.16 no.1
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    • pp.75-78
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    • 2006
  • In case of contacts between semiconductor and metal in semiconductor circuits, they become unstable because of thermal budget. To prevent these problems, we use diffusion barrier that has a good thermal stability between metal and semiconductor. So we consider the diffusion barrier to prevent the increase of contact resistance between the interfaces of metals and semiconductors, and the increase of resistance and the reaction between the interfaces. In this paper we deposited tungsten boron carbon nitride (W-B-C-N) thin film on silicon substrate. The impurities of the $1000\;{\AA}-thick$ W-B-C-N thin films provide stuffing effect for preventing the inter-diffusion between metal thin films $(Cu-2000\;{\AA})$ and silicon during the high temperature $(700\~1000^{\circ}C)$ annealing process.

Thermal Degradation of BZO Layer on the CIGS Solar Cells

  • Choi, Pyungho;Kim, Sangsub;Choi, Byoungdeog
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.458-458
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    • 2013
  • We investigated a study on the thermal degradation of boron doped zinc-oxide (BZO) layer which used as a transparent conducting layer on the Cu (In1-xGax) Se2 (CIGS) based thin film solar cells. Devices were annealed under the temperature of $100^{\circ}C$ or 100 hours and then Hall measurement was carried out to characterize the parameters of mobility (${\mu}Hall$), resistivity (${\rho}$), conductivity (${\sigma}$) and sheet resistance (Rsh). The initial values of ${\mu}Hall$, ${\rho}$, ${\sigma}$ and Rsh were $29.3cm^2$/$V{\cdot}s$, $2.1{\times}10^{-3}{\Omega}{\cdot}cm$, $476.4{\Omega}^{-1}{\cdot}cm^{-1}$ and $19.1{\Omega}$/${\Box}$ respectively. After the annealing process, the values were $4.5cm^2$/$V{\cdot}s$, $12.8{\times}10^{-3}{\Omega}{\cdot}cm$, $77.9{\Omega}^{-1}{\cdot}cm^{-1}$ and $116.6{\Omega}$/${\Box}$ respectively. We observed that ${\mu}Hall$ and ${\sigma}$ were decreased, and ${\rho}$ and Rsh were increased. In this study, BZO layer plays an important role of conducting path for electrons generated by incident light onthe CIGS absorption layer. Therefore, the degradation of BZO layer characterized by the parameters of ${\mu}Hall$, ${\rho}$, ${\sigma}$ and Rsh, affect to the cell efficiency.

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Process Characteristics for $YB_{2}Cu_{3}O_{7-d}$ Films Fabricated by Single Target Sputter and Surface Modification Technique

  • Lee, Eue-Jae
    • Korean Journal of Materials Research
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    • v.5 no.5
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    • pp.598-605
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    • 1995
  • Thin films of $YB_{2}Cu_{3}O_{7-d}$ were prepared on various substrated of MgO(100), $SrTiO_{3}$, and $LaAlO_{3}$ by using off-axis magentron sputtering methods and annealing in-situ. The prarameters of film fabrication processes had been optimized through a "follow the lcoal maxima" strategy to yield good quality films in therms of the critical temperature $T_{c}$ and the critical current density $J_{c}$. Optimizedproecsses employing a plane magndtron and an cylindrical magnetron yielded $T_{c}$>90K along with $J_{c}$$10^{6}$A/$\textrm{cm}^2$ at 77K and > 2${\times}$$10^{7}$A/$\textrm{cm}^2$ at 5K. The sampels, however, showed degradationinthe properties, after chemical etching for fabrication of microbridges with the line width of 2-10 mocrons. In particular, the value of $T_{c}$ for the microbridges of 2microns was as small as 80%. The degradation was strongly dependent on the line width through a formula : $T_{c}$(e)=$T_{c}$)b) [1-a exp(-1000 bL)} where $T_{c}$(e) and $T_{c}$ (b) are the values of $T_{c}$ in the absolute scale measured after and before chemical etching, respectively and L is the line width in mm. By utilizing a best fitting technique, the proper constant values of a and to b were found as exp(-1.2) and 0.22, respectively. This formula was very useful in estimatiing the upper limit of the device operationtemperature.

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Brazing Adhesion Properties of Ag Coated W-Ag Electric Contact on the Cu Substrate (Ag 코팅한 W-Ag 전기접점/Cu 모재간의 브레이징 접합 특성)

  • Kang Hyun-Goo;Kang Yun-Sung;Lee Jai-Sung
    • Journal of Powder Materials
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    • v.13 no.1 s.54
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    • pp.18-24
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    • 2006
  • The brazing adhesion properties of Ag coated W-Ag electric contact on the Cu substrate have been investigated in therms of microstructure, phase equilibrium and adhesion strength. Precoating of Ag layer ($3{\mu}m$ in thickness) on the $W-40\%Ag$ contact material was done by electro-plating method. Subsequently the brazing treatment was conducted by inserting BCuP-5 filler metal (Ag-Cu-P alloy) layer between Ag coated W-Ag and Cu substrate and annealing at $710^{\circ}C$ in $H_2$ atmosphere. The optimum brazing temperature of $710^{\circ}C$ was semi-empirically calculated on the basis of the Cu atomic diffusion profile in Ag layer of commercial electric contact produced by the same brazing process. As a mechanical test of the electric contact after brazing treatment the adhesion strength between the electric contact and Cu substrate was measured using Instron. The microstructure and phase equilibrium study revealed that the sound interlayer structure was formed by relatively low brazing treatment at $710^{\circ}C$. Thin Ag electro-plated layer precoated on the electric contact ($3{\mu}m$ in thickness) is thought to be enough for high adhesion strength arid sound microstructure in interface layer.

Characteristics of Ni/Co Composite Silicides for Poly-silicon Gates (게이트를 상정한 니켈 코발트 복합실리사이드 박막의 물성연구)

  • Kim, Sang-Yeob;Jung, Young-Soon;Song, Oh-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.2 s.35
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    • pp.149-154
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    • 2005
  • We fabricated Ni/Co(or Co/Ni) composite silicide layers on the non-patterned wafers from Ni(20 nm)/Co(20 nm)/poly-Si(70 nm) structure by rapid thermal annealing of $700{\~}1100^{\circ}C$ for 40 seconds. The sheet resistance, cross-sectional microstructure, and surface roughness were investigated by a four point probe, a field emission scanning electron microscope, and a scanning probe microscope, respectively. The sheet resistance increased abruptly while thickness decreased as silicidation temperature increased. We propose that the poly silicon inversion due to fast metal diffusion lead to decrease silicide thickness. Our results imply that we should consider the serious inversion and fast transformation in designing and process f3r the nano-height fully cobalt nickel composite silicide gates.

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The Effect of H content in Si Precursor on the Performance of Poly-Si Crystallized by Pulsed YAG2${\omega}$ Laser on Soft Substrate

  • Li, Juan;Ying, Yao;Meng, Zhiguo;Chunya, Wu;Xiong, Shaozhen;Kwok, Hoi-Sing
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1604-1607
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    • 2009
  • YAG laser crystallization of Si-based thin film deposited on plastic substrate has been studied. The Si-based thin films as crystallization precursor are with varied hydrogen (H) content. The effect of the H content on the crystallinity of the resulted poly-Si film has been investigated. The experimental results of the poly-Si crystallized by doublefrequency YAG laser shows that the initial dehydrogenation process could be left out if ${\mu}c$-Si was adopted as the crystallization precursor. The YAG laser annealing condition on plastic substrate and the crystallization results have been discussed in the paper.

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A Study on the Optical Characteristics of Multi-Layer Touch Panel Structure on Sapphire Glass (Sapphire Glass 기반 다층박막 터치패널구조의 광학특성 연구)

  • Kwak, Young Hoon;Moon, Seong Cheol;Lee, Ji Seon;Lee, Seong Eui
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.3
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    • pp.168-174
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    • 2016
  • A conductive oxide-based sapphire glass indium tin oxide/metal electrode and the optical coating, through patterning process was studied in excellent optical properties and integrated touch panel has a high strength. Indium tin oxide conductive oxides of the sapphire glass to 0.3 A at DC magnetron sputtering method of 10 min, gas flow Ar 10 Sccm Ar, $O_2$ 1.0 Sccm the formation conditions of the thin film after annealing at $550^{\circ}C$ for 30min was achieved through a 86% transmittance. In addition, the coating 130 nm hollow silica sol-gel was to improve the optical transmittance of the indium tin oxide to 91%. For the measurement by the modeling hollow silica sol by Macleod simulation and calculated the average values of silica part to the presence or absence in analogy to actual. Refractive index value and the actual value of the material on the simulation the transmittance difference is it does not completely match the air region similar to the actual value (transmission) could be confirmed that the measurement is set to a value of between 5 nm and 10 nm.

Magneto-Optical Properties of MnSbPt Thin Films Prepared by RF Magnetron Sputtering (RF Magnetron Sputtering으로 제작된 MnSbPt 합금박막의 자기광학적 성질)

  • 송영민;이경재;김종오
    • Journal of the Korean Magnetics Society
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    • v.6 no.2
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    • pp.93-97
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    • 1996
  • The effects of annealing after deposition on the magnetic and magneto-optical properties of MnSbPt thin films prepared by rf sputtering were investigated. The MnSbPt alloy thin films were annealed in a vacuum with $10^{-5}$ Torr and the air, respectively, as a function of temperature and time. The films annealed at $300^{\circ}C$ for 4 hours was found to have the highest value of the saturation magnetization. The films annealed in the air did not show any thermal degradations, which indicates their chemical stability for the magneto-optical recording process. It was revealed that the $Mn_{43}Sb_{46}Pt_{11}$ films annealed at $300^{\circ}C$ for 4hours in a vacuum with $10^{-5}$ Torr exhibit high Kerr rotation angle of $0.8^{\circ}$ for the incident wavelength of 550nm, which is ascribed to the increase of the volume ratio of Clb phase. However, similar to the PtMnSb alloy thin films, these films are still horizontally magnetized and have the coercive field less than 400 Oe.

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