• Title/Summary/Keyword: Annealing Condition

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The Study on the Characteristics of ReRAM with Annealing Temperature and Oxide Thickness (열처리 온도 및 산화층 두께에 따른 ReRAM 특성 연구)

  • Choi, Jin-hyung;Lee, Seung-cheol;Cho, Won-Ju;Park, Jong-tae
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.10a
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    • pp.722-725
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    • 2013
  • In this work, we have been analyzed the characteristics of ReRAM with different annealing condition and temperature. The ReRAM devices with top electrode=150nm, bottom electrode=150nm, oxide thickness=70nm and annealing temperature=$500^{\circ}C$, $850^{\circ}C$ have been used in characterization. The Set/Reset voltage, sensing window and resistivity have been characterized. From the measurement results, the Set/Reset voltage and sensing window have been enhanced as the annealing temperature has been increased. But it has been decreased as the temperature performance has been increased. In case of the annealing temperature=$850^{\circ}C$, the variation of Set/Reset voltage was lower than that of other condition. But the variation of sensing window was the lowest when the annealing temperature was $500^{\circ}C$. With considering the variation of Set/Reset voltage and sensing window, the devices annealed at $850^{\circ}C$ showed the best performance to ReRAM.

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Effects of the mosture and thermal annealing on CLBO crystal

  • Mori, Yusuke;Sasaki, Takatomo
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.06a
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    • pp.125-129
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    • 1997
  • The effects of the moisture and thermal annealing on CLBO crystal have been investigated. CLBO has hydrated at high humidity condition, resulting in 5B$_2$O$_3$$.$Cs$_2$O$.$8H$_2$O. The surface hydration seems to induce the cracking and the refractive index change in CLBO. The thermal annealing is effective to restore the changed index.

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Synthesis and Characterization of Copper Oxide nanowires by Facile Heating under Static Air Condition

  • Kwon, Tae-Ha;Choi, Hyek-Hwan;Chung, Wan-Young
    • Journal of information and communication convergence engineering
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    • v.8 no.1
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    • pp.99-102
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    • 2010
  • Large-scaled area and aligned copper oxide nanowires have been synthesized by a vapor-phase approach to the facial synthesis of copper oxide nanowires supported on the surface of a copper gasket. The effects of annealing temperature and time were investigated. Long and aligned nanowires can only formed within a narrow temperature range from 400 to $500^{\circ}C$ for 4 hrs. Annealing copper gasket in static air produces large-area, uniform, but not well vertically aligned nanowires along the copper gasket surface. The surface of copper gasket is converted into bicrystal CuO nanowires was observed after the copper gasket is annealed under static air condition.

superconducting properties of Bi-2223 tapes with various heat treatment condition (열처리 온도 및 분위기 변화에 따른 Bi-2223 초전도 선재에서의 특성변화)

  • 하동우;이동훈;하홍수;오상수;김홍대;양주생;윤진국;최정규;권영길
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.527-530
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    • 2002
  • A lot of efforts have been focused on the optimization of PIT parameters for Bi-2223/Ag wire. In this paper, initial annealing of Bi-2223/Ag wire to transform Bi-2212 orthorhombic from Bi-2212 tetragonal Precursor was investigated. This initial annealing step at low oxygen partial pressure were to transform Bi-2212 orthorhombic structure and to reduce the formation of second phases at superconducting wire. However Bi-2223 Phases were appeared at higher annealing temperature. Critical currents(Je) of Bi-2223/Ag tapes were sintered at low oxygen Partial pressure were higher than that of the wires sintered at atmosphere condition. In order to investigate the effect of rolling reduction ratio, Bi-2223/Ag HTS tapes were rolled with different reduction ratio. There were no clear difference of Je and filaments shape with various rolling reduction ratio.

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Al-Si Contact on Annealing condition (열처리 조건에 따른 Al-Si 접촉)

  • Kim, Tae-Hyung;Yu, Seok-Bin;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1990.07a
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    • pp.261-264
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    • 1990
  • The specific contact resistance(SCR) of metal-semiconductor interface is an important design parameter for VLSI interconnecting technology. As the critical feature size of the integrated structures decrease, the physical size of ohmic contacts will also decrease and the series contact resistance will increase. Al-Si contacts on the annealing condition are studied. The propreties of the contacts depend considerably on the annealing procedures. Barrier height is measured from Capacitance-Voltage characteristics. The specific contact resistance are analyzed using a modified four point method.

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The effect of annealing condition on texture and microstructure development of Ni tapes prepared by powder metallurgy (분말야금법으로 제조한 니켈 선재에서 집합조직과 미세조직 발달에 미치는 재결정 열처리의 영향)

  • 이동욱;지봉기;임준형;주진호;정태원;박해웅;정충환;전병혁;김찬중
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.02a
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    • pp.81-84
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    • 2003
  • The effect of annealing condition on the texture and microstructure development in Ni tapes fabricated by cold-rolling including powder metallurgy was investigated. The Pole-figure results showed that the Ni tapes annealed at lower temperature than 50$0^{\circ}C$ were the mixture of brass deformation texture and cube texture. The specimens annealed at high temperatures had only well-developed cube texture and the FWHMs of in-plane and out-of-plane were in the range of 8-10$^{\circ}$. The degree of texture was not significantly depended on annealing temperatures. The grain morphologies of Ni tapes prepared at low temperatures showed serrated grain boundaries due to incomplete recrystallization, but the specimens prepared at high temperatures showed stabilized grain shape without serrated grain boundaries.

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Stuructural and Electrical Characteristics of Ion Beam Deposited Tungsten/GaAs by High Temperature Rapid Thermal Annealing (고온 급속열처리에 의한 이온빔 증착 W/GaAs의 구조 및 전기적 특성)

  • 편광의;박형무;김봉렬
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.1
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    • pp.81-90
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    • 1990
  • In this study, ion beam deposited tungsten thin film for gate material of GaAs SAGFET(Self Aligned Gate FET) was annealed from 800\ulcorner to 900\ulcorner using RTA and detailed investigations of structural and electrical characteristics of this film were carried out using four-point probe, XRD, SEM, AES and current-voltage measurement. Investigated results showed phase of as deposited tungsten film was fine grain \ulcornerphase and phase tdransformation of this film into \ulcornerphase occured at annealing condition of 900\ulcorner, 6sec. But regardless of phase transformation, electrical characteristics of tungsten film were very stable to 900\ulcorner and in case of 900\ulcorner, 4sec annealing condition Schottky barrier height obtained from 10 diodes measurements was 0.66 + 0.003 eV.

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Structural Properties of SCT Thin Film with Deposition and Annealing Temperature (증착 및 열처리온도에 따른 SCT 박막의 구조적인 특성)

  • Kim, Jin-Sa
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.3
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    • pp.41-45
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    • 2007
  • The (SrCa)$TiO_3$(SCT) thin films were deposited on Pt-coated electrode(Pt/TiN/$SiO_2$/Si) using RF sputtering method according to the deposition condition. The crystallinity of SCT thin films were increased with increase of deposition temperature in the temperature range of $100{\sim}500[^{\circ}C]$. The optimum conditions of RF power and Ar/$O_2$ ratio were 140[W] and 80/20, respectively. Deposition rate of SCT thin films was about $18.75[{\AA}/min]$ at the optimum condition. The composition of SCT thin films deposited on Si substrate is close to stoichiometry (1.081 in A/B ratio). The maximum dielectric constant of SCT thin film was obtained by annealing at $600[^{\circ}C]$.

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Electrical and Structural Properties of ZnO:Pt Films Prepared by Ultrasonic Spray Pyrolysis (초음파분무열분해법으로 제조한 ZnO:Pt막의 전기적 및 구조적 특성)

  • Ma, Tae-Young;Park, Ki-Cheol
    • Journal of Sensor Science and Technology
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    • v.13 no.1
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    • pp.66-71
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    • 2004
  • Pt-doped zinc oxide (ZnO:Pt) films were deposited by ultrasonic spray pyrolysis. Resistivity variation with Pt concentration was measured. The Pt distribution in ZnO:Pt films was studied through Auger Electron Spectroscopy (AES). The ZnO:Pt films were annealed in the ambient of air, water vapor and ozone, respectively. The variation in crystallographic properties and surface morphologies with respect to the annealing condition was observed by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The resistivity variation of the films with the annealing condition was measured. Finally, Atomic Force Microscopy (AFM) measurements were carried out to study the effects of the annealing on the roughness of ZnO:Pt films.

Effect of annealing of Pb(La,Ti)$O_3$ thin films by Pulsed laser deposition process (펄스 레이저 증착법으로 제작된 PLT박막의 열처리 효과 연구)

  • Hur, Chang-Hoi;Shim, Kyung-Suk;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.1483-1484
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    • 2000
  • Dielectric thin films of PLT(Pb(La.Ti)O3) for the application of highly integrated memory devices have been deposited on Pt/Ti/SiO2/Si substrates in situ by pulsed laser deposition(PLD). We have systematically investigated the variation of grain sizes depending on the condition of post-annealing and the variation of deposition rate. Both in-situ annealing and ex-situ annealing have been compared depending on the annealing time. C-V measurement, ferroelectric properties, leakage current and SEM were performed to investigate the electrical properties and the microstructural properties of Pb(La,Ti)$O_3$ films.

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