Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Electrical and Structural Properties of ZnO:Pt Films Prepared by Ultrasonic Spray Pyrolysis

초음파분무열분해법으로 제조한 ZnO:Pt막의 전기적 및 구조적 특성

  • Ma, Tae-Young (Dept. of Electrical and Electronics Engineering, Gyeongsang National University, RICIC) ;
  • Park, Ki-Cheol (Dept. of Electrical and Electronics Engineering, Gyeongsang National University, RICIC)
  • 마대영 (경상대학교 전기전자공학부 및 RICIC) ;
  • 박기철 (경상대학교 전기전자공학부 및 RICIC)
  • Published : 2004.01.30
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Abstract

Pt-doped zinc oxide (ZnO:Pt) films were deposited by ultrasonic spray pyrolysis. Resistivity variation with Pt concentration was measured. The Pt distribution in ZnO:Pt films was studied through Auger Electron Spectroscopy (AES). The ZnO:Pt films were annealed in the ambient of air, water vapor and ozone, respectively. The variation in crystallographic properties and surface morphologies with respect to the annealing condition was observed by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The resistivity variation of the films with the annealing condition was measured. Finally, Atomic Force Microscopy (AFM) measurements were carried out to study the effects of the annealing on the roughness of ZnO:Pt films.

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