• Title/Summary/Keyword: Amorphous Structure

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Suppression of Boron Penetration into Gate Oxide using Amorphous Si on $p^+$ Si Gated Structure (비정질 실리론 게이트 구조를 이용한 게이트 산화막내의 붕소이온 침투 억제에 관한 연구)

  • Lee, U-Jin;Kim, Jeong-Tae;Go, Cheol-Gi;Cheon, Hui-Gon;O, Gye-Hwan
    • Korean Journal of Materials Research
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    • v.1 no.3
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    • pp.125-131
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    • 1991
  • Boron penetration phenomenon of $p^{+}$ silicon gate with as-deposited amorphous or polycrystalline Si upon high temperature annealing was investigated using high frequency C-V (Capacitance-Volt-age) analysis, CCST(Constant Current Stress Test), TEM(Transmission Electron Microscopy) and SIMS(Secondary Ion Mass Spectroscopy), C-V analysis showed that an as-deposited amorphous Si gate resulted in smaller positive shifts in flatband voltage compared wish a polycrystalline Si gate, thus giving 60-80 percent higher charge-to-breakdown of gate oxides. The reduced boron penetration of amorphous Si gate may be attributed to the fewer grain boundaries available for boron diffusion into the gate oxide and the shallower projected range of $BF_2$ implantation. The relation between electron trapping rate and flatband voltage shift was also discussed.

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Synthesis of Ion Conducting Polymer Having Low Temperature Characteristics: II. Synthesis and Characterization of Amorphous Polyester (저온특성을 갖는 이온전도성 고분자의 합성 연구: II. 비정형 폴리에스테르의 합성 및 분석)

  • 황승식;조창기
    • Polymer(Korea)
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    • v.24 no.2
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    • pp.281-286
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    • 2000
  • A series of amorphous polyesters were synthesized from amorphous polyether and sebacoyl chloride. The structure and competition of the obtained aliphatic polyester were confirmed by $^1$H-NMR and FT-IR. The number average molecular weights (M$_{n}$) of the obtained polymer were ranging from 8000 ~ 15000. These polyesters showed no crystallinity and their glass transition temperatures (T$_{g}$) were around -77$^{\circ}C$. For comparison, aliphatic polyesters were also synthesized from poly(ethylene glycol) (PEG) with M$_{n}$ of 200, 400, and 1000. As the M$_{n}$ of PEG increased, the melting point of the obtained polyester increased, and the crystallinity of the obtained polyester increased showing 8.8%, 16.2%, and 46.7%, respectively.ively.y.

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Structural Analysis & Phase Transition of Amorphous Silica Nanoparticles Using Energy-Filtering TEM (EF-TEM을 이용한 비정질 실리카 나노입자의 구조 및 상전이 연구)

  • Park, Jong-Il;Kim, Jin-Gyu;Song, Ji-Ho;Kim, Youn-Joong
    • Applied Microscopy
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    • v.34 no.1
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    • pp.23-29
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    • 2004
  • In this study, we introduce the structural analysis of amorphous silica nanoparticles by EF-TEM electron diffraction and in-situ heating experiments. Three diffused rings were observed on the electron diffraction patterns of initial silica nanoparticles, while crystalline spot patterns were gradually appeared during the insitu heating process at $900^{\circ}C$. These patterns indicate the basic unit of $SiO_4$ tetrahedra consisting amorphous silica and gradual crystallization into the ideal layer structure of tridymite by heating. Under high vacuum condition in TEM, SiO nanoparticles were redeposited on the carbon grid after evaporation of SiO gas from $SiO_2$ above $850^{\circ}C$ and the remaining $SiO_2$ were crystallized into orthorhombic tridymite, consistent with ex-situ heating results in furnace at $900^{\circ}C$.

Effects of Oxygen Partial Pressure on Oxidation Behavior of CMnSi TRIP Steel in an Oxidation-Reduction Scheme

  • Kim, Seong-Hwan;Huh, Joo-Youl;Kim, Myung-Soo;Kim, Jong-Sang
    • Corrosion Science and Technology
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    • v.16 no.1
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    • pp.15-22
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    • 2017
  • An oxidation-reduction scheme is an alternative approach for improving the galvanizability of advanced high-strength steel in the continuous hot-dip galvanizing process. Here, we investigated the effect of oxygen partial pressure ($P_{O_2}$) on the oxidation behavior of a transformation-induced plasticity steel containing 1.5 wt% Si and 1.6 wt% Mn during heating to and holding for 60 s at $700^{\circ}C$ under atmospheres with various $P_{O_2}$ values. Irrespective of $P_{O_2}$, a thin amorphous Si-rich layer of Si-Mn-O was formed underneath the Fe oxide scale (a $Fe_2O_3/Fe_3O_4$ bilayer) in the heating stage. In contrast to Si, Mn tended to segregate at the scale surface as $(Fe,Mn)_2O_3$. The multilayered structure of $(Fe,Mn)_2O_3/Fe_2O_3/Fe_3O_4$/amorphous Si-Mn-O remained even after extended oxidizing at $700^{\circ}C$ for 60 s. $Fe_2O_3$ was the dominantly growing oxide phase in the scale. The enhanced growth rate of $Fe_2O_3$ with increasing $P_{O_2}$ resulted in the formation of more Kirkendall voids in the amorphous Si-rich layer and a less Mn segregation at the scale surface. The mechanisms underlying the absence of FeO and the formation of Kirkendall voids are discussed.

a-Si:H Photodiode Using Alumina Thin Film Barrier

  • Hur Chang-Wu;Dimitrijev Sima
    • Journal of information and communication convergence engineering
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    • v.3 no.4
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    • pp.179-183
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    • 2005
  • A photodiode capable of obtaining a sufficient photo/ dark current ratio at both forward bias state and reverse bias state is proposed. The photodiode includes a glass substrate, an aluminum film formed as a lower electrode over the glass substrate, an alumina film formed as an insulator barrier over the aluminum film, a hydrogenated amorphous silicon film formed as a photo conduction layer over a portion of the alumina film, and a transparent conduction film formed as an upper electrode over the hydro-generated amorphous silicon film. A good quality alumina $(Al_2O_3)$ film is formed by oxidation of aluminum film using electrolyte solution of succinic acid. Alumina is used as a potential barrier between amorphous silicon and aluminum. It controls dark-current restriction. In case of photodiodes made by changing the formation condition of alumina, we can obtain a stable dark current $(\~10^{-12}A)$ in alumina thickness below $1000{\AA}$. At the reverse bias state of the negative voltage in ITO (Indium Tin Oxide), the photo current has substantially constant value of $5{\times}10^{-9}$ A at light scan of 100 1x. On the other hand, the photo/dark current ratios become higher at smaller thicknesses of the alumina film. Therefore, the alumina film is used as a thin insulator barrier, which is distinct from the conventional concept of forming the insulator barrier layer near the transparent conduction film. Also, the structure with the insulator thin barrier layer formed near the lower electrode, opposed to the ITO film, solves the interface problem of the ITO film because it provides an improved photo current/dark current ratio.

High-Performance Amorphous Multilayered ZnO-SnO2 Heterostructure Thin-Film Transistors: Fabrication and Characteristics

  • Lee, Su-Jae;Hwang, Chi-Sun;Pi, Jae-Eun;Yang, Jong-Heon;Byun, Chun-Won;Chu, Hye Yong;Cho, Kyoung-Ik;Cho, Sung Haeng
    • ETRI Journal
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    • v.37 no.6
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    • pp.1135-1142
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    • 2015
  • Multilayered ZnO-$SnO_2$ heterostructure thin films consisting of ZnO and $SnO_2$ layers are produced by alternating the pulsed laser ablation of ZnO and $SnO_2$ targets, and their structural and field-effect electronic transport properties are investigated as a function of the thickness of the ZnO and $SnO_2$ layers. The performance parameters of amorphous multilayered ZnO-$SnO_2$ heterostructure thin-film transistors (TFTs) are highly dependent on the thickness of the ZnO and $SnO_2$ layers. A highest electron mobility of $43cm^2/V{\cdot}s$, a low subthreshold swing of a 0.22 V/dec, a threshold voltage of 1 V, and a high drain current on-to-off ratio of $10^{10}$ are obtained for the amorphous multilayered ZnO(1.5nm)-$SnO_2$(1.5 nm) heterostructure TFTs, which is adequate for the operation of next-generation microelectronic devices. These results are presumed to be due to the unique electronic structure of amorphous multilayered ZnO-$SnO_2$ heterostructure film consisting of ZnO, $SnO_2$, and ZnO-$SnO_2$ interface layers.

A Study on the Fabrication of Fe Based Alloy Powder for Laser Welding (레이저 용접용 Fe계 합금 분말 제조에 관한 연구)

  • Lee, Jong-Jae;Son, Young-San
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.8
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    • pp.3315-3318
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    • 2012
  • In this study, Fe-base alloy powder was prepared by gas atomizing method. Shape and crystal structure of the powder were investigated by FESEM, X-ray diffraction, and DSC. The powder was produced in a spherical shape, with a size of 45 ~ 90 ${\mu}m$. X-ray diffraction analysis revealed that the powder was fully amorphous, showing typical broad amorphous peak. From DSC analysis, Tg and Tx that are generally found in a bulk amorphous alloy were also observed in the alloy powder. Tg and Tx of the powder were $530^{\circ}C$ and $560^{\circ}C$, respectively. These results suggest us that the bulk amorphous alloy (BMG) powder prepared in this study is applicable to laser welding.

Superhard SiC Thin Films with a Microstructure of Nanocolumnar Crystalline Grains and an Amorphous Intergranular Phase

  • Lim, Kwan-Won;Sim, Yong-Sub;Huh, Joo-Youl;Park, Jong-Keuk;Lee, Wook-Seong;Baik, Young-Joon
    • Corrosion Science and Technology
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    • v.18 no.5
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    • pp.206-211
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    • 2019
  • Silicon carbide (SiC) thin films become superhard when they have microstructures of nanocolumnar crystalline grains (NCCG) with an intergranular amorphous SiC matrix. We investigated the role of ion bombardment and deposition temperature in forming the NCCG in SiC thin films. A direct-current (DC) unbalanced magnetron sputtering method was used with pure Ar as sputtering gas to deposit the SiC thin films at fixed target power of 200 W and chamber pressure of 0.4 Pa. The Ar ion bombardment of the deposited films was conducted by applying a negative DC bias voltage 0-100 V to the substrate during deposition. The deposition temperature was varied between room temperature and $450^{\circ}C$. Above a critical bias voltage of -80 V, the NCCG formed, whereas, below it, the SiC films were amorphous. Additionally, a minimum thermal energy (corresponding to a deposition temperature of $450^{\circ}C$ in this study) was required for the NCCG formation. Transmission electron microscopy, Raman spectroscopy, and glancing angle X-ray diffraction analysis (GAXRD) were conducted to probe the samples' structural characteristics. Of those methods, Raman spectroscopy was a particularly efficient non-destructive tool to analyze the formation of the SiC NCCG in the film, whereas GAXRD was insufficiently sensitive.

Light-Induced Degradation of Hydrogenated Amorphous Silicon (광조사에 따른 비정질 실리콘의 열화)

  • 박진석;한민구;이정한
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.25 no.5
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    • pp.501-508
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    • 1988
  • This paper presents the light-induced effects on the elelctrical and optical properties of undoped and doped hydrogenated amorphous silicon films. The changes in the conductivities and the activation energies of various types of a-Si:H films due to the prolonged exposure to light have been characterized as a function of deposition conditions and illumination periods. The dark conductivity changes may be quenched for heavier doped a-Si:H films. We have also analyzed the variations of micro-structure of a-Si:H film such as silicon-hydrogen bondings in the rocking and stretching modes utilizing infrared spectroscopy. From the experimental results, it is elucidated that doping effects must be crucial to the degradations of the fundamental properties of a-Si:H due to light-induced effects.

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Thermal Conductivity Analysis of Amorphous Silicon Formed by Natural Cooling: A Molecular-dynamics Study

  • Lee, Byoung Min
    • Journal of the Korean Ceramic Society
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    • v.53 no.3
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    • pp.295-300
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    • 2016
  • To investigate the thermal conductivity and the structural properties of naturally cooled excimer-laser annealed Si, molecular-dynamics (MD) simulations have been performed. The thermal conductivity of crystalline Si (c-Si) was measured by direct method at 1000 K. Steady-state heat flow was measured using a stationary temperature profile; significant deviations from Fourier's law were not observed. Reliable processes for measuring the thermal conductivity of c-Si were presented. A natural cooling process to admit heat flow from molten Si (l-Si) to c-Si was performed using an MD cell with a size of $48.9{\times}48.9{\times}97.8{\AA}^3$. During the cooling process, the temperature of the bottom $10{\AA}$ of the MD cell was controlled at 300 K. The results suggest that the natural cooling system described the static structural property of amorphous Si (a-Si) well.