• Korean Journal of Materials Research
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• v.25 no.5
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• pp.233-237
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• 2015

Silicon oxynitride that can be deposited two times faster than general SiNx:H layer was applied to fabricate the passivation protection layer of atomic layer deposition (ALD) $Al_2O_3$. The protection layer is deposited by plasma-enhanced chemical vapor deposition to protect $Al_2O_3$ passivation layer from a high temperature metallization process for contact firing in screen-printed silicon solar cell. In this study, we studied passivation performance of ALD $Al_2O_3$ film as functions of process temperature and RF plasma effect in plasma-enhanced chemical vapor deposition system. $Al_2O_3$/SiON stacks coated at $400^{\circ}C$ showed higher lifetime values in the as-stacked state. In contrast, a high quality $Al_2O_3$/SiON stack was obtained with a plasma power of 400 W and a capping-deposition temperature of $200^{\circ}C$ after the firing process. The best lifetime was achieved with stack films fired at $850^{\circ}C$. These results demonstrated the potential of the $Al_2O_3/SiON$ passivated layer for crystalline silicon solar cells.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.337-337
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• 2014

투명 전도성 산화물(transparent conductive oxide: TCO) 박막은 높은 투과율과 낮은 비저항 덕분에 LCD (liquid crystal display), PDP (plasma display panel), OLED (organic light emitting display) 등 평판 디스플레이에 널리 사용되고 있다. 현재 양산되고 있는 ITO (indium tin oxide)는 90% 이상의 높은 투과율과 우수한 전도성으로 인해 TCO 박막 가운데서 디스플레이 산업에서 가장 널리 쓰이고 있다. 그런데, ITO의 인듐산화물에 의한 간질성 폐렴(interstitial pneumonia)의 유발 위험이 있다든가, 인듐의 매장량이 적어 원자재 가격이 비싼 단점도 가지고 있다. 이에 최근 ITO를 대체할 수 있는 TCO물질로 많은 연구가 이루어지고 있는데, 특히 AZO (aluminum-doped zinc oxide)는 그 중 대표적인 대체물질로서 독성이 없고 가격도 저렴하여 많은 관심이 증폭되고 있다. 현재 AZO는 sol-gel 방법이나 CVD (chemical vapor deposition) 또는 스퍼터링 방법 등으로 증착되고 있다. 본 연구에서는 두 개의 이종타겟(hetero target)을 장착한 대향 타겟 스퍼터링(facing target sputtering: FTS) 장치를 사용하여 AZO 박막을 제작한다. 기존의 여러 증착법과 달리, FTS 장치는 두 타겟 사이에 형성되는 플라즈마 내의 ${\gamma}$-전자를 구속하게 되며, 낮은 가스 압력에서 고밀도 플라즈마가 생성되어 빠른 증착 속도와 안정적인 방전을 유지한 상태에서 박막을 증착할 수가 있다. 또한 기판과 플라즈마가 이격되어 있어 높은 에너지를 갖는 입자들의 기판 충돌을 억제할 수 있는 장점들을 갖는다. 이종 타겟인 ZnO와 Al2O3를 사용하고 각 타겟에 인가되는 파워 변화를 통해 AZO 박막 내 Al2O3의 성분비를 조절하였다. ZnO 타겟의 증착 파워를 100 W로 고정할 경우, Al2O3 타겟의 증착 파워가 (50~90) W으로 실험을 하였으며, Al2O3 타겟의 증착 파워가 70 W일 때 AZO 박막의 Al2O3 성분비는 2.02 wt.%이며 박막의 비저항 값은 $5{\times}10^{-4}{\Omega}{\cdot}cm$로 최소값을 보였다. 이러한 비저항의 변화는 파워에 따른 AZO 박막의 캐리어 이동도(Hall mobility)와 캐리어의 농도(Carrier Concentration)의 변화와 밀접한 관계가 있음을 보여주며, 특히 AZO 박막의 캐리어 농도와 캐리어 이동도는 AZO 박막을 형성하고 있는 결정립의 크기에 의존하는 것이 X-선 회절 패턴과 SEM으로부터 확인되었다. 특히, 본 연구에서는 두 개의 이종 타겟(hetero target) Al2O3와 ZnO를 장착하고 각각의 파워를 변화시켜 도핑 량을 조절할 수는 대향 타겟 스퍼터링(FTS: facing-target sputtering) 방법을 이용하여 제작된 AZO 박막에 대해 전기적, 광학적 및 구조적 특성을 분석하고 ITO의 대체물로서의 가능성을 검토하고자 한다.

• Applied Chemistry for Engineering
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• v.7 no.6
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• pp.1192-1203
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• 1996

$Al_2O_3-TiO_2$ composite oxide adsorbents which could be applied in high-temperature water were prepared by hydrolysis of aluminum and titanium alkoxide. The prepared adsorbents were calcined at $600{\sim}1400^{\circ}C$ and in order to investigate the various properties - the transition of crystals, thermal properties, and specific surface area, X-ray diffractometry, thermal analysis, FT-IR, SEM and BET method were employed. And the $Co^{2+}$ adsorption characteristics of these adsorbents in high-temperature water were investigated by batch adsorption experiment in a stirred autoclave. Since the adsorption of $Co^{2+}$ on the $Al_2O_3-TiO_2$ adsorbents was irreversible endothermic in the temperature range of $150{\sim}250^{\circ}C$, the standard enthalpy changes of 26, 43, and 80 mol% of $TiO_2$ on $Al_2O_3$ were in the range of $16.5{\sim}26.0kJ{\cdot}mol^{-1}$. The adsorbent of 26 mol% of $TiO_2$ on $Al_2O_3$ which was calcined at $600^{\circ}C$ for 2 hours showed the adsorption amount of $0.1674meq{\cdot}g^{-1}$ in the high temperature water at $250^{\circ}C$.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1542-1545
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• 2005

Transparent conducting aluminum-doped zinc oxide (AZO) thin films have been deposited on corning 1737 glass by DC magnetron sputter. The structural, electrical and optical properties of the films were investigated as a function of various substrate temperatures. AZO thin films were fabricated by dc magnetron sputtering with AZO ceramic target $(Al_2O_3: 2wt %)$. The obtained films were poly crystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity is $6.0{\times}10^{-4}$ Ocm with the carrier concentration of $2.694{\times}10^{20}\;cm^{-3}$ and Hall mobility of $20.426cm^2/Vs$. The average transmittance in the visible range was above 90%.

• Journal of the Korean Electrochemical Society
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• v.12 no.1
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• pp.47-53
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• 2009

In this study, highly ordered AAO (Anodic Aluminum Oxide) with nanopores was prepared by commercial grade Al substrate containing 3.5 wt.% impurities through two step anodizing method. Nanopores of prepared AAO arrays were used as templates for preparing nanofiber. $TiO_2$ was deposited by using DP (deposition-precipitation) method into AAO pores to grow nanofiber. Au particles were loaded on this $TiO_2$ nanofiber which was grown vertically. Prepared 2 wt.% $Au/TiO_2$ nanofiber was characterized by XRD, SEM and Raman. The crystal structure was analyzed by the XRD. SEM was used to observe pore size and pore wall thickness. Photocatalytic activity of co-oxidation was compared with $TiO_2$ and $Au/TiO_2$ nanofiber on AAO arrays.

• Korean Journal of Materials Research
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• v.16 no.3
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• pp.178-182
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• 2006

A single electro-discharge-sintering (EDS) pulse (1.0 kJ/0.7 g), from a $300{\mu}F$ capacitor, was applied to atomized spherical Ti-6Al-4V powder in a low vacuum to produce porous-surfaced implant compacts. A solid core surrounded by a porous layer was formed by a discharge in the middle of the compact. XPS (X-ray photoelectron spectroscopy) was used to study the surface characteristics of the implant material. C, O, and Ti were the main constituents, with smaller amounts of Al, V, and N. The implant surface was lightly oxidized and was primarily in the form of $TiO_2$ with a small amount of metallic Ti. A lightly etched EDS implant sample showed the surface form of metallic Ti, indicating that EDS breaks down the oxide film of the as-received Ti-6Al-4V powder during the discharge process. The EDS Ti-6Al-4V implant surface also contained small amounts of aluminum oxide in addition to $TiO_2$. However, V detected in the EDS Ti-6Al-4V implant surface, did not contribute to the formation of the oxide film..

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.11
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• pp.862-866
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• 2012

Surface passivation of AlGaN/GaN heterojunction structure was examined through the thermal oxidation of evaporated Al. The Al-oxide passivation increased channel conductance of two dimensional electron gas (2DEG) on the AlGaN/GaN interface. The sheet resistance of 463 ohm/${\Box}$ for 2DEG channel before $Al_2O_3$ passivation was decreased to 417 ohm/${\Box}$ after passivation. The oxidation of Al induces tensile stress to the AlGaN/GaN structure and the stress seemed to enhance the sheet carrier density of the 2DEG channel. In addition, the $Al_2O_3$ films formed by thermal oxidation of Al suppressed thermal deterioration by the high temperature annealing.

• Journal of the Mineralogical Society of Korea
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• v.25 no.4
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• pp.283-293
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• 2012

In order to have better insights into the chemical differentiation of Earth from its magma ocean phase to the current stratified structure, detailed information of crystallization kinetics of silicate melts consisting of the magma ocean is essential. The structural transitions in oxide glasses and melts upon crystallization provide improved prospects for a systematic and quantitative understanding of the crystallization processes. Here, we report the $^{27}Al$ 3QMAS NMR spectra for sol-gel synthesized $Al_2O_3$ glass with varying temperature and annealing time. The NMR spectra for the amorphous $Al_2O_3$ show well-resolved Al coordination environments, characterized with mostly $^{[4,5]}Al$ and a minor fraction of $^{[6]}Al$. The fraction of $^{[5]}Al$ in the alumina phase decreases with increasing annealing time at constant temperature. The NMR results of $Al_2O_3$ phases also imply that multiple processes (e.g., crystallization and/or changes in structural disorder within glasses) could involve upon its phase transition. The current results and method can be useful to understand crystallization kinetics of diverse natural and multi-component silicate glasses and melts. The potential result may yield atomic-level understanding of Earth's chemical evolution and differentiation from the magma ocean.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.23 no.4
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• pp.167-172
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• 2013

Titanium dioxides nanoparticles coated aluminum oxide powders were fabricated by pulsed laser deposition (PLD) with Nd : YAG laser at 266 nm. The Pulse laser energy is 100 mJ/pulse. During the irradiation of the focused laser on the $TiO_2$ target, Ar gas is supplied into the chamber. The gas pressure is varied in a range of $1{\times}10^{-2}$ to 100 Pa. Titanium dioxides nanoparticles deposited aluminum oxide powders were characterized by using energy dispersive X-ray spectroscopy (EDX), high resolution transmission electron microscopy (HR-TEM), in order to understand the effect of Ar background gas on surface morphology and properties of the powders. The coated $TiO_2$ nanoparticles had nanosized spherical shape and the crystallite sizes of 10~30 nm. The morphology of coated $TiO_2$ nanoparticles is not affected by gas pressure. However, the particle size and crystallinity slightly increased with the increase of gas pressure. According to this technique, the size and crystallinity of nanoparticles can be easily controlled by controlling pressure during the laser irradiation.

• Journal of the Korea Concrete Institute
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• v.27 no.2
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• pp.95-102
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• 2015

In this paper, the effects of sodium hydroxide (NaOH) and aluminum potassium sulfate ($AlK(SO_4)_2{\cdot}12H_2O$) dosage on strength properties were investigated. For evaluating the property related to the dosage of alkali activator, sodium hydroxide (NaOH) of 4% (N1 series) and 8% (N2 series) was added to 1~5% (K1~K5) dosage of aluminum potassium sulfate ($AlK(SO_4)_2{\cdot}12H_2O$) and 1% (C1) and 2% (C2) dosage of calcium oxide (CaO). W/B ratio was 0.5 and binder/ fine aggregate ratio was 0.5, respectively. Test result clearly showed that the compressive strength development of alkali-activated slag cement (AASC) mortars were significantly dependent on the dosage of NaOH and $AlK(SO_4)_2{\cdot}12H_2O$. The result of XRD analysis indicated that the main hydration product of $NaOH+AlK (SO_4)_2{\cdot}12H_2O$ activated slag was ettringite and CSH. But at early ages, ettringite and sulfate coated the surface of unhydrated slag grains and inhibited the hydration reaction of slag in high dosage of $NaOH+AlK(SO_4)_2{\cdot}12H_2O$. The $SO_4{^{-2}}$ ions from $AlK(SO_4)_2{\cdot}12H_2O$ reacts with CaO in blast furnace slag or added CaO to form gypsum ($CaSO_4{\cdot}2H_2O$), which reacts with CaO and $Al_2O_3$ to from ettringite in $NaOH+AlK(SO_4)_2{\cdot}12H_2O$ activated slag cement system. Therefore, blast furnace slag can be activated by $NaOH+AlK(SO_4)_2{\cdot}12H_2O$.