• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 추계학술발표대회
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• pp.44.2-44.2
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• 2009

Polycrystalline materials suchas yttria and alumina have been applied as a plasma resisting material for the plasma processing chamber. However, polycrystal line material may easily generate particles and the particles are sources of contamination during the plasma enhanced process. Amorphous material can be suitable to prevent particle generation due to absence of grain-boundaries. We manufactured nitrogen-containing $SiO_2-Al_2O_3-Y_2O_3$ based glasses with various contents of silicon and fixed nitrogen content. The thermal properties, mechanical properties and plasma etching rate were evaluated and compared for the different composition samples. The plasma etching behavior was estimated using XPS with depth profiling. From the result, the plasma etching rate highly depends on the silicon content and it may results from very low volatile temperature of SiF4 generated during plasma etching. The silicon concentration at the plasma etched surface was very low besides the concentration of yttrium and aluminum was relatively high than that of silicon due to high volatile temperature of fluorine compounds which consisted with aluminum and yttrium. Therefore, we conclude that the samples having low silicon content should be considered to obtain low plasma etching rate for the plasma resisting material.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 추계학술발표대회
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• pp.18.2-18.2
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• 2009

Ceramics have some properties that are unmatched by other kind of materials like metals or polymers. The ability of high thermal and chemical resistance and in case of being superior in specific mechanical properties makes the ceramic materials suitable for arange of applications. The microstructure and morphology of a material arguably permit the use of many advanced application otherwise difficult to achieve.Porous structures have some important applications in biomedical and environmental field. For human hard tissue reconstruction and augmentation procedure suitable biomaterials are used with a desirable porosity. A range of porous bioceramics were fabricated with tailored design to meet the demand of specific applications. Channeled and interconnected porosity was introduced in alumina, zirconia, and hydroxyapatite or tri calcium phosphate ceramics by different methods like multi-pass extrusion process, bubble formation in viscous slurry,slurry dripping in immiscible liquid, sponge replica method etc. The detailed microstructural and morphological investigations were carried out to establish the unique features of each method and the developed systems. For environmental filters the porous structures were also very important. We investigated a range of channeled and randomly porous silicon based ceramic composites to enhance the material stability and filtration efficiency by taking advantage of the material chemistry of the element. Detailed microstructural and mechanical characterizations were carried out for the fabricated porous filtration systems.

• 항공우주기술
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• 제7권2호
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• pp.131-143
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• 2008

KSLV-I의 상단부 킥모터의 정확한 성능예측을 위해서 슬래그 적층량을 예측하였다. 수치해석의 타당성을 확인하기 위해 KM 4호기의 질유량에 대한 시험값을 비교하였다. 비행중 KM 슬래그 적층해석을 위해 각 시점별 내부유동 현상을 해석하였다 알루미늄 액적의 궤적을 통해 슬래그가 모터 내부에 적층되는 현상을 나타내었다. 유동현상 및 액적의 적층현상을 Flunet 6.3을 사용해서 수치해석을 수행하였다. 슬래그 적층량을 예측하는데 비행중의 가속도, 액적 출발점 위치, 액적의 크기 등에 대한 영향을 분석하였고 이를 고려하여 총 슬래그 양을 예측하였다. 이 예측값을 지상시험 결과를 이용해서 예측되는 슬래그양과 비교하였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.135-135
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• 2003

This paper presents the preparation of SnO$_2$ films by Sol-Gel process and using spin coating method, and their sensing properties in CO gas. Experimental procedure consisted of following steps: (1) Tin chloride(SnCl$_4$) and Ammonium hydrogen carbonate (NH$_4$HCO$_3$) were used as precursors; (2) the Sol solution with concentration of about 10wt% SnO$_2$ was prepared from washed Gel-precipitate for spin coating step; (3) thereafter, the coating solution was dropped onto the alumina (Al$_2$O$_3$) substrate that was then spun, the spin coating was carried out with total 10 times; (4) finally, the films were calcined for 3 hours at 50$0^{\circ}C$ or higher temperature (600, 700, 800 or 90$0^{\circ}C$) in order to obtain various gram sizes. The average grain size was calculated by Scherrer's equation using main peaks in XRD spectra; meanwhile the thickness, microstructure and surface morphology of the films were observed by FE-SEM.

• Journal of Electrical Engineering and Technology
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• 제12권6호
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• pp.2256-2261
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• 2017

Carbon nanotube (CNT) and alumina ($Al_2O_3$) are synthesized into hybrid composites, and an advanced electrical discharge machining (EDM) system is developed for the machining of hard and conductive materials. CNT nanoparticles are mixed with $Al_2O_3$ powder and the $Al_2O_3$/CNT slurry is sintered by spark plasma. The hardness and the electrical conductivity of the $Al_2O_3$/CNT hybrid composite were investigated. The electrical discharge is controlled by a capacitive ballast circuit. The capacitive ballast circuit is applied to the tungsten carbide and the $Al_2O_3$/CNT hybrid composite. The voltage-current waveforms and scanning electron microscope (SEM) images were measured to analyze the characteristics of the boring process. The developed EDM process can manufacture the ceramic based hybrid composites, thereby expecting the variety of applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.176-177
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• 2006

Two kinds of alumina nanofluids are prepared by dispersing $Al_2O_3$ nanoparticles m transformer oil. The thermal conductivity of the nanoparticle-oil mixtures increases with particle volume fraction and thermal conductivity of the solid particle itself. The $Al_2O_3$ nanoparticles at a volume of 0.5% can increase the thermal conductivity of the transformer oil by 5.7%, and the overall heat transfer coefficient by 20%. From the natural convection test using a prototype transformer, the cooling effect of $Al_2O_3$-oil nanofluids on the heating element and oil itself is confirmed. However, excessive quantities of the surfactant have a harmful effect on viscosity, and thus it is strongly recommended to control the addition of the surfactant with great care.

• International Journal of Concrete Structures and Materials
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• 제10권1호
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• pp.15-28
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• 2016

With the aim to reduce the atmospheric $CO_2$, utilization of the carbonated lime produced from the aqueous carbonation reaction for the synthesis of a cementitious material would be a promising approach. The present investigation deals with the aqueous carbonation of slaked lime, followed by hydrothermal synthesis of a cementitious material utilizing the carbonated lime, silica fume, and hydrated alumina. In this study, the aqueous carbonation reaction was performed under four different conditions. The TGA, FESEM, and XRD analysis of the carbonated product obtained from the four different reaction conditions was performed to evaluate the efficacy of the reaction conditions used for the production of the carbonated lime. Additionally, the performance of the cementitious material was verified analyzing the physical characteristics, mechanical property and setting time. Based on the results, it is demonstrated that the material produced by the hydrothermal method possesses the cementing ability. Additionally, it is revealed that the mortar prepared using the alternative cementitious material yields $33.8{\pm}1.3MPa$ compressive strength. Finally, a plausible reaction scheme has been proposed to explain the overall performances of the aqueous carbonation as well as the hydrothermal synthesis of the cementitious material.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.727-730
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• 2004

In this paper, so as to investigate the influence of oxidizer for each metal film using the alumina-based slurry, we have peformed the W/Ti metal-CMP process by adding $H_2O_2$ as a representative oxidizer from 1 wt% to 9 wt%, respectively. As an experimental result, for the case of 5 wt% oxidizer added, the removal rates were improved and polishing selectivity of 1.4 : 1 was obtained. Also, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5 wt% hydrogen peroxide such as $Fe(NO_3)_3$, $H_2O_2$, and $KIO_3$. Finally, atomic force microscope (AFM) measurements were carried out for the analysis of surface morphology and root mean square (RMS) roughness after CMP Process.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).