• 제목/요약/키워드: Alumina-based

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Effects of Oxidizer Additive on the Performance of Copper-Chemical Mechanical Polishing using Tungsten Slurry (텅스텐 슬러리를 사용한 Cu-CMP 특성에서 산화제 첨가의 영향)

  • 이우선;최권우;이영식;최연옥;오용택;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.2
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    • pp.156-161
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    • 2004
  • We investigated the effects of oxidizer additive on the performance of Cu-CMP process using commonly used tungsten slurry. In order to compare the removal rate and non-uniformity as a function of oxidizer contents, we used alumina-based tungsten slurry and copper blanket wafers deposited by DC sputtering method. According to the CMP removal rates and particle size distribution, and the microstructures of surface layer by SEM image as a function or oxidizer contents were greatly influenced by the slurry chemical composition of oxidizers. The difference in removal rate and roughness of copper surface are believed to cause by modification in the mechanical behavior of $Al_2$O$_3$abrasive particles in CMP slurry.

Effect of Eco-friendly Inorganic Flame Retardants on Mechanical and Flame-Retardant Properties of EPDM Compound

  • Do, Jong Hwan;Kim, Do Young;Seo, Kwan Ho
    • Elastomers and Composites
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    • v.55 no.1
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    • pp.40-45
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    • 2020
  • In this study, the mechanical and flame-retardant properties of ethylene-propylene-diene-termonomer (EPDM) based rubber compounds and various other environmentally friendly inorganic flame retardants were investigated. Alumina trihydrate (ATH) and magnesium hydroxide (MDH) were used as inorganic flame retardants. The mechanical properties after thermal oxidation aging and the flame-retardant properties of the EPDM compounds were measured using a moving die rheometer, a universal testing machine, a compression set, and a UL 94 V flammability test. We focused on how the properties were affected by the type and amount of flame retardants. The results demonstrated that the optimal mechanical and flame-retardant V-0 grade properties were obtained at an ATH content of 200 phr.

Hydrogen purification using membrane reactors

  • Barbieri, Giuseppe;Bernardo, Paola;Drioli, Enrico;Lee, Dong-Wook;Sea, Bong-Kuk;Lee, Kew-Ho
    • Proceedings of the Membrane Society of Korea Conference
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    • 2003.07a
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    • pp.21-24
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    • 2003
  • Methane steam reforming (MSR) was studied in a membrane reactor (MR) with a Pd-based and a porous alumina membranes. MRs showed methane conversion higher than that foresaw by the thermodynamic equilibrium for a traditional reactor (TR). Silica membranes prepared at KRICT were characterized with permeation tests on single gases ($N_2$, $H_2$ and $CH_4$). These silica membranes can be also used for high temperature applications such as $H_2$ separation $CO_2$ hydrogenation for methanol production is another reaction where $H_2O$ selective removal can be performed with these silica membranes.

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Densification of Aggregated Alumina Powder under Cyclin Compaction (반복압축하의 응집된 알루미나 분말의 치밀화)

  • Kim, K.T.;Son, G.S.;Suh, J.
    • Journal of the Korean Ceramic Society
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    • v.29 no.2
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    • pp.136-142
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    • 1992
  • The effects of cyclic stress, frequency and bias-pressure on densification of Al2O3 powder cyclic compaction are investigated. The effect of frequency was not significant on densification of Al2O3 powder under cyclic compaction. The higher the cyclic stress and the lower the bias pressure, the higher densification was achieved. To obtain a higher densification, cyclic compaction was more efficient than 1 stroke compaction. A densification equation was proposed to describe an cyclic time dependent pressure-volume relation for Al2O3 powder under cyclic compaction. This equation was obtained empirically, based on the pressure-volume equation proposed by Cooper and Eaton, the time dependent densification equation by Kim and Suh and experimental data for Al2O3 powder under cyclic compaction. The agreement between the proposed equation and experimental data for Al2O3 powder under cyclic compaction was very good.

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Humidity sensing properties of carbon nitride film according to fabrication conditions (제조 조건에 따른 질화탄소막의 습도 감지 특성)

  • Lee, Sung-Pil;Kim, Jung-Hoon;Lee, Hyo-Ung;Lee, Ji-Gong
    • Journal of Sensor Science and Technology
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    • v.14 no.5
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    • pp.343-349
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    • 2005
  • Carbon nitride films were deposited on various substrates for humidity sensors with meshed electrode by reactive RF magnetron sputtering system. As the ratio of injected nitrogen was decreased, the sensitivity of sensor was increased. When the ratio of injected nitrogen was $50{\sim}70%$, the sample showed the best linearity. The sensor impedance changed from $95.4{\;}k{\Omega}$ to $2.1{\;}k{\Omega}$ in a relative humidity range of 5 % to 95 %. The humidity sensors based on silicon wafer revealed higher lineality and faster response than those of alumina or quartz substrates. The adsorption saturation time of the sample was about 80 sec, and its desorption time was about 90 sec.

Study on Ni CMP Characteristics Behavior by Addition of Oxidizers (산화제 첨가에 따른 니켈 화학적 기계적 연마 특성 거동 연구)

  • Choi, Gwon-Woo;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.647-648
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    • 2005
  • The development of CMP slurry chemistry for Ni that provides good CMP performance is the key for nickel based MEMS device fabrication. In this study, CMP of nickel was performed using different slurry versus oxidizer ratios arid different oxidizers also alumina particles as an abrasive.

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Prediction for Slag Mass Accumulation in the Kick Motor (킥모터 슬래그 적층량 예측)

  • Jang, Je-Sun;Kim, Byung-Hun;Cho, In-Hyun
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.11a
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    • pp.217-220
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    • 2008
  • Slag mass deposition was required to predict accurate performance of kick motor (KM) system. Slag mass accumulation was analyzed through the aluminum oxide particle paths to predict slag mass deposition. Numerical analysis to solve both flow field and droplet accumulation was performed with Fluent 6.3 program. The effects for the acceleration and diameters of the aluminum oxide particles was analyzed, finally total slag mass accumulation was acquired. It confirmed that the slag mass deposition was agreed well with previously slag mass prediction based on KM ground test.

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On propagation of elastic waves in an embedded sigmoid functionally graded curved beam

  • Zhou, Linyun;Moradi, Zohre;Al-Tamimi, Haneen M.;Ali, H. Elhosiny
    • Steel and Composite Structures
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    • v.44 no.1
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    • pp.17-31
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    • 2022
  • This investigation studies the characteristics of wave dispersion in sigmoid functionally graded (SFG) curved beams lying on an elastic substrate for the first time. Homogenization process was performed with the help of sigmoid function and two power laws. Moreover, various materials such as Zirconia, Alumina, Monel and Nickel steel were explored as curved beams materials. In addition, curved beams were rested on an elastic substrate which was modelled based on Winkler-Pasternak foundation. The SFG curved beams' governing equations were derived according to Euler-Bernoulli curved beam theory which is known as classic beam theory and Hamilton's principle. The resulted governing equations were solved via an analytical method. In order to validate the utilized method, the obtained outcomes were compared with other researches. Finally, the influences of various parameters, including wave number, opening angle, gradient index, Winkler coefficient and Pasternak coefficient were evaluated and indicated in the form of diagrams.

Selection of a carrying agent for obtaining radioactive methyliodide vapors under dynamic conditions

  • Obruchikov, Alexander V.;Merkushkin, Aleksei O.;Magomedbekov, Eldar P.;Anurova, Olga M.;Vanina, Elena A.
    • Nuclear Engineering and Technology
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    • v.53 no.8
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    • pp.2761-2766
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    • 2021
  • A method for preparing "reagent" for radioactive methyliodide vapors production using an isotopic exchange reaction has been developed. Based on the obtained data of the isotopic exchange efficiency and hydraulic resistance, white fused alumina (700-840 ㎛) was selected as the carrying agent material for "reagent" production. The radioiodine isotopic exchange dependences on such parameters as temperature, gas flow velocity, and the methyliodide concentration in it were determined. Optimal conditions have been selected to achieve 85% of the isotopic exchange rate in 1 h of the experiment. The obtained data allowed to develop an approach to the test of iodine filters for nuclear power plants and to determine their efficiency.

The Effect of Refractory Crucible on Microstructure of Duplex Stainless Steel Cast with Gadolinium during Air Induction Melting (대기용해 시 내화물 도가니의 종류가 가돌리늄(Gadolinium)을 함유한 듀플렉스 스테인레스 강의 미세조직에 미치는 영향)

  • Ahn, Ji-Ho;Lim, Jae-han;Moon, Byung-Moon
    • Journal of Korea Foundry Society
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    • v.35 no.5
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    • pp.114-119
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    • 2015
  • This paper reports the effect of a refractory crucible type on the microstructure of duplex stainless steel (DSS) cast with the addition of gadolinium using air-induction melting. Grade 4A DSSs with 1 wt% of gadolinium (Gd) were fabricated in various crucibles including alumina ($Al_2O_3$), magnesia (MgO), calcia (CaO) coated with yttria ($Y_2O_3$) and graphite. The standard free energies of the formation of calcium and yttrium oxide were lower than those of gadolinium oxide and other crucible elements based oxide. The yield of Gd in DSS using $Al_2O_3$, MgO, CaO-coated $Y_2O_3$ and graphite was 5, 19, 83 and 96%, respectively. As Gd yield increased, the amount of Gd-based inclusions increased, the size of the inclusions were reduced, and the inclusions became evenly distributed.