• 한국정밀공학회지
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• 제26권8호
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• 대한기계학회논문집A
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• 제26권4호
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• pp.711-719
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• 2002

This paper presents the synchronous vibration control of a rotor system using an active air bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by pivots containing piezoelectric actuators and their radial position can be actively controlled by applying voltage to the actuators. Thus, disturbances, i. e. various kinds of external force can cause shaft vibration as well as change of the air film thickness. The dynamic behavior of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The $\mu$ synthesis are applied to the AAB system with three pads, two of which contain piezoelectric actuators. To test the validity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results also show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1993년도 제18회 학술대회 초록집
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• pp.51-56
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• 1993

The conical bearing can be used to support the radial and thrust load simultaneously. Two circumferential grooves with discrete hole restrictions are made on the bearing surface in order to increase stiffness. In this paper, the dynamic characteristics of this type of bearings are calculated such as stiffness and champing coefficients. As a results of theoretical analysis, it is verified that there exist the groove depth and distance between two grooves which produce the maximum stiffness at the given bearing dimensions.

• Tribology and Lubricants
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• 제17권2호
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• pp.97-108
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• 2001

This paper describes the development of performance analysis technique for a leaf-type gas lubricated fail bearing. Stiffness coefficient and frictional damping due to the slip between all contacts of leaves are evaluated for various leaf structures. The fluid film thickness and pressure distribution are computed but it is not considered the elastic deformation by film pressure. The analysis results include the effects that the curvature radius and the length of leaf and the friction coefficient have on the static and dynamic characteristics of the foil bearings.

• Tribology and Lubricants
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• 제10권1호
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• pp.56-61
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• 1994

The conical bearing can be used to support the radial and thrust load simultaneously. Two circumferential grooves with discrete hole restrictions are made on the bearing surface in order to increase stiffness. In this paper, the dynamic characteristics of this type of bearings are calculated such as stiffness and damping coefficients. As a results of theoretical analysis, it is verified that there exist the groove depth and distance between two grooves which produce the maximum stiffness at the given bearing dimensions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.99-100
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.79-80
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.485-486
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.83-84
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.23-24
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• 2009