• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.120.2-120.2
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• 2013

반도체 소자의 소형화로 신개념 화학증착공정 구현을 위한 장비와 화학증착소재의 개발이 활발이 연구되고 있다. 특히 증착소재의 물리적 화학적 특성을 파악하고 가장 적합한 소재를 선택하기 위한 연구도 변행되고 있다. 많은 연구자들이 소재 평가를 위해 가스크로마토그래피, 질량분석기, 적외선 분광기 등을 이용한 화학증착소재의 특성을 파악하기 위해 노력하고 있다. 하지만 실제 화학기상증착(Chemical Vapor Deposition)법과 원자층증착(Atomic Layer Deposition)법 공정에서 웨이퍼 표면에서의 화학증착소재의 흡착거동에 대한 연구는 거의 전무한 실정이다. 따라서 본 연구에서는 개선된 Attenuated Total Reflectance(ATR)분광계를 이용하여 표면에 흡착된 소재의 흡착거동에 대해 분석을 수행하였다. 평가에 사용된 화학증착소재는 C-Zr (Tris (dimethylamino) cyclopentadienyl zirconium)이며, Fourier Transform Infrared Spectroscopy (FT- IR)시스템 내에 설치된 ATR 분광계 표면에 흡착된 C-Zr 증착소재를 다양한 공정조건(온도 및 반응가스, 플라즈마 파워 등)에서의 거동 변화를 연구하였다.

• Proceedings of the Korean Fiber Society Conference
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• 2003.04a
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• pp.339-340
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• 2003

섬유 고분자 물질의 물리적 성질은 물질의 화학적 구조뿐만 아니라 분자의 배향과 결정화도와 같은 내부 구조에 의해 크게 영향을 받는다. 적외선 분광법은 특정 segment의 배향과 conformation, 결정화도와 같은 내부 구조의 변화를 선택적으로 관찰할 수 있는 장점으로 인하여 섬유 고분자 물질의 연구에 널리 사용되고 있다. 특히 적외선 분광법의 한 방법인 ATR (Attenuated Total Reflection) 방법은 투과에 의한 방법으로는 관찰이 불가능한 fiber, fabric, coating, thick film과 같은 형태의 시료를 관찰 할 수 있는 특성이 있으며 무엇보다 가장 큰 장점은 시료의 Machine Direction (MD), Transverse Direction(TD), Normal Direction (ND)의 세 방향으로 필름의 3차원적 배향 분석이 가능하다는 점이다.$^{1)}$ (중략)

• Composites Research
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• v.24 no.1
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• pp.31-36
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• 2011

Adhesive shear strengths of the established adhesives and the alternative adhesives were evaluated and their chemical structures were analyzed in order to investigate the possibility of replacing the established adhesives with the alternative adhesives applicable to the seeker for the guided missiles. Two types of the adhesives such as the structural adhesives and the sealant adhesives were considered. Those adhesives were exposed to the combined environmental factors consisting of temperature, moisture and ultraviolet over 1000 hours. Adhesive shear test was conducted to evaluate adhesive shear strengths and ATR FT-IR was utilized to investigate chemical structures. According to the results, the adhesive shear strengths of the alternative adhesives revealed higher than those of the established adhesives. Also the alternative adhesives were more stable to the combined environmental condition than the established adhesives. Therefore, it is found that the established adhesives were able to be replaced by the alternative adhesives.

• 보존과학연구
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• s.35
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• pp.87-98
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• 2014

Fourier transform infrared spectroscopy(FTIR-ATR) was applied to chemical analysis for conservation status of 10 human bone remains from Joseon Dynasty. The result of crystallinity index (CI) is $4.25{\pm}0.78$, carbonate to carbonate ratio (C/C) is $0.91{\pm}0.04$ and cabonate content (C/P) is $0.19{\pm}0.06$. The higher histological index (HI) confirmed CI and C/P value was increased and C/C value was reduced. While C/C or C/P values analysis is possible. While DNA analysis can be extracted from the bone, C/C values are lower or C/P values are higher was found to the analysis is possible. Chemical assessment of FTIR and histological index consequence is expected to be applicable as a basis for comprehensive understanding of the conservation status excavated bones.

• Journal of Korean Society of Environmental Engineers
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• v.39 no.7
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• pp.426-439
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• 2017

This review summarizes advantage and limitation in infrared spectroscopy and computational chemistry to understand rhizospheric interaction among organic acids, oxyanions and metal oxides. Since organic acids and metal oxides determine dynamics of oxyanions in the soil environment, knowledge of fundamental mechanisms is a prerequisite for understanding the interactions at soil-water interface. Attenuated total reflectance-fourier transform infrared spectroscopy (ATR-FTIR) is a powerful tool to measure the interfacial reactions. However, the ATR-FTIR measurements are abstruse, because the optical characteristics for measurements are variable depending on the experimental setup. In addition, spectral overlapping is a primary obstacle to the analysis of the interfacial reaction; thus, it is essential to detect and to deconvolute bands for signal interpretation. In this review, we expained the fundamental principle for spectrum processing, and four band identification methods, such as derivative spectroscopy, two-dimension correlation spectroscopy, multivariate curve resolution, and computational chemistry with example of aqueous phosphate speciation. As a result, spectrum processing and computational chemistry improved interpretation and spectral deconvolution of overlapped spectra in relatively simple systems, but it was still unsatisfactory for the problems in more complexed system like nature. Nevertheless, we believed that our challenge would contribute practically to develop adequate analytical procedure, signal processing and protocols that could help to improve interpretation and to understand the interfacial interactions of oxyanions in natural systems.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.100.2-100.2
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• 2015

반도체 산업이 성장하고 기술이 향상됨에 따라 소자의 소형화가 이루어지고 있다. 공정법으로는 atomic layer deposition (ALD), chemical vapor deposition (CVD) 등이 있다. 이러한 공정을 이용하여 수십 nm까지 미세화가 진행되고 있으며, 복잡한 구조의 박막을 실현하기 위해 전구체의 개발이 활발히 진행되고 있다. 전구체의 특성을 비실시간으로 분석하는 방법으로는 질량 분석법, 가스크로마토그래피, 적외선 분광법 등이 있다. 전구체의 특성을 실시간으로 분석하기 위해 Fourier transform infrared spectroscopy (FTIR)내에 attenuated total reflectance (ATR)를 거치시켰다. 본 연구는 구조를 개선한 ATR-FTIR을 이용하여 Tris-(dimethylamino) Zirconium (CpZr) 전구체의 흡착 거동을 분석하였다. ATR용 crystal은 Ge crystal을 사용했으며, 온도를 각각 30, 40, $50^{\circ}C$에서 CpZr 전구체의 흡착특성을 연구했다. 흡착성을 증가시키기 위해 Ge crystal 표면에 $ZrO_2$나노입자를 분포시켜 흡착특성을 비교 분석하였다. 또한 CpZr 전구체가 흡착된 Ge crystal 표면에 오존가스를 주입시킨 후 변화를 관찰하였다. Ge crystal표면에 나노입자를 분포시켜 CpZr 전구체를 흡착한 결과 나노입자를 분포시키지 않았을 때 보다 흡착강도가 높게 나타났다. 또한 CpZr 전구체가 흡착된 Ge crystal 표면에 오존가스를 주입한 결과 C-H 결합이 분해됨을 확인했다.

• Analytical Science and Technology
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• v.22 no.6
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• pp.464-470
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• 2009

For the investigation of the oxidation behavior for titanium metal at various temperatures, titanium specimens were heated for 2 hours in the range of $300{\sim}1000^{\circ}C$, individually. And then X-ray diffraction(XRD), scanning electron microscopy (SEM)/energy dispersive spectroscopy (EDS) and attenuated total reflection-Fourier transform infrared (ATR-FTIR) spectroscopic analyses were carried out. At $300^{\circ}C$, infrared absorption bands on the surface of the titanium specimen were shown in a spectrum by the oxygen uptake of titanium metal(hexagonal). At increased temperature, not only infrared absorption bands but also X-ray diffraction peaks for the titanium oxide were grown and shifted to low wave number ($cm^{-1}$) and angle($^{\circ}$) due to the more oxygen diffusion into titanium metal. At $700^{\circ}C$, $Ti_3O$ (hexagonal phase) was identified by X-ray diffractometer. $TiO_2$ (rutile, tetragonal phase) layer was produced on the surface of the specimen below $1{\mu}m$ in thickness at $600^{\circ}C$, and grown about $2{\mu}m$ at $700^{\circ}C$ and with $110{\mu}m$ in thickness at $1000^{\circ}C$. Above $900^{\circ}C$, (110) plane of the crystal on the surface of rutile-$TiO_2$ layer was grown.

• Elastomers and Composites
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• v.47 no.3
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• pp.210-215
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• 2012

Whitening phenomena of the EPDM composites with different inorganic filler compositions which were aged at $90^{\circ}C$ for 7 days in air and tap water atmospheres, respectively, were investigated. The aged samples in tap water containing stearic acid exhibited severe whitening phenomena, while all the samples aged in air did not show any whitening. Depending on the filler compositions, there was no big difference in the whitening phenomena. The whitening materials were analyzed using gas chromatography/mass spectrometry (GC/MS), image analysis, energy-dispersive X-ray spectroscopy (EDX), and attenuated total reflectance-Fourier transform infrared spectroscopy (ATR-FTIR). The whitening materials were identified to be salts of stearic acid. The salts of stearic acid were formed by reaction of metal cation in tap water and stearic acid in the sample.

• Journal of Conservation Science
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• v.31 no.3
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• pp.193-214
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• 2015

The green pigments of shamanic paintings (83 items) in the 19~20th century were analyzed with X-ray fluorescent spectrometer(XRF), scanning electron microscopy (SEM) and fourier transform infrared spectroscopy (ATR-FTIR). In 60 items, copper and arsenic were detected in green pigments of the paintings by XRF spectra. Cu $K{\alpha}$/As $K{\beta}$ (peak intensity ratio of copper and arsenic) of shamanic paintings of Bokgaedang (shrine), solemn paintings (romance of three kingdoms) of Donggwanwangmyo and unknown enshrined place were 5.93~12.04 and higher compared to 5.67-6.26 of standard emerald greens and 4.01~7.89 of remaining shamanic paintings. The SEM images of crystal forms of copper-arsenic green pigments were various. Crystal forms were divided into oval and round spherulite with intersecting plate crystals and spherulite with agglomerate plate crystals. The crystals of the latter were found in shamanic paintings of Bokgaedang (shrine), solemn paintings (romance of three kingdoms) of Donggwanwangmyo and unknown enshrined place and the former were found in the rest of shamanic paintings. Copper-arsenic green pigments of shamanic paintings were identified as Scheele's green from shamanic paintings of Bokgaedang (shrine) and romance of three kingdoms. Emerald green from the rest of shamanic paintings by ATR-FTIR. From analytical results, it is confirmed that Scheele's green of shamanic paintings of Bokgaedang and romance of three kingdoms was used in the 1850s~1870s and emerald green had been widely used from late 19th century to 1970 in the rest of shamanic paintings.

• Polymer(Korea)
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• v.27 no.6
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• pp.542-548
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• 2003

Nanoparticles with unsaturated poly(hydroxyalkanoate)s (UPHAs) biosynthesized with Pseudo-monas oleovorans were prepared by spontaneous emulsification solvent diffusion method. The influence of nanoparticle formation was investigated with various experimental parameters such as sonication conditions, sol-vent, surfactant and polymer contents, etc. The physical and chemical properties of UPHAS and its nanoparticles were characterized using $^1$H- and $\^$13/C-nuclear magnetic resonance spectroscopies, attenuated total reflection infrared spectroscopy, differential scanning calorimetry and gel permeation chromatography. The morphology of particles was observed using scanning electron microscope and the size and distribution of nanoparticles were measured with electrophoretic light scattering spectrophotometer. The mean diameter of particles decreased with increasing sonication amplitude and time. The addition of ethanol into UPHAS chloroform solution decreased the particle size presumably due to increased solvent diffusion into water phase. The particle size increased with increased the concentration of UPHAS solution. Under the 2-4％ poly(vinyl alcohol) (PVA) aqueous solution the minimum mean diameter of particles was shown. The higher degree of hydrolysis and degree of polymerization of PVA increased the mean diameter of particles.