• Tribology and Lubricants
• /
• v.18 no.1
• /
• pp.1-8
• /
• 2002

Nano adhesion and friction between a $Si_{3}N_{4}$ AFM(atomic force microscope) tip and thin silver films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM and LFM(lateral force microscope) modes in various range of normal loads. Thin silver films deposited by IBAD (ion beam assisted deposition) on Si-wafer (100) and other Si-wafers of different surface roughness were used. Results showed that nano adhesion and friction decreased with the surface roughness. When the Si surfaces were coated by pure silver, the adhesion and friction decreased. But the adhesion and friction were not affected by the thickness of IBAD silver coating. As the normal force increased, the adhesion forces of bare Si-wafer and IBAD silver coating film remained constant, but the friction forces increased linearly. Test results suggested that the friction was mainly governed by the adhesion as long as the load was low.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.653-656
• /
• 2005

This paper introduces design, fabrication and experiment process of a novel scanner for the high speed AFM(Atomic Force Microscope). A proper design modification is proposed through analyses on the dynamic characteristics of the existing linear motion stages using a dynamic analysis program, Recurdyn. Since the scanning speed of each direction is allowed to be different, the linear motion stage for the high-speed scanner of AFM can be so designed to have different resonance frequencies for the modes with one dominant displacement in the desired directions. One way to achieve this objective is to use one-direction flexure mechanism for each direction and to mount one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separates the frequencies of the two vibration modes with one dominant displacement in each desired direction, hence, the coupling between the motions in the two directions. In addition, a pair of actuators is used for each axis to decrease the cross talks in the two motions and gives a force large enough to actuate the slow motion stage, which carries the fast motion stage. After these design modifications, a novel scanner with scanning speed higher than 10 Hz can be achieved to realize undistorted images in the high speed AFM.

• Journal of Surface Science and Engineering
• /
• v.31 no.5
• /
• pp.261-265
• /
• 1998

We investigated compositional separation of Co-23%Cr magnetic alloy thin films with varying film thicknesses. Saturation magnetization and magnetic microstructures were investigated using vibrating sample magnetometer (VSM) and scanning probe microscope (SPM), respectively. Saturation magnetization was as 700 emu/cc for films below 50 nm-thick, and changed to 430 emu/cc for the ones above 2000 nm-thick. This may be due to increment of molar volume of Cr-enriched phase as film thickness increases. The surface grain size in AFM (atomic force microscope) measurement becomes larger as film thickness increases. The MFM (magnetic force microscope) reveals that magnetic microstructure is changed from the fine spherical domains to the maze type domains as film thickness increases. We conclude that employing thickness of Co-22%Cr films below 50 nm is favorable for high density recording in order to enhance perpendicular saturation magnetization and SNR (signal to noise ratio).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.113-113
• /
• 2012

차세대 소재로 많은 관심을 받고 있는 graphene에서는 탄소원자가 육각형 구조를 가지고 2차원으로 배열되어 있으며, 이로 인해 높은 전하 이동도와 같은 독특한 전하의 전도 특성이 나타날 것으로 예측된다. graphene에서의 독특한 전도 특성을 활용한 고속/저전력 전자 소자가 구현되기 위해서는 이론에서 예측된 독특한 전하 특성이 실험적으로 구현되어야 하며, 상온의 열에너지보다 큰 밴드갭이 형성되어야 한다. 본 발표에서는 먼저 atomic force microscope (AFM)을 이용하여 graphene의 전도 특성을 저해할 것으로 예측되는 구역 구조를 관찰한 연구 결과를 발표하고 구역 구조가 발생할 수 있는 원인에 대해 고찰하고자 한다. 또한, graphene을 활용해서 충분히 큰 밴드갭을 가지는 나노 크기의 물질을 간편하게 형성하기 위해 AFM lithography를 적용한 연구 결과를 발표하고 기존의 화학적 방법으로 제조된 graphene 관련 물질들과 기본 물성을 비교하고자 한다.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.15 no.4
• /
• pp.15-21
• /
• 2006

Recently, atomic force microscope(AFM) with suitable tips is being used for nano fabrication/nanometric machining purposes. In this paper, acoustic emission(AE) was introduced to monitor the nanometric machining of brittle materials(silicon) using AFM. In the experiments, AE responses were sampled, as the tip load was linearly increased(ramped load), to investigate the machining characteristics during a continuous movement. By analyzing the experimental results, it can be concluded that measured AE energy is sensitive to changes in the mechanism of material removal including the ductile-brittle transition during the nanometric machining. The critical depth of cut value for the transition is evaluated and discussed.

• Proceedings of the KSME Conference
• /
• 2000.04a
• /
• pp.153-158
• /
• 2000

Atomic Force Microscope (AFM) was used to study cross sectional profiles and dimensions of fatigue striations in 2017-T351 aluminum alloy. Their widths (SW) and heights $(SH,\;SH_h)$ were measured from the cross sectional Profiles of three-dimension AFM images. The following results that will be helpful to understand the fatigue crack growth mechanism were obtained. (1) Coincidence of the crack growth rate with the striation width was found down to the growth rate of $10^{-5}$ mm/cycle. (2) The relation of $SH={\alpha}(SW)^{1.2}$ was obtained. (3) The ratio of the striation height to its width SH/SW and did not depend on the stress intensity factor range ${\Delta}K$ and the stress ratio R. From these results, the applicability of the AFM to nano-fractography is discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1996.11a
• /
• pp.167-171
• /
• 1996

Chemical mechanical polishing (CMP) has become widely accepted for the planarization of multi-interconnect structures in semiconductor manufacturing. However, perfect planarization is not so easily achieved because it depends on the pattern sensitivity, the large number of controllable process parameters, and the absence of a reliable process model, etc. In this paper, we realized the planarization of deposited oxide layers followed by metal (W) polishing as a replacement for tungsten etchback process for via formation. Atomic force microscope (AFM) is used for the evaluation of pattern topography during CMP. As a result, AFM evaluation is very attractive compared to conventional methods for the measurement of planarity. Moreover, it will contribute to analyze planarization characteristics and establish CMP model.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.20 no.12
• /
• pp.1062-1067
• /
• 2007

In this paper, we have investigated thermal properties of semiconductive shield materials for power cables. EEA (Ethylene Ethyl Acrylate) was used for base polymer and TGA (Thermal Gravimetric Analysis) and AFM (Atomic Force Microscope) were investigated with various carbon black and CNT (carbon nanotube) contents. When CNT reinforced composites and conventional composite were investigated with TGA, we knew that thermal properties of CNT reinforced composite were better than them of conventional composite. To investigate roughness, we used AFM. Before and after aging, AFM was applied and after aging, roughness was increased. As a result, suitable CNT and CB(carbon black) content is CNT:CB=50:50.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2004.11a
• /
• pp.125-128
• /
• 2004

AFM(Atomic Force Microscope) becomes a versatile tool in the nanoscale measurements and processes. Especially the tapping mode is a very useful mode in AFM operation to measure and process at the nanoscale. Although the tapping mode has a great potential for the novel techniques such as phase imaging, however, it is not clearly known the fundamental mechanics affected by complex tip-sample interactions. This paper shows the various nonlinear dynamic features in tapping mode AFM microcantilevers including hysteretic jumps and period doublings of the microcantilevers. Also it is discussed the complex dynamics of CNT(Carbon Nanotube) probes and the opportunities on the nanoscale nonlinear dynamics.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.10
• /
• pp.61-68
• /
• 2001

Turbine blade in nuclear plant is subject to cyclic bending fatigue by high steam pressure. Especially, fatigue fracture is caused by low stress below yielding stress. Photograph by SEM doesn't have striation but photograph by AFM has striation on the fatigue fractured surface of 12% Cr steel used in turbine blade. Surface roughness $R_q$ has the linear relation with respect to stress intensity factor range ΔK and is increased linearly according to load amplitude $\textit{\Delta}P$. In this study loading condition applied to turbine blade is predicted by the relation between the gradient of $R_q$ to $\textit{\Delta}K$ and load amplitude $\textit{\Delta}P$.