• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.87-91
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• 2024

SiO₂, renowned for its excellent insulating properties, has been used in the semiconductor industry as a valuable dielectric material. High-quality SiO₂ films find applications in gate spacers and interlayer insulation gap-fill oxides, among other uses. One of the prevalent methods for depositing these SiO₂ films is plasma enhanced chemical vapor deposition (PECVD) favored for its relatively low processing costs and ability to operate at low temperatures. However, compared to the increasingly utilized atomic layer deposition (ALD) method, PECVD exhibits inferior film characteristics such as uniformity. This study aims to produce SiO₂ films with uniformity as close as possible to those achieved by ALD through the adjustment of PECVD process parameters. we conducted a total of nine PECVD processes, varying the process time and gas flow rates, which were identified as the most influential factors on the PECVD process. Furthermore, ellipsometry analysis was employed to examine the uniformity variations of each process. The experimental results enabled us to elucidate the relationship between uniformity and deposition rate, as well as the impact of gas flow rate and deposition time on the process outcomes. Additionally, thickness measurements obtained through ellipsometer facilitate the identification of optimal process parameters for PECVD.

• 방사성폐기물학회지
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• 제15권1호
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• pp.83-90
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• 2017

사용후핵연료 파이로프로세싱에서는 방사성 희토류 염화물($RECl_3$)을 함유한 LiCl-KCl 공융염폐기물이 발생되며, 핫셀시설에서 운영을 목적으로 단순한 형태의 공융염폐기물 처리공정을 개발하는 것이 필요하다. 본 연구에서는, LiCl-KCl 공융염폐기물 내 희토류 핵종 분리/고화공정의 단순화를 목적으로 $Li_2O-Al_2O_3-SiO_2-B_2O_3$계의 무기합성매질을 이용하여 LiCl-KCl 공융염 내 희토류 핵종(Nd)을 분리한 후 분리생성물을 바로 고화하는 시험을 실시하였다. 공융염 내 희토류 염화물($NdCl_3$) 대비 0.67의 무게비에 해당하는 무기합성매질의 양으로도 Nd 핵종을 98wt% 이상 분리할 수 있었고, 이 때 얻은 희토류 핵종 포집생성물은 약 50wt% 수준의 희토류 산화물 함량을 보유하고 있었으며, 이 포집생성물을 화학적 내구성이 우수한 단일상의 균질한 유리고화체로 제조할 수 있었다. 이 결과들은 LiCl-KCl 공융염폐기물 내 희토류 핵종의 분리/고화공정을 단순화하기 위한 방안수립에 활용될 수 있을 것이다.

• Nuclear Engineering and Technology
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• 제46권1호
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• pp.117-124
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• 2014

The effect of various process variables on the powder properties of recycled $U_3O_8$ from MnO-$Al_2O_3$ doped large grain $UO_2$ pellets and the effect of those recycled $U_3O_8$ powders on the sintered density and grain size of MnO-$Al_2O_3$ doped large grain $UO_2$ pellets have been investigated. The evolution of morphology, size, and BET surface area of the recycled $U_3O_8$ powders according to the respective variation of the thermo-mechanical treatment variables of oxidation temperature, powder milling, and sequential cyclic heat treatment of oxidation and then reduction was examined. The correlation between the BET surface area of recycled $U_3O_8$ powder and the sintered pellet properties of MnO-$Al_2O_3$ doped pellets showed that the pellet density and grain size of doped pellets were increased and then saturated by increasing the BET surface area of the recycled $U_3O_8$ powder. The density and grain size of the pellets were maximized when the BET surface area of the recycled $U_3O_8$ powder was in the vicinity of $3m^2/g$. Among the process variables applied in this study, the cyclic heat treatment followed by low temperature oxidation was a potential process combination to obtain the sinter-active $U_3O_8$ powder.

• 한국물환경학회지
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• 제26권1호
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• pp.160-167
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• 2010

In this research, the performance evaluation between an alternating type process and a recirculating type process was investigated by using mathematical models. The Advanced Phase Isolation Ditch (APID) process and the $A^2/O$ process were selected the target processes of the alternating type and recirculating type, respectively. For more quantitative evaluation, 5 performance indexes which included economy and energy efficiency as well as effluent quality were used, and various disturbance conditions of influent were given to the process models. As simulation results, the APID process which had the specific operation modes to use the organic matter in influent effectively showed higher efficiency of denitrification than the $A^2/O$ process. In the case of effluent TSS, the $A^2/O$ process that the retention time in reactors could be maintained stably was more effective than the APID process. In the cases of various disturbance condition, although it was identified that both two processes had similar effluent quality, the sludge production of the $A^2/O$ process showed lower than that of the APID process while the APID process showed higher energy efficiency.

• KSBB Journal
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• 제23권6호
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• pp.541-545
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• 2008

This paper was studied to research regarding the removal of contained nitrogen in industrial wastewater which uses the A2O4 advanced water treatment process. The field researches of two companies' wastewater occurred in each wastewater treatment site to apply the A2O4 process system, it was observed them for 20 days. As a result of the A2O4 system advanced wastewater process which applied an altitude control process obtained $10{\sim}76\;mg/L$, and 20 mg/L total nitrogen compound concentration in the two wastewater plants. In conclusion, it applied the A2O4 system in the two companies' wastewater system.

• 한국입자에어로졸학회지
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• 제16권4호
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• pp.95-105
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• 2020

Vanadium Pentoxide (V2O5) has been emerged as alternative electrode materials for supercapacitors due to their low cost, natural abundance, and environmental friendliness. Graphene (GR) loaded with V2O5 can exhibit enhanced specific capacitance. In this study, we present three-dimensional (3D) crumpled graphene (CGR) decorated with V2O5. The V2O5-graphene composites were synthesized from a colloidal mixture of graphene oxide (GO) and Ammonium metavanadate (NH4VO3), via aerosol spray drying and post heat treatment process. The average size of composite was ranged from 1.82 to 4.6 ㎛. Morphology of the composite changed from a crumpled paper ball to spherical ball having relatively smooth surface as the content of V2O5 increased in the composites. The electrochemical performance of the V2O5-graphene composites was examined. The V2O5-graphene composite electrode showed the specific capacitance of 312 F/g. In addition, the device possessed acceptable cyclic stability, with 84% after 2000 cycles at 2 A/g. These outstanding properties are expected to make the composites prepared in this study as promising electrode materials for supercapacitor applications.

• 한국세라믹학회지
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• 제40권12호
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• pp.1189-1196
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• 2003

Sol-gel법으로 강유전성 B $i_{3.25}$L $a_{0.75}$ $Ti_3$ $O_{12}$ (BLT) stock solution을 합성하고 Pt/Ti $O_2$/ $SiO_2$/Si 기판위에 스핀코팅법으로 BLT 박막을 증착하였다. 본 실험에서는 Bi(TMHD)$_3$, La(III)2-Methoxyethoxide, Ti(IV)i-propoxide를 출발물질로 사용하였으며 2-Methoxyethanol을 용매로 사용하였다. 급속열처리(RTA)가 BLT 박막의 결정성장을 촉진시키기 위해 사용되었고, RTA를 실시한 시편과 RTA를 실시하지 않은 시편의 전기적 특성을 비교하였다. RTA를 실시한 후 72$0^{\circ}C$에서 로 열처리 한 BLT 박막의 경우 5V 인가 전압 하에서 2Pr 값은 RTA를 실시하지 않은 경우보다 27% 증가한 20.46$\mu$C/$ extrm{cm}^2$이었다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.49-50
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• 2006

[ $Ti(Al,\;O)-Al_2O_3$ ] composite powders were produced by high energy mechanical milling of a mixture of Al and $TiO_2$ powders followed by a combustion reaction. The powders were subsequently thermally sprayed on H13 steel substrates. Microstructural examination was conducted on the composite powders and thermally sprayed coatings, using X-ray diffractometry (XRD) and scanning electron microscopy (SEM). The performance of the coatings was evaluated in terms of micro-hardness and thermal fatigue. The thermally sprayed coatings performed very well in the preliminary thermal fatigue tests and showed no wetting tendency to molten aluminum.

• 한국세라믹학회지
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• 제50권6호
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• pp.402-409
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• 2013

The objective of this study was to develop a synthesis process for ${\beta}$-SiC powders to reduce the synthesis temperature and to control the particle size and to prevent particle agglomeration of the synthesized ${\beta}$-SiC powders. A phenol resin and TEOS were used as the starting materials for the carbon and Si sources, respectively. $SiO_2$-C hybrid precursors with various C/Si mole ratios were fabricated using a conventional sol-gel process. ${\beta}$-SiC powders were synthesized by a carbothermal reduction process using $SiO_2$-C hybrid precursors with various C/Si mole ratios (1.6 ~ 2.5) fabricated using a sol-gel process. In this study, the effects of excess carbon and the addition of Si powders to the $SiO_2$-C hybrid precursor on the synthesis temperature and particle size of ${\beta}$-SiC were examined. It was found that the addition of metallic Si powders to the $SiO_2$/C hybrid precursor with excess carbon reduced the synthesis temperature of the ${\beta}$-SiC powders to as low as $1300^{\circ}C$. The synthesis temperature for ${\beta}$-SiC appeared to be reduced with an increase of the C/Si mole ratio in the $SiO_2$-C hybrid precursor by a direct carburization reaction between Si and excess carbon.

• ETRI Journal
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• 제26권4호
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• pp.315-320
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• 2004

This paper proposes a 10-${\mu}m$ thick oxide layer structure that can be used as a substrate for RF circuits. The structure has been fabricated using an anodic reaction and complex oxidation, which is a combined process of low-temperature thermal oxidation (500 $^{\circ}C$ for 1 hr at $H_2O/O_2$) and a rapid thermal oxidation (RTO) process (1050 ${\circ}C$, for 1 min). The electrical characteristics of the oxidized porous silicon layer (OPSL) were almost the same as those of standard thermal silicon dioxide. The leakage current density through the OPSL of 10 ${\mu}m$ was about 10 to 50 $nA/cm^2$ in the range of 0 to 50 V. The average value of the breakdown field was about 3.9 MV/cm. From the X-ray photo-electron spectroscopy (XPS) analysis, surface and internal oxide films of OPSL prepared by a complex process were confirmed to be completely oxidized. The role of the RTO process was also important for the densification of the porous silicon layer (PSL) oxidized at a lower temperature. The measured working frequency of the coplanar waveguide (CPW) type short stub on an OPSL prepared by the complex oxidation process was 27.5 GHz, and the return loss was 4.2 dB, similar to that of the CPW-type short stub on an OPSL prepared at a temperature of 1050 $^{\circ}C$ (1 hr at $H_2O/O_2$). Also, the measured working frequency of the CPW-type open stub on an OPSL prepared by the complex oxidation process was 30.5 GHz, and the return was 15 dB at midband, similar to that of the CPW-type open stub on an OPSL prepared at a temperature of $1050^{\circ}C$ (1 hr at $H_2O/O_2$).