• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.284-284
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• 2013

중 에너지 이온 산란 분석법(Medium Energy Ion Scattering Spectrometer, MEIS)은 50~500 keV로 이온을 가속 후 시료에 입사시켜 시료의 원자와 핵간 충돌로 산란되는 일차이온의 에너지를 측정하여 시료를 분석하는 기법으로, 원자층의 깊이 분해능으로 초박막의 표면 계면의 조성과 구조를 분석 할수 있는 유용한 미세 분석기술이다. 본 실험에서 에너지 70~100 keV의 He+ 이온을 사용하여 Pulse Width 1 ns의 Pulsed ion beam을 만들어 Start 신호로 사용하고 Delay-line-detector에 검출된 신호를 End 신호를 이용한 TOF-MEIS System을 개발하였다. 활용 가능한 분석시편으로 Ultra thin film 시편으로 1, 1.5, 2, 2.5, 3, 4 nm의 HfO2, 1.8, 4nm의 SiO2 시편을 분석 하였으며 Ultra Shallow Junction 시편으로 As Doped Si, Cs Doped Si 시편 및 Composition, Core/shell 구조의 Q-dot 시편으로 CdSe, CdSe/ZnS등 다양한 분석 실험을 진행 하였다. Composition, Core/shell 구조의 Q-dot 시편은 Diamond Like Carbon(DLC)의 Substrate에 Mono-layer로 형성하여 분석하였다.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Current Optics and Photonics
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• v.3 no.5
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• pp.445-450
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• 2019

The influence of high-power laser diode (HPLD) emitter width on the device performance is investigated for 975-nm (In,Ga)(As,P)/(Al,Ga)As broad-area HPLDs, using self-consistent electro-thermal-optical simulation. To guarantee the simulation's accuracy, simulated results are matched with the measured results for a sample HPLD with fitting parameters. The influences of HPLD emitter width on temperature distribution, output power, and the beam product parameter (BPP) are analyzed for three different emitter widths of 50, 70, and $90{\mu}m$. It is found that a device with smaller emitter width exhibits both thermal rollover and thermal blooming at lower output power, but smaller BPP.

• Current Optics and Photonics
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• v.6 no.4
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• pp.375-380
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• 2022

We demonstrate two types of light field displays based on waveguide grating coupler arrays: a line beam type and a point source type. Ultra violet imprinting of an array of diffractive nanograting cells on the top surface of a 50-㎛-thin slab waveguide can deliver a line beam or a point beam to a multidirectional light field out of the waveguide slab. By controlling the grating vectors of the nanograting cells, the waveguide modes are externally coupled to specific viewing angles to create a multidirectional light field display. Nanograting cells with periods of 300 nm-518 nm and slanted angles of -8.5°~+8.5° are fabricated by two-beam interference lithography on a 40 mm × 40 mm slab waveguide for seven different viewpoints. It is expected that it will be possible to realize a very thin and flexible panel that shows multidirectional light field images through the waveguide-type diffraction display.

• Korean Journal of Materials Research
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• v.32 no.8
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• pp.333-338
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• 2022

In this work, we developed silver nanowires and a silicon based Schottky junction and demonstrated ultrafast broadband photosensing behavior. The current device had a response speed that was ultrafast, with a rising time of 36 ㎲ and a falling time of 382 ㎲, and it had a high level of repeatability across a broad spectrum of wavelengths (λ = 365 to 940 nm). Furthermore, it exhibited excellent responsivity of 60 mA/W and a significant detectivity of 3.5 × 10¹² Jones at a λ = 940 nm with an intensity of 0.2 mW cm^-2 under zero bias operating voltage, which reflects a boost of 50 %, by using the AC PV effect. This excellent broadband performance was caused by the photon-induced alternative photocurrent effect, which changed the way the optoelectronics work. This innovative approach will open a second door to the potential design of a broadband ultrafast device for use in cutting-edge optoelectronics.

• Applied Microscopy
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• v.50
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• pp.26.1-26.3
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• 2020

The biocompatible polyurethane acrylate (PUA) nanopillars were fabricated by soft lithography using three different sizes of nanobeads (350, 500, and 1000 nm), and the human adipose-derived stem cells (hASCs) were cultured on the nanopillars. The hASCs and their various behaviors, such as cytoplasmic projections, migration, and morphology, were observed by high resolution images using a scanning electron microscope (SEM). With the accurate analysis by SEM for the controlled sizes of nanopillars, the deflections are observed at pillars fabricated with 350- and 500- nm nanobeads. These high-resolution images could offer crucial information to elucidate the complicated correlations between nanopillars and the cells, such as morphology and cytoplasmic projections.

• Proceedings of the IEEK Conference
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• 2008.06a
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• pp.485-486
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• 2008

The network structure of $SnO_2$ nanowires was fabricated on the electrodes by a simple thermal evaporation process from Sn metal powders and oxygen gas. The diameter of the nanowires was $20\;{\sim}\;60\;nm$ depending on the processing conditions. The operating temperature of the sensor could be decreased down below $50^{\circ}C$ by controlling the properties of the nanowires and the structures of the electrodes. The sensitivities were $10\;{\sim}\;15$ when the $NO_2$ concentrations were $10\;{\sim}\;50\;ppm$ at the operating temperature of $50^{\circ}C$.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.792-796
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• 2003

In this paper, to detect external sound frequency on the latticed structure, fiber optic sensor net using Sagnac interferometer was fabricated and tested. The latticed structure fabricated with dimension of 50cm in width and 50cm in height, the optical fiber, 50m in length, distributed and fixed on the latticed structure. Single mode fiber, a laser with 1,550nm in wavelength, 2${\times}$2 coupler were used. External sound signal applied to the fiber optic sensor net and the detected optical signals were compared and analyzed to the detected microphone signals against time and frequency domain. Based on the experimental results, fiber optic sensor net using Sagnac interferometer detected external sound frequency, effectively. This system can be expanded to the structural health monitoring system.

• Korean Journal of Materials Research
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• v.7 no.5
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• pp.381-385
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• 1997

PEMOCVD에 의해서 SrBi$_{2}$Ta$_{2}$O$_{9}$밥막이 낮은 온도에서 성공적으로 Pt/Ti/SiO$_{2}$Si위에 증착되었다. 5$50^{\circ}C$에서 증착된 200nm박막은 치밀하고 작은 결정립을 보였으며 3V의 인가전압하에서 이력곡선은 포화되기 시작하였다. 3V에서 박막은 잔류분극 (P$_{r}$)과 항전계(E$_{c}$)는 각각 15$\mu$/$\textrm{cm}^2$과 50kV/cm이었다. 6V bipolar square pulse의 피로측정에서 박막은 1.0x$10^{11}$cycles까지 피로 현상을 보이지 않았다. PEMOCVD에 의해서 5$50^{\circ}C$에서 증착된 SBT박막은 비휘발성 기억소자에 충분히 활용할 수 있다.다.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.7
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• pp.569-576
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• 2004

In this paper, to detect external sound frequencies on the latticed structure, fiber optic sensor net using Sagnac interferometer was fabricated and tested. The latticed structure was fabricated with a dimension of 50 cm in width and 50 cm in height. The optical fiber of 50m in length was distributed and fixed on the surface of the latticed structure. Single mode fiber, a laser with 1,550 nm in wavelength, 2 ${\times}$ 2 coupler were used. External sound signal, 240 Hz, 495 Hz, 1.445 kHz, 2k Hz, applied to the fiber optic sensor net and the detected optical signals were compared to the detected microphone signals against time and frequency domains. Based on the experimental results, fiber optic sensor net using Sagnac interferometer detected external sound frequency, effectively. This system can be expanded to the structural health monitoring system.