• Title/Summary/Keyword: 5 다층박막

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발광층에 Dotted-Line Doping Structure(DLDS)를 적용한 Red-Oranic Light-Emitting Diodes(OLEDs)의 발광특성

  • Lee, Chang-Min;Han, Jeong-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.177-180
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    • 2004
  • 발광층에 Alq3와 rubrene을 mixed host로 사용하고 DCJTB를 형광 dopant로 사용한 다층 박막 구조의 red OLEDs를 제작하였다. 소자의 구조는 $ITO:Anode(120nm)/{\alpha}-NPD:HTL(40nm)/Alq_3+Rubrene(mixed\;host\;1:1)+DCJTB(red\;dopant\;3%)+:EML(20nm)/Alq_3:ETL(40nm)/MgAg(Mg\;5%\;wt):Cathode(150nm)$ 로서 EML내부에 DCJTB를 Totally Doping Method와 Dotted-Line Doping Method의 두 가지 방법으로 도핑 하였다. Mixed host구조에 DCJTB를 6구간으로 나누어 Dotted Line Doping한 소자는 luminance yield가 $9.2cd/A@10mA/cm^2$ 이었다. 이 소자는 DCJTB만을 Totally Doping한 소자의 luminance yield $3.2cd/A@10mA/cm^2$에 비해 약 190%정도의 높은 효율 향상을 보였다. 또한 $10mA/cm^2$에 도달하는 전압은 5.5V Vs. 8.5V로서 mixed host를 사용한 소자에서 약 3V정도 구동전압이 낮아지는 효과가 있었다. 발광 스펙트럼의 Full Width Half Maximum(FWHM)은 각각 56.6nm와 61nm로서 rubrene을 mixed host로 사용한 소자에서 높은 색 순도를 얻을 수 있었다. 이러한 성능의 향상은 $Alq_3$와 혼합된 rubrene에 의한 낮은 전하주 입장벽, 높은 전류밀도에서 나타나는 발광감쇄현상의 감소, 그리고 발광층의 DLD구조에 의한 전하의 trap & confinement 에 따른 발광 exciton의 형성확률이 증가한데서 나타났다고 생각된다.

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Effect of gas composition on the characteristics of a-C:F thin films for use as low dielectric constant ILD (가스 조성이 저유전상수 a-C:F 층간절연막의 특성에 미치는 영향)

  • 박정원;양성훈;이석형;손세일;오경희;박종완
    • Journal of the Korean Vacuum Society
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    • v.7 no.4
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    • pp.368-373
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    • 1998
  • As device dimensions approach submicrometer size in ULSI, the demand for interlayer dielectric materials with very low dielectric constant is increased to solve problems of RC delay caused by increase in parasitic resistance and capacitance in multilevel interconnectins. Fluorinated amorphous carbon in one of the promising materials in ULSI for the interlayer dielectric films with low dielectric constant. However, poor thermal stability and adhesion with Si substrates have inhibited its use. Recently, amorphous hydrogenated carbon (a-C:H) film as a buffer layer between the Si substrate and a-C:F has been introduced because it improves the adhesion with Si substrate. In this study, therfore, a-C:F/a-C:H films were deposited on p-type Si(100) by ECRCVD from $C_2F_6, CH_4$and $H_2$gas source and investigated the effect of forward power and composition on the thickness, chemical bonding state, dielectric constant, surface morphology and roughness of a-C:F films as an interlayer dielectric for ULSI. SEM, FT-IR, XPS, C-V meter and AFM were used for determination of each properties. The dielectric constant in the a-C:F/a-C:H films were found to decrease with increasing fluorine content. However, the dielectric constant increased after furnace annealing in $N_2$atomosphere at $400^{\circ}C$ for 1hour due to decreasing of flurorine content. However, the dielectric constant increased after furnace annealing in $N_2$atmosphere at $400^{\circ}C$ for 1hour due to decreasing of fluorine concentration.

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Design and Characteristics of Anti-reflection Coating using Multi-layer Thin Film on the Ferrule Facet (다층 박막을 이용한 패럴 단면의 무반사 코팅 설계 및 특성)

  • Ki, Hyun-Chul;Yang, Mung-Hark;Kim, Seon-Hoon;Kim, Tea-Un;Kim, Hwe-Jong;Gu, Hal-Bon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.11
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    • pp.991-994
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    • 2007
  • In this paper, we have designed the anti-reflection(AR) coating for $1400{\sim}1600$ nm wavelength range on the ferrule facet of optical connector. The low-temperature ion-assisted deposition was applied to AR coating on the ferrule facet in order to avoid damage of optical connector. We have measured the refractive index of coating film($Ta_2O_5\;and\;SiO_2$) using the ellipsometer and optimized the film thickness using the SEM and thickness measurement equipment. UV-VIS-NIR spectrophotometer is used to measure transmissivity of the AR coated ferrule facet. The refractive index of $Ta_2O_5\;and\;SiO_2$ is $2.123{\sim}2.125$ and $1.44{\sim}1.442$, respectively, for $1400{\sim}1600$ nm wavelength range. The transmissivity of the AR coated ferule facet is more than 99.8 % for $1425{\sim}1575$ nm wavelength range and more than 99.5 % for $1400{\sim}1600$ nm wavelength range. The return loss of the AR coated ferrule facet is 30.1 dB.

Thermal Analysis of a Cold Box for a Hydrogen Liquefaction Pilot Plant with 0.5 TPD Capacity (0.5 TPD 급 수소액화 파일럿 플랜트의 콜드박스 열해석)

  • KIM, HYOBONG;HONG, YONG-JU;YEOM, HANKIL;PARK, JIHO;KO, JUNSEOK;PARK, SEONG-JE;IN, SEHWAN
    • Transactions of the Korean hydrogen and new energy society
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    • v.31 no.6
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    • pp.571-577
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    • 2020
  • Thermal analysis was performed for a cold box of a hydrogen liquefaction pilot plant with 0.5 ton/day capacity. The pilot plant has adopted a hydrogen liquefaction process using two-stage helium Brayton cycle with precooling of liquid nitrogen. The cold box for hydrogen liquefaction has generally vacuum insulation but inevitable heat invasion by conduction and radiation exists. The heat loads were calculated for cold box internals according to multilayer insulation emissivity. Total heat load of 181.7 W is estimated for emissivity of 0.03 considered in field condition.

Electromechanical Properties of Conductive MWCNT Film Deposited on Flexible Substrate Affected by Concentration of Dispersing Agent (분산제 농도에 따른 MWCNT 전도성 유연필름의 전기-기계적 특성)

  • HwangBo, Yun;Kang, Yong-Pil;Kim, Jae-Hyun;Kim, Duck-Jong;Lee, Hak-Joo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.5
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    • pp.517-521
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    • 2012
  • Carbon nanotubes (CNTs) have been regarded as a promising material for the fabrication of flexible conductors such as transparent electrodes, flexible heaters, and transparent speakers. In this study, a multiwalled carbon nanotube (MWCNT) film was deposited on a polyethylene terephthalate (PET) substrate using a spraying technique. MWCNTs were dispersed in water using sodium dodecyl sulfate (SDS). To evaluate the effect of the weight ratio between SDS and MWCNTs on the electromechanical properties of the film, direct tensile tests and optical strain measurement were conducted. It was found that the CNT film hardly affected the mechanical behavior of CNT/PET composite films, while the electrical behavior of the CNT film was strongly affected by the SDS concentration in the CNT film. The electrical resistance of CNT/PET films gradually increased with the strain applied to the PET substrate, even up to a large strain that ruptured the substrate.

Effect of Annealing Temperature on the Operation of Phase-Change Memory (상변화 메모리 소자 동작 특성에 미치는 열처리 온도 효과)

  • Lee, Seung-Yun;Park, Young-Sam
    • Journal of the Korean Vacuum Society
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    • v.19 no.2
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    • pp.155-160
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    • 2010
  • The effect of process temperature of a final annealing step in the fabrication of phase change memory (PCM) devices was investigated. Discrete PCM devices employing $Ge_2Sb_2Te_5$ (GST) films as an active element were made in a pore-style configuration, and they were annealed at various temperatures ranging from 160 to $300^{\circ}C$. The behaviors of cell resistance change from SET resistance to RESET resistance were totally different according to the annealing temperatures. There was a critical annealing temperature for the fabrication of normal PCM devices and abnormal operations were observed in some devices annealed at temperatures lower or higher than the critical temperature. Those influences of annealing temperature seem closely related to the thermal stability of a top electrode/GST/heating layer multilayer structure in the PCM devices.

Junction Area Dependence of Tunneling Magnetoresistance in Spin-dependent Tunneling Junction with Natural $Al_2O_3$Barrier (자연산화 $Al_2O_3$장벽층을 갖는 스핀의존 터널링 접합에서 자기저항특성의 접합면적 의존성)

  • 이긍원;이상석
    • Journal of the Korean Magnetics Society
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    • v.11 no.5
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    • pp.202-210
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    • 2001
  • Spin dependent tunneling (SDT) junction devices of Ta/NiFe/Ta/NiFe/FeMn/NiFe/AlOx/CoFe/NiFe/Al with in-situ naturally oxidized Al barrier were fabricated using ion beam deposition and dc sputtering in UHV chamber of 10$^{-9}$ Torr. The maximum tunneling magnetoresistance (TMR) and the product resistance by junction (R$_{j}$ A) are 16-17% and 50-60 $\Omega$${\mu}{\textrm}{m}$$^2$, respectively. The values of TMR and (R$_{j}$ A) with field annealing were slightly increased. The TMR and (R$_{j}$ A) dependence versus the junction area size was observed. These results were explained by using sheet resistance effect of bottom electrode and spin channel effects.

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A Study on the Optical Characteristics of Multi-Layer Touch Panel Structure on Sapphire Glass (Sapphire Glass 기반 다층박막 터치패널구조의 광학특성 연구)

  • Kwak, Young Hoon;Moon, Seong Cheol;Lee, Ji Seon;Lee, Seong Eui
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.3
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    • pp.168-174
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    • 2016
  • A conductive oxide-based sapphire glass indium tin oxide/metal electrode and the optical coating, through patterning process was studied in excellent optical properties and integrated touch panel has a high strength. Indium tin oxide conductive oxides of the sapphire glass to 0.3 A at DC magnetron sputtering method of 10 min, gas flow Ar 10 Sccm Ar, $O_2$ 1.0 Sccm the formation conditions of the thin film after annealing at $550^{\circ}C$ for 30min was achieved through a 86% transmittance. In addition, the coating 130 nm hollow silica sol-gel was to improve the optical transmittance of the indium tin oxide to 91%. For the measurement by the modeling hollow silica sol by Macleod simulation and calculated the average values of silica part to the presence or absence in analogy to actual. Refractive index value and the actual value of the material on the simulation the transmittance difference is it does not completely match the air region similar to the actual value (transmission) could be confirmed that the measurement is set to a value of between 5 nm and 10 nm.

Post-annealing Effect of Giant Magnetoresistance-Spin Valve Device for Sensor (센서용 거대자기저항 스핀밸브소자의 열처리 효과)

  • Lee, Sang-Suk;Park, Sang-Hyun;Soh, Kwang-Sup;Joo, Ho-Wan;Kim, Gi-Wang;Hwang, D.G.
    • Journal of the Korean Magnetics Society
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    • v.17 no.4
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    • pp.172-177
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    • 2007
  • In order to detect of the magnetic property in the cell unit, we studied the GMR-SV (giant magnetoresistance-spin valves) biosensor, which was depended on the micro patterned features according to two easy directions of longitudinal and transversal axes. Here, the multi layer structure was glass/NiO/NiFe/CoFe/Cu/CoFe/NiFe. The uniaxial anisotropy direction was applied to the patterned biosensor during the deposition and vacuum post-annealing at $200^{\circ}C$ under the magnitude of 300 Oe, respectively. Considering the magnetic shape anisotropy effect, the size of micro patterned biosensor was a $2{\times}5{\mu}m^2$ after the photo lithography process. By our experimental results, we confirmed that the best condition of GMR-SV biosensor should be the same direction of the axis sensing current and the easy axis of pinned NiO/NiFe/CoFe triple layer oriented to the width direction of device, and the direction of the easy axis of free CoFe/NiFe bilayer was according to the longitudinal direction of device.

Optical Characteristics of ZnS/CaF2/ZnS/Cu with Different Optical Thickness of CaF2 Layer (CaF2 두께 변화에 따른 ZnS/CaF2/ZnS/Cu 다층 박막의 광특성)

  • Kim, Jun-Sik;Jang, Gun-Eik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.7
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    • pp.584-588
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    • 2009
  • Layered ZnS/$CaF_2$/ZnS/Cu film was deposited on glass substrate by using evaporation method. ZnS and $CaF_2$ were chosen as high and low refractive materials. Cu was used as mid-reflective layer. Reflectance with different optical thickness of $CaF_2$ ranging from $0.25{\lambda}\;to\;0.5{\lambda}$ were systematically investigated by using spectrophotometer. In order to expect the experimental results, the simulation program, the Essential Macleod Program(EMP) was adopted and compared with the experimental data. Based on the results taken by spectrophotometer, the ZnS/$CaF_2$/ZnS/Cu multi-layered thin film show the maximum reflectance of 80% at 625nm $(0.25{\lambda}\;in\;CaF_2)$ and 42% at 660nm $(0.5{\lambda}\;in\;CaF_2)$ respectively. As compared with the experimental results and simulation data, it was confirmed the experimental data is well matched with the EMP data.