Deposition of Amorphous Carbon Layer by PECVD and Analysis of Raman Spectroscopy (PECVD에 의한 비정질 탄소층 증착 및 Raman Spectroscopy 분석)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2007.06a
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- pp.160-161
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- 2007