액상 구리 전구체 hfac (hexafluoroacetylacetonate) Cu(I) DMB (3,3-dimethyl-1-butene)의 특성 평가 (Property of hfac(hexafluoroacetylacetonate) Cu(I) DMB (3,3-dimethyl-1-butene) as a Liquid Precursor for Chemical Vapor Deposition of Copper Films)
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- 한국재료학회지
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- 제9권11호
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- pp.1148-1152
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- 1999