Numerical Modeling of Perturbation Effects of Electrostatic Probe into 2D ICP(inductively coupled plasma) (2D-ICP(inductively coupled plasma)에서 정전 탐침 삽입 시의 플라즈마 수치 계산)
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- Journal of Surface Science and Engineering
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- v.44 no.1
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- pp.26-31
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- 2011