• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.20 no.4
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• pp.263-273
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• 2010

Occupational exposure to wollastonite can occur during its mining, processing and using. Wollastonite was analyzed for its physicochemical properties by transmission electron microscope and scanning electron microscope equipped with energy dispersive X-ray spectrometer. Wollastonite fibers were 3.3${\mu}m$ in diameter(av.) and were 30.5${\mu}m$ in length(av.). The atomic composition of wollastonite was Si 56.41% and Ca 43.59%. Respiratory toxicity of wollastonite has been studied in term sequential in Sprague-Dawely rats. UICC chrysotile (average diameter 0.03${\mu}m$, average length 2.93${\mu}m$) was applied as the positive control. The effects of 2mg wollastonite on respiratory system and pathological changes were evaluated after 1, 4, 8, 12 weeks instilled into rat lungs. Inflammation response broke out from 1 week after instilled with wollastonite and the pathological examination further showed increased legions of granulomatous inflammation after 4 weeks, but decreased granulomatous inflammation after 8 weeks, whereas chrysotile induced progressive interstitial granulomatous inflammation and fibrosis as a function of time.

• Conservation and Restoration of Cultural Heritage
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• v.1 no.1
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• pp.9-22
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• 2012

The most widely excavated iron artifacts used as weapons or farm tools from central southern regions of Korea were subjects of non-metallic inclusion analysis through metallographic examination, microhardness measurement, and scanning electron microscopy with energy dispersive X-ray spectroscopy. Through metallographic interpretation and study of the analyzed results, the steel manufacturing and iron smelting using heat processing in the iron artifacts excavated from the central southern region of the ancient Korean peninsula was studied, and the analysis of the non-metallic inclusions mixed within the metallic structures was interpreted as the ternary phase diagram of the oxide to infer the type of iron ores for the iron products and the temperature of the furnace used to smelt them. Most of the ancient forged iron artifacts showed $Al_2O_3/SiO_2$ with high $SiO_2$ contents and relatively low $Al_2O_3$ contents for iron ore, indicating t hat for $Al_2O_3$ below 5%, it is presumed that magnetic iron ores were reduced to bloom iron (sponge iron) with direct-reduction process for production. The temperature for extraction of wustite for $Al_2O_3$ below 1% was found to be $1,020{\sim}1,050^{\circ}C$. Considering the oxide ternary constitutional diagram of glassy inclusions, the steel-manufacturing temperature was presumed to have been near $1,150{\sim}1,280^{\circ}C$ in most cases, and minimum melting temperature of casting iron part excavated in Daeseong-ri. Gyeonggi was near $1,400^{\circ}C$, and it is thought that hypoeutectic cast iron of about 2.3% carbon was casted and fragility of cast iron was improved by decarburizing in solid state.

• Journal of the Microelectronics and Packaging Society
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• v.9 no.2
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• pp.1-9
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• 2002

The intermetallic formation between Sn-Ag-(Cu) solders and metal pads in a real BGA package was characterized using SEM, EDS, and XRD. The intermetallic phase formed in the interface between Sn-Ag-Cu and Au/Ni/Cu pad is likely to be ternary compound of $(Cu,Ni)_6Sn_5$ from EDS analysis High concentration of Cu was observed in the solder/Ni interface. XRD analysis confirmed that $\eta -Cu_6 Sn_5$ type was intermetallic phase formed in the interface between Cu containing solders and Ni substrates and $Ni_3$Sn_4$ intermetallic was formed in the Sn-Ag solder/Ni interface. The thickness of intermetallic phase increased with the reflow times and Cu concentration in solder.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.1
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• pp.36-44
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• 2015

Objectives: This study aimed to elucidate the physicochemical properties of silica powder and airborne particles as by-products generated from fabrication processes to reduce unknown risk factors in the semiconductor manufacturing work environment. Materials and Methods: Sampling was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. Thirty-two powder and airborne by-product samples, diffusion(10), chemical vapor deposition(10), chemical mechanical polishing(5), clean(5), etch process(2), were collected from inner chamber parts from process and 1st scrubber equipment during maintenance and process operation. The chemical composition, size, shape, and crystal structure of silica by-product particles were determined by using scanning electron microscopy and transmission electron microscopy techniques equipped with energy dispersive spectroscopy, and x-ray diffractometry. Results: All powder and airborne particle samples were composed of oxygen(O) and silicon(Si), which means silica particle. The by-product particles were nearly spherical $SiO_2$ and the particle size ranged 25 nm to $50{\mu}m$, and most of the particles were usually agglomerated within a particle size range from approximately 25 nm to 500 nm. In addition, the crystal structure of the silica powder particles was found to be an amorphous silica. Conclusions: The silica by-product particles generated from the semiconductor manufacturing processes are amorphous $SiO_2$, which is considered a less toxic form. These results should provide useful information for alternative strategies to improve the work environment and workers' health.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.1
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• pp.82-88
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• 2015

Objectives: This study is designed to analyze the penetration performance into ceiling materials containing asbestos of scattering prevention agents and investigate the change in penetration depth and viscosity according to the dilution rate of anti-scattering agents diluted with distilled water. Methods: Five different types of scattering prevention agents were spread on plate-type asbestos ceiling materials. The penetration depth of each coated ceiling material was measured by energy dispersive spectroscopy (EDS) analysis, based on X-ray fluorescence (XRF) results of the non-coated ceiling materials. Test equipment installed the ceiling materials and 60 minutes were collected at a flow rate of $10{\ell}/min$ at a filter of 25 mm. Results: An EDS analysis of the cross-section of ceiling materials constructed with a scattering prevention agent revealed that potassium is detected in the process of penetrating hardener solidification and this element could be an indicator for infiltration. When anti-scattering agents with different viscosities were constructed and the penetration depth was analyzed by potassium detection assessment using EDS, the depth results with viscosities of 5.0, 2.5, and 1.9 cP were 98.5, 103, and $147{\mu}m$, respectively. Penetration performance improved with decrease in viscosity. Conclusions: For asbestos ceiling materials, it is concluded that a higher dilution rate of the scattering prevention agent leads to lower viscosity, and hence a deeper penetration depth from $156{\mu}m$ to 3 mm. The asbestos anti-scattering properties according to the penetration depth will be confirmed through further study.

• Journal of Powder Materials
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• v.22 no.1
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• pp.52-59
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• 2015

As well-known wrought stainless steel, sintered stainless steel (STS) has excellent high-temperature anti-corrosion even at high temperature of $800^{\circ}C$, and exhibits good corrosion resistance in air. However, when temperature increases above $900^{\circ}C$, the corrosion resistance of STS begins to deteriorate and dramatically decreases. In this study, the effects of phase and composition of STS on high-temperature corrosion resistances are investigated for STS 316L, STS 304 and STS 434L above $800^{\circ}C$. The morphology of the oxide layers are observed. The oxides phase and composition are identified using X-ray diffractometer and energy dispersive spectroscopy. The results demonstrate that the best corrosion resistance of STS could be improved to that of 434L. The poor corrosion resistance of the austenitic stainless steels is due to the fact that $NiFe_2O_4$ oxides forming poor adhesion between the matrix and oxide film increase the oxidation susceptibility of the material at high temperature.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.3
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• pp.294-300
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• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• Journal of the Korean Ceramic Society
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• v.46 no.1
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• pp.74-80
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• 2009

Electrospinning process is the useful and unique method to produce nanofibers from metal precursor and polymer solution by controlled viscosity. In this study, the NiZn ferrite nanofibers were prepared by electrospinning with a aqueous metal salts/polymer solution that contained polyvinyl pyrrolidone and Fe (III) chloride, Ni (II) acetate tetrahydrate and zinc acetate dihydrate in N,N-dimethylformamide. The applied electric field and spurting rate for spinning conditions were 10 kV, 2 ml/h, respectively. The obtained fibers were treated at $250^{\circ}C$ for 1 h to remove the polymer. Finally, the NiZn ferrite fibers were calcined at $600^{\circ}C$ for 3 h and annealed at $900{\sim}1200^{\circ}C$ in air. By tuning the viscosity of batch solution before electrospinning, we were able to control the microstructure of NiZn ferrite fiber in the range of $150{\sim}500\;nm$ at 770 cP. The primary particle size in $600^{\circ}C$ calcined ferrite fiber was about 10 nm. The properties of those NiZn ferrite fibers were determined from X-ray diffraction analysis, electron microscopy, energy dispersive spectroscopy, Fourier transform infrared spectroscopy, thermal analysis, and magnetic measurement.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.484-484
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• 2009

반도체 소자가 차세대 초미세 공정 기술 도입의 가속화를 통해 고속화 및 고집적화 되어 감에 따라 나노 (nano) 크기의 회로 선폭 미세화를 극복하고자 최적의 CMP (chemical mechanical polishing) 공정이 요구되어지고 있다. 최근, 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결 하고자 본 논문에서는 Cu의 ECMP 적용을 위해 LSV (Linear sweep voltammetry)법을 통하여 알칼리 성문인 $NaNO_3$ 전해액과 산성성분인 $HNO_3$ 전해액의 전압 활성화에 의한 active, passive, transient, trans-passive 영역을 I-V 특성 곡선을 통해 알아보았고, 알칼리와 산성 성분의 전해액이 Cu 표면에 미치는 영향을 SEM (Scanning electron microscopy), EDS (Energy Dispersive Spectroscopy), XRD(X-ray Diffraction)를 통하여 전기화학적 특성을 비교 분석하였다.

• International Journal of Oral Biology
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• v.37 no.1
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• pp.9-16
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• 2012

The aim of this study was to evaluate surface characteristics and biological properties of the dentin -derived hydroxyapatite (HA) coating on titanium substrate. Dentinderived HA was obtained from extracted human teeth using a calcination method at $850^{\circ}C$. The commercially pure titanium (cp-Ti, ASTM Grade II) was used as a metallic substrate and a radio frequency magnetron sputtering method was employed as a coating method. Scanning electron microscopy (SEM) and energy dispersive X-ray analysis (EDX) were utilized to investigate the coating aspects and composition. Atomic forced microscopy (AFM) and a surface profiler were used to assess the surface morphology and roughness. Corrosion tests were performed in phosphate-buffered saline at a $36.5{\pm}1^{\circ}C$ in order to determine the corrosion behavior of the uncoated and coated specimens. The biocompatibility of dentin-derived HA coated specimens with fetal rat calvarial cells and human gingival fibroblasts was assessed by SEM and cell proliferation analysis. The results showed that the dentin-derived HA coatings appeared to cover thinly and homogeneously the surfaces without changing of the titanium substrate. The EDX analysis of this the coating surface indicated the presence of Ca and P elements. The mean surface roughness of cp-Ti and dentin-derived coating specimens was $0.27{\mu}m$ and, $1.7{\mu}m$, respectively. Corrosion tests indicated a stable passive film of the dentin-derived HA coating specimens. SEM observations of fetal rat calvarial cells and human fibroblast cells on coated surfaces showed that the cells proliferated and developed a network of dense interconnections. The cells on all specimens proliferated actively within the culture period, showing good cell viability. At day 1 and 3, dentin-derived coating specimens showed 89% and 93% cell viability, respectively, when normalized to cp-Ti specimens. These results suggest that dentin-derived HA coating using the RF magnetron sputtering method has good surface characteristics and biocompatibility.