• Korean Journal of Materials Research
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• v.3 no.6
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• pp.593-597
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• 1993

Adhesion of CVD W to the TiN glue layer in the blanket W process which is a promising candidate for filing contact holes in subhalfmicron ULSIs has been investigated. The adhesion was enhanced with increasing the W film thickness due to the decrease of the TiN film stress. The adhesion strength was increased by the sputter etching of the TiN surface prior to the W deposition owing to the removal of contaminants and the increase of the surface roughness. The adhesion of the W film to the TiN glue layer property was also improved by Ar ion implantation of the TiN surface owing to the activation of the TiN surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.290-290
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• 2012

본 실험에서는 RF magnetron sputtering법과 evaporator법을 이용하여 다층박막 OMO구조를 $30{\times}30mm$ 유리기판 위에 제작하였다. Oxide층은 Sputter장비를 이용 IGZO막을 제작하였으며, Metal 층은 evaporator장비를 이용 Ag 막을 제작하였다. 변수로는 Oxide층의 시간에 따른 특성 변화를 연구하였다. 소결된 타겟으로는 In:Ga:ZnO를 각각 1:1:1 mol%의 조성비로 혼합하여 이용하였으며, Ag는 99.999%의 순도를 가진다. Oxide층의 RF sputter 공정 조건으로는 초기압력 $3.0{\times}10^{-6}$ Torr 이하로 하였으며, 증착 압력 $2.0{\times}10^{-2}$ Torr, Rf power 30 W, Ar gas 50 sccm으로 고정 시켰으며, 변수로는 5, 7, 9, 11분은 시간 차이를 두어 증착을 하였다. Metal층의 Evaporator 공정조건으로는 $5.0{\times}10^{-6}$ Torr이하, 전압은 0.3 V, Thickness moniter로 두께를 확인해가며 증착하였으며, $100{\AA}$으로 고정시켰다. 분석결과로는 XRD 측정 결과 35도 부근에서 Ag 피크가 관찰되었다. IGZO막 하나일때 90% 이상의 평균 투과율을 보였으며, 3층의 구조가 모두 증착됐을때의 투과도는 가시광영역에서 평균 80% 이상의 투과율을 보였으며, 500 nm부터 투과율이 떨어지기 시작해 800 nm부근에서는 평균 투과율이 30%까지 떨어져 Metal층인 Ag가 하나의 layer로 잘 증착이 된것을 보여주며, 플라즈몬효과를 보여줌을 알수있다. AFM측정 결과 평균 거칠기는 1.2 nm 정도의 거칠기를 확인했다. 홀 측정결과 전기적 특성은 발견되지 않았다.

• The Korean Journal of Community Living Science
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• v.25 no.4
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• pp.619-628
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• 2014

This study analyzes whether children's independent picture book reading affects their reading activities and whether the mother-child interaction during this reading improves their reading activities. The study provides basic data and policy implications for developing children's reading ability. Data were collected from a sample of 192 children aged 4 and 5 in Seoul and Anseong, where a survey of their mothers as well as their nursery school teachers was conducted. Variables of interest were analyzed through a correlation analysis and a hierarchical regression analysis, First, children's reading recognized by their mothers was bipolarized as "very high" or "very low". Second, children's reading activity had a significant positive relationship with independent reading, indicating that children active in independent reading were likely to develop their, reading ability. Third, in addition to independent reading, the mother-child interaction had a significant positive effect on children's-reading ability, indicating the importance of the mother's role in developing the child's reading ability.

• Transactions of the Korean Society of Automotive Engineers
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• v.17 no.5
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• pp.74-83
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• 2009

Recently, usage of electric and electronic system for car increases rapidly. Consequently power monitoring supplied to the system is essential for management and controlling. Generally, battery status is monitored through measuring and diagnosing the current measurement method utilizing Hall Effect. Therefore, in this paper, we analysed magnetic field to develop the solution of DC current sensor using Hall Effect which is the core of design and development. By analysing the magnetic field by FEM using Maxwell 3D software, the location of the highest output current and stable part in the Hall IC sensor was shown. Also, the optimal core design of DC current sensor using parametric and Simplex method was presented. A car battery charge and discharge process dependant on time effect on the changing of magnetic field was simulated and compared to the result from the experiment result of actual vehicle.

• Journal of Power System Engineering
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• v.16 no.1
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• pp.98-105
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• 2012

안티핀치 시스템은 파워 윈도우 상승 시에 인체의 특정 부위가 창문 틈 사이에 끼여 발생하는 치명적인 사고를 방지하기 위한 안전 시스템이다. 이러한 안티핀치 시스템은 물체의 끼임을 검출하는 센서 방식에 따라 접촉식과 비접촉식 두 가지로 크게 구분된다. 본 논문에서는 접촉식의 한 방법으로 전류 정보에 의해 강화된 미국의 안전 규정 FMVSS 118-S5를 만족하는 안티핀치 시스템을 제안한다. 안티핀치 시스템에 사용된 전류 정보는 추가적인 장치의 부착 없이도 기존의 파워 윈도우용 모터 드라이브에 내장된 과전류 검출용 전류 센서를 이용하여 쉽게 얻을 수 있다. 또한 전류 정보는 물체의 끼임을 신속히 검출, 반영함으로써 안티핀치 시스템에 요구되는 반전력 저감에 기여한다. 특히, 본 논문에서는 전류의 임계값이 모터 경년 변화나 운전 조건에 따라 변동하는 문제점을 개선하기 위해 핀치 상태를 효과적으로 판정할 수 있는 자동 임계값 설정 방법을 제안한다. 마지막으로 다양한 실험 및 시험을 통해 제안된 안티핀치 시스템이 FMVSS 118-S5를 만족함을 보인다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.10
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• pp.1011-1016
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• 2008

Jet-A spray and combustion were numerically analyzed in annular type combustor model using KIVA3V. The combustor geometry have 6 dilute holes. Swirl effect and thermal NO were considered in this investigation to analyze mixing and combustion characteristics. Fuel vapor, flame temperature, NO generation were investigated for various spray angle. As increase of spray angle, Jet-A vapor appeared uniformly in primary zone and evaporation rate was increased. Mixing between fuel vapor and ambient gas was enhanced as increase of spray angle. As a result, high temperature region appeared widely and thermal NO generation rate was increased.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.255-260
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• 1998

The ionized magnetron sputtering is very useful in filling of small metal contact or via in ULSI processing with very high ionization upto 80% based on incoming flux ratio. But fairly high sputtering gas pressure is required to get high ionization, which instead gives low deposition rate and diverse incoming neutral's angular distribution. The electron quenching by heavily sputtered metals and gas rarefaction were considered the main causes of decreased ionization in this process. RF pulsing of sputtering power was proposed to solve those two problems. The results showed that 10㎳/10 ㎳ and 100㎳/100 ㎳ of on/off pulsings were optimal pulse conditions from OES measurements and also XRD of deposited Ag film showed distinct change of (111) to (200) preferred orientation. These results were analysed in a view point of neutral gas heating and cooling by high power sputtering.

• The Journal of Korean Academic Society of Nursing Education
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• v.26 no.1
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• pp.36-46
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• 2020

Purpose: This study was conducted to develop and implement an education program based on the Whole Brain Model for novice nurses, and to evaluate its effects on work performance, interpersonal skills and self-efficacy. Methods: A pretest-posttest quasi-experimental design was used with an experimental group (n=20) and a control group (n=21). The experimental group participated in an education program based on the Whole Brain Model for seven sessions over 4 weeks. An independent t-test, χ²-test, and Mann-Whitney U test were performed to analyze the data. Results: There were statistically significant differences in work performance (p=.015), interpersonal skills (p=.014) and self-efficacy (p=.021) between the experimental and the control group. Conclusion: This program was an effective learning strategy to enhance nursing competence for novice nurses. The novice nurses who participated this program were able to reflect deeply on themselves, improve interpersonal skills, and induce whole-brain integrated thinking in learning how to solve the problems caused by changes in patient conditions that can be experienced in clinical practice. Therefore, this program can be recommended for regular continuing education for novice nurses.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.6
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• pp.95-100
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• 2016

We suggest and simulate an optical filter that a red wavelength range cannot transmit to protect the psychological stress that originates from the cognition of red color in emergency medical technicians. When a nanohole hexagonal array is fabricated on gold film using Anodic Aluminum Oxide (AAO), the blocked wavelength can be tuned by the hole diameter and film thickness. The characteristic of the transmittance for normal incident white light is simulated with Finite Element Method (FEM) in the MATLAB platform. Although the transmittance of the overall wavelength is reduced by 50% by the gold film, the transmittance of the red wavelength range is decreased by over 87%.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.118-118
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• 1999

CVD방법에 의한 TiN 박막 형성에 있어서 ICP-CVD 방법이 대두되고 있다. 이것은 precursor에 대한 radical 형성, 식각된 패턴에서 양 벽의 self-shadowing 효과, 낮은 tress등으로 dense 한 박막을 얻을 수 있기 때문이다. TiN 박막은 Si 기판의 온도를 상온에서 50$0^{\circ}C$까지 유지하면서 TEMAT의 유량을 5-20sccm으로 변화시키면서 증착하였다. 증착 후 TiN 박막의 결정화에 따른 열처리는 Ar과 N2-가스분위기에서 in-situ로 증착하였다. 증착 후 TiN 박막증착 조건수립에 따른 플라즈마 특성진단은 전자의 온도와 밀도, 평균 전자밀도, 이온 에너지 분포, radical 분포, negative 이온분포 등으로 측정하였다. 플라즈마 변수에 따른 TiN 박막의 결정성과 상 변화는 XRD로 분석하였고, 조성비 및 TiN 박막의 원소화학적 상태, 결합에너지, 각 상에 따른 결합 에너지 천이정도, 초기 형성과정 및 반응기구 등은 RBS와 XPS로 조사하였다. TiN 박막의 표면상태, morphology 거칠기, TiN/Si(100)구조에서 계면상태 등은 SEM, AFM, 그리고 HRTEM으로 분석하였다. TiN 구조 박막의 비저항, carrier concentration 그리고 mobility 측정은 박막의 표면이 균일하고 bls-홀이 없는 것으로 하여 4-point probe 방법으로 측정하였다. 이들 분석으로부터 ICP-CVD 방법에 의하여 형성된 TiN 박막이 초고집적 반도체 소자의 contact barrier layer로서의 적용 가능성을 평가하였다.