• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.58.2-58.2
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• 2010

FPD (Flat Panel Display) 제조 공정에서 사용되는 패턴은 수 ${\mu}m$ 수준까지 감소하였으며, FPD의 크기는 급격하게 대형화 되여 현재 8세대(2200mm*2500mm)에 이르고 있다. 이에 따라, $1\;{\mu}m$ 이상의 크기를 갖는 오염입자에 의한 수율 저하를 극복하기 위한 세정효율의 향상 및 다량의 초순수 사용에 따른 폐수 발생으로 인한 환경오염, 또한 장비의 크기에 따른 공간 효용성 감소와 이에 따른 공정 비용의 증가 등의 어려움에 직면하고 있다. 따라서, 현장에서는 고효율, 저비용의 세정 공정 기술 개발에 대한 연구가 활발히 진행되고 있다. 이러한 문제점들을 해결 하고자 이류체 노즐 세정 장치와, 화학액 린스를 위한 초순수 Spray, 건조 공정에 해당하는 Air-knife, Halogen lamp로 구성된 소형화 된 고속 FPD(Flat Panel Display) 세정기에 대한 연구를 진행 하였다. 이류체 노즐은 초순수와 $N_2$ 가스를 내부에서 혼합하여 액적(Droplet)을 형성하여 고압으로 분사시키는 장치로서 화학액을 사용하지 않고 물리적인 방법으로 오염입자를 제거한다. Spray는 유기 오염입자 제거를 위한 오존수의 린스 공정을 위해 설치 하였다. 세정 후 표면에 남아있는 기판의 액막(water film)은 고압의 가스를 분사하는 Air-knife를 통해 제거하였으며, 고속 공정시 발생할 수 있는 Air-knife에서 제거하지 못한 잔류 액막을 Halogen lamp를 사용하여 효과적으로 제거함으로써, 물반점(water mark) 없는 건조 공정을 얻을 수 있었다. 실험에는 미세 입자의 정량적인 측정을 위하여 유리 기판 대신에 6인치 실리콘 웨이퍼(P-type (100))를 사용하였으며, > $\;1{\mu}m$ 실리카 입자를 스핀방식을 사용하여 정량적으로 균일하게 오염하였으며, 오염물의 개수 및 분포는 파티클 스캐너 (Surfscan 6200, KLA-Tancor, USA)를 사용하여 분포 및 개수를 정량적으로 측정 하였다. 이류체 노즐은 $N_2$ 가스의 압력과 초순수의 압력을 변화시켜 측정하여, 각각 0.20 MPa, 0.01 MPa에서 최적의 세정 결과를 얻을 수 있었으며, 건조 효율은 Air-Knife의 입사 각도와 건조면 간격, 할로겐 램프의 온도를 조절 하여 최적의 조건을 얻을 수 있었다.

• Polymer(Korea)
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• v.34 no.4
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• pp.321-325
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• 2010

Fibroin is a biopolymer available in large quantity from silk fiber and has a long history of use as a suture proving biocompatibility. In this report, fibroin microspheres has been fabricated for biomaterial applications. W/O emulsion of regenerated fibroin droplets in a continuous phase of decane with mixed surfactants was dried to facilitate fibroin gelation and the condensed fibroin microspheres were harvested. The ratio of mixed surfactants and their proportions to decane were determined to prepare a stable W/O emulsion. A spherical form of fibroin gels was obtained from the W/O emulsion agitated at 600 rpm. Scanning electron microscopy revealed that number average sizes of the fibroin microspheres were 21.6 and 8.5 ${\mu}m$ when dried under ambient conditions or under vacuum, respectively. Tomography of the spheres revealed that their internal structures are packed or hollowed. Hollow and hemispherical forms of microspheres were also prepared by using porogen.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.7
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• pp.675-682
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• 2013

To verify the effect of inner- and outer-stage gas jets, a shear coaxial injector was designed to analyze the axial velocity profile and breakup phenomenon with an increase in the measurement distance. When the measurement position was increased to Z/d=100, the axial flow showed a fully developed shape due to the momentum transfer, aerodynamic drag effect, and viscous mixing. An inner gas injection, which induces a higher momentum flux ratio near the nozzle, produces the greater shear force on atomization than an outer gas injection. Inner- and Outer-stage gas injection do not affect the mixing between the inner and outer gas flow below Z/d=5. The experiment results showed that the main effect of liquid jet breakup was governed by the gas jet of an inner stage. As the nozzle exit of the outer-stage was located far from the liquid column, shear force and turbulence breaking up of the liquid jets do not fully affect the liquid column. In the case of an inner-stage gas injection momentum flux ratio within 0.84, with the increase in the outer gas momentum flux ratio, the SMD decreases. However, at an inner-stage gas jet momentum flux ratio over 1.38, the SMD shows the similar distribution.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.8
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• pp.759-765
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• 2013

This study proposes the characteristics of the pressure drop in a compressible fluid through porous media for application to a porous injector in a liquid rocket engine in order to improve the uniformity of the drop size distribution and the mixing performance of shear coaxial injectors. The fluid through the porous media is a Non-Darcy flow that shows a Nonlinear relation between the pressure drop and the velocity at high speed and high mass flow rate. The pressure drop of the Non-Darcy flow can be derived using the Forchheimer equation that includes the losses of viscous and inertia resistance. The permeability and Ergun coefficient represented as a function of the pressure drop and pore size can be applied to the porous injector, where the fluid through the porous media is compressible. A generalized correlation between the pressure drop in relation to the pore size was derived.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.40 no.2
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• pp.133-139
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• 2014

Oil-in-water nanoemulsions were prepared in the system of water/Span 80-Tween 80/long-chain paraffin oil via the PIC (phase inversion composition) method. With the increase of preparation temperature from $30^{\circ}C$ to $80^{\circ}C$, the diameter of emulsion droplets decreased from 120 nm to 40 nm, proving the formation of nanoemulsions. By varying the HLB (hydrophilic lipophilic balance) of mixed surfactants, we found that there was an optimum HLB around 12.0 ~ 13.0 corresponding to the minimum droplet size. The viscosity of nanoemulsions clearly increased with droplet volume fraction, f, but the droplet size slightly increased. Significantly, at ${\phi}{\leq}0.3$, the size distribution of nanoemulsions kept constant more than 2 months. These results proved that the viscous paraffin oil can hardly be dispersed by the PIC method at $30^{\circ}C$, but the increase in preparation temperature makes it possible for producing monodisperse nanoemulsions. Once the nanoemulsion is produced, the stability against Ostwald ripening is outstanding due to the extremely low solubility of the liquid paraffin oil in the continuous phase. The highly stable nanoemulsions are of great importance in cosmetic applications.

• Journal of Korean Society of Environmental Engineers
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• v.31 no.10
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• pp.933-940
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• 2009

To evaluate characteristics in spray flame, laminar counterflow is investigated on the effects of equivalence ratio and fuel by a two-dimensional DNS (direct numerical simulation). For the gaseous phase, Eulerian mass, momentum, energy, and species conservation equations are solved. For the disperse phase, all individual droplets are calculated by the Lagrangian method without the parcel model. n-Decane ($C_{10}H_{22}$) and n-heptane ($C_7H_{16}$) is used as a liquid spray fuel, and a one-step global reaction is employed for the combustion reaction model. As equivalence ratio increases, the fuel ignites early and the high temperature region spreads wider. The peak value of temperature, however, tends to once increase and then decreases with increasing equivalence ratio. The decrease in the peak value of temperature for the higher equivalence ratio condition is caused by the cooling effect associated with droplet group combustion. Since the evaporation of n-heptane is early, the high temperature region spreads wider than ndecane, but the peak values of temperature for both n-heptane and n-decane is almost same.

• Korean Chemical Engineering Research
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• v.46 no.5
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• pp.922-930
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• 2008

The selective non-catalytic reduction(SNCR) performance is sensitive to the process parameters such as flow velocity, reaction temperature and mixing of reagent(ammonia or urea) with the flue gases. Therefore, the knowledge of the velocity field, temperature field and species concentration distribution is crucial for the design and operation of an effective SNCR injection system. In this work, a full-scale two-dimensional computational fluid dynamics(CFD)-based reacting model involving a droplet model is built and validated with the data obtained from a pilot-scale urea-based SNCR reactor installed with a 150 kW LPG burner. The kinetic mechanism with seven reactions for nitrogen oxides($NO_x$) reduction by urea-water solution is used to predict $NO_x$ reduction and ammonia slip. Using the turbulent reacting flow CFD model involving the discrete droplet phase, the CFD simulation results show maximum 20% difference from the experimental data for NO reduction. For $NH_3$ slip, the simulation results have a similar tendency with the experimental data with regard to the temperature and the normalized stoichiometric ratio(NSR).