• Title/Summary/Keyword: 혼합모드 분포

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광방사 세기비를 이용한 공정 플라즈마의 변수 진단

  • Lee, Yeong-Gwang;O, Se-Jin;Lee, Jae-Won;Hwang, Hye-Ju;Lee, Hui-Jin;Kim, Yu-Sin;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.149-149
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    • 2011
  • 아르곤 기체의 방사세기 또는 그 세기 비는 플라즈마 공정 진단에서 일반적으로 사용된다. 본 실험에서는 100 mTorr 압력 조건하의 유도결합 플라즈마(13.56 MHz)에서 E-H 모드 전이 영역, rf 바이어스(12.5 MHz) 전력 인가 및 N2 혼합 시 단순화한 충돌-방사 모델에 기초한 광방사 세기비 방법을 적용하여 플라즈마 변수를 진단하였다. 개발 프로그램 기반의 분광기를 사용하여 아르곤 기체의 특정 파장(750.4, 751.5 그리고 811.5 nm)들을 관측하였고, 동일한 조건하에서 정전 탐침법으을 이용하여 전자 에너지 분포함수의 변화도 측정 하였다. 맥스웰 전자 에너지 분포를 가정하는 일반적인 경우와 비교하여 볼 때 실제적인 전자 에너지 분포함수의 측정은 전자의 가열 메커니즘에 대한 상세한 정보를 제공함과 동시에 플라즈마 재흡수에 대한 보정을 가능하게 해준다. 광방사 세기비법에 의해 측정된 결과에 의하면, 750.4 nm/751.5 nm는 높은 에너지(>13.08 eV)의 전자들의 유효 전자온도에 대한 정보를 나타내는 반면 811.5 nm/750.4 nm는 아르곤 준안정 준위 밀도(1s5)에 대한 정보를 제공하게 된다. 수행된 실험 조건하에서, 측정된 준안정 준위 밀도는 E-H 모드 전이 영역에서 최대값을 나타내었고 바이어스 전압 및 N2 기체 혼합 비율이 증가함에 따라 감소하는 결과를 얻었다. 유효 전자온도의 경우 광방사 세기비법과 정전 탐침법 모두 같은 결과를 보여 주었는데, E-H 모드 전이 영역에서는 전자온도는 거의 일정하였고 바이어스 전압 및 N2 기체 혼합 비율이 증가함에 따라 전자온도는 증가하였다. 이러한 실험 결과는 방전 모드 전이, 바이어스 인가 그리고 혼합 기체 사용하는 공정 플라즈마를 이해하는데 있어 이들 변수의 진단이 중요한 요소임을 보여준다.

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Mode Conversion in Magneto-Optic Thin-Film Waveguides (광도파관에서 자성박막에 의한 모드 변환)

  • 정상구;임한주
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.20 no.6
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    • pp.52-57
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    • 1983
  • We report a theoretical study on wave propagation in magneto-optic thin-film waveguides. The field distribution and phase velocity of the guided hybrid modes are analyzed in terms of the phase difference of basic system modes and the Faraday rotation of the magneto-optic thin film. Splitting of the phase constant curves due to the F araday rotation is discussed. The present hybridmode analysis leads to a conversion matrix which shows that the distance dependence of the mode conversion in the guide is different from that in the bulk medium.

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Akaike Information Criterion-Based Reliability Analysis for Discrete Bimodal Information (바이모달 이산정보에 대한 아카이케정보척도 기반 신뢰성해석)

  • Lim, Woochul;Lee, Tae Hee
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.12
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    • pp.1605-1612
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    • 2012
  • The distribution of a response usually depends on the distribution of the variables. When a variable shows a distribution with two different modes, the response also shows a distribution with two different modes. In this case, recently developed methods for reliability analysis assume that the distribution functions are continuous with a mode. In actual problems, however, because information is often provided in a discrete form with two or more modes, it is important to estimate the distributions for such information. In this study, we employ the finite mixture model to estimate the response distribution with two different modes, and we select the best candidate distribution through AIC. Mathematical examples are illustrated to verify the proposed method.

Comparative Study of Reliability Analysis Methods for Discrete Bimodal Information (바이모달 이산정보에 대한 신뢰성해석 기법 비교)

  • Lim, Woochul;Jang, Junyong;Lee, Tae Hee
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.7
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    • pp.883-889
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    • 2013
  • The distribution of a response usually depends on the distribution of a variable. When the distribution of a variable has two different modes, the response also follows a distribution with two different modes. In most reliability analysis methods, the number of modes is irrelevant, but not the type of distribution. However, in actual problems, because information is often provided with two or more modes, it is important to estimate the distributions with two or more modes. Recently, some reliability analysis methods have been suggested for bimodal distributions. In this paper, we review some methods such as the Akaike information criterion (AIC) and maximum entropy principle (MEP) and compare them with the Monte Carlo simulation (MCS) using mathematical examples with two different modes.

Sedimentary Environment of Bimodal Shelf Sediments: Southern continental shelf of Korean Peninsula (복모드 대륙붕 퇴적물의 퇴적환경 연구: 한반도 남해대륙붕)

  • 방효기;민건홍
    • 한국해양학회지
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    • v.30 no.1
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    • pp.1-12
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    • 1995
  • The modal analysis was carried out for the total of 216 subface sediments of southern continental shelf of Korean peninsula. Sandy mud or muddy sand distributed in the range of 70∼100 m water depth revealed the bimodal type (sand and mud components). The relations of textural parameters obtained from every modal were consistent with those of shallow marine sediments. The characteristics of sand component between bimodal were as follows: (1) the distributions of mean grain size, sorting, shell content were repeatedly distributed like the directions of depth contour lines. (2) Sand component was composed of medium to fine sand (Mz, 1-3$\psi$) containing many shell fragments, a few pebbles, and iron-stained quartz. (3) The surface of quartz revealed the concordial breakage and V-shaped features formed at high energy environment. (4) In CM-pattern, sand component was plotted in rolling and bottom suspension area. These characteristics imply that sand component probably derives from shoreface sediments deposited at the beach environment.

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유도 결합 Ar/SF6 혼합 기체 방전에서의 전자 에너지 분포 측정을 통한 플라즈마 변수 연구

  • O, Seung-Ju;Lee, Hyo-Chang;Lee, Jeong-Gyu;Lee, Yeong-Gwang;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.440-440
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    • 2010
  • $SF_6$ 기체 및 Ar/$SF_6$ 혼합 기체 방전은 실제 반도체 및 디스플레이 공정에서 널리 쓰이고 있지만, 측정상의 어려움으로 인하여 정량적인 데이터 및 기본 연구가 부족한 실정이다. 본 연구는 유도 결합 Ar/$SF_6$ 혼합 기체 플라즈마에서 다양한 압력과 혼합 가스 비율에 따른 전자 에너지 분포 측정을 통한 플라즈마 변수 연구에 관한 내용이다. 낮은 가스 압력에서 $SF_6$ 기체의 혼합 비율이 증가함에 따라서 상대적으로 적은 전자 밀도 감소와 전자 온도의 증가가 보였다. 하지만, 높은 가스 압력에서 $SF_6$ 기체의 혼합 비율이 증가함에 따라 상당한 전자 밀도 감소와 급격한 전자 온도 증가 (~ 9 eV)가 관찰되었다. 이러한 전자 온도와 전자 밀도의 극적인 변화는 $SF_6$ 기체 증가에 의한 전자-중성종 충돌과 음이온 생성으로 인한 것으로 여겨지며, 유체 모델 및 전자 가열 모드를 고려하여 해석하였다.

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Latent class model for mixed variables with applications to text data (혼합모드 잠재범주모형을 통한 텍스트 자료의 분석)

  • Shin, Hyun Soo;Seo, Byungtae
    • The Korean Journal of Applied Statistics
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    • v.32 no.6
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    • pp.837-849
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    • 2019
  • Latent class models (LCM) are useful tools to draw hidden information from categorical data. This model can also be interpreted as a mixture model with multinomial component distributions. In some cases, however, an available dataset may contain both categorical and count or continuous data. For such cases, we can extend the LCM to a mixture model with both multinomial and other component distributions such as normal and Poisson distributions. In this paper, we consider a LCM for the data containing categorical and count data to analyze the Drug Review dataset which contains categorical responses and text review. From this data analysis, we show that we can obtain more specific hidden inforamtion than those from the LCM only with categorical responses.

A Study on Source Mechanisms of Micro-Cracks Induced by Rock Fracture (암석파괴시 발생되는 미세균열의 발생원에 대한 연구)

  • 김교원
    • The Journal of Engineering Geology
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    • v.6 no.2
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    • pp.59-64
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    • 1996
  • Acoustic Emission(AE) signals are emitted by a sudden release of strain energy associated with material damage. A multi-channels of LeCroy system and piezoelectric pressure transducers are employed for AE measurement to investigate the roles of AE in the propagation of macro cracks as well as the characteris-tics of AE wave in occurrence, amplitude and dominant frequency with changes in macro loading modes. Deduced crack opening volume of micro cracks varied widely and implies that AE events could be caused by crystal dislocations on a small scale and grain boundary movements on a large scale. Amplitude of first arrival AE wave emitted during mode I test was approximately 3 times higher than those from mixed mode test, while the number of AE count in mode I test was only 25% of mixed mode. It may imply that the total energy required for generation of a given fracture surface is similar regardless in change of macroloading modes.

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Measuring CO Concentration in a Flame with Broadband CARS (광대역 CARS를 이용한 불꽃 내부의 CO 농도 측정)

  • 한재원
    • Korean Journal of Optics and Photonics
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    • v.4 no.2
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    • pp.212-219
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    • 1993
  • To reduce the mode noise induced from a multimode dye laser, a modeless laser generating amplified spontaneous emission was used as Stokes beam of the broadband CARS. A new technique for measuring species concentration from the modulation dip of nonresonant background of broadband CARS spectrum was proposed. The modulation dip was numerically calculated and fitted as a function of the concentration of the minor species and temperature of gas sample. We applied this technique in measuring CO concentration in a static cell and also the profile of CO concentration in a CHdair premixed flame of a counterflow burner.

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3-Node Relaxed-Equiribrium Hybrid-Mixed Curved Beam Elements (완화된 평형조건을 만족하는 응력함수를 가지는 3절점 혼합 곡선보요소)

  • Kim, Jin-Gon
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.21 no.2
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    • pp.153-160
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    • 2008
  • In this study, we propose a new three-node hybrid-mixed curved beam element with the relaxed-equiribrium stress functions for static analysis. The proposed element considering shear deformation is based on the Hellinger-Reissner variational principle. The stress functions are carefully chosen from three important considerations: (i) all the kinematic deformation modes must be suppressed, and (ii) the spurious constraints must be removed in the limiting behaviors via the field-consistency, and (iii) the relaxed equilibrium conditions could be incorporated because it might be impossible to select the stress functions and parameters to fully satisfy both the equiribrium conditions and the suppression of kinematic deformation modes in the three-node curved beam hybrid-mixed formulation. Numerical examples confirm the superior and stable behavior of the proposed element regardless of slenderness ratio and curvature. Besides, the proposed element shows the outstanding performance in predicting the stress resultant distributions.